# Atomic Layer Deposition (ALD)

Recorded Tabulus experiment artifacts for the **Atomic Layer Deposition** corpus.

## Papers

- `Cremers_2019/` — Cremers, Puurunen & Dendooven (2019), *Conformality in atomic layer deposition: Current status overview of analysis and modelling*. DOI: [10.1063/1.5060967](https://doi.org/10.1063/1.5060967)
- `Miikkulainen_2013/` — Miikkulainen et al. (2013), *Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends*. DOI: [10.1063/1.4757907](https://doi.org/10.1063/1.4757907)
- `Puurunen_2005/` — Puurunen (2005), *Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process*. DOI: [10.1063/1.1940727](https://doi.org/10.1063/1.1940727)

Each paper directory follows the same Step 1–7 organization described in the
top-level `README.md`. Adapter-specific subdirectories preserve the actual
execution granularity of the recorded runs.