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SciKnowOrg
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tabulus-runs

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scientific-literature
table-extraction
document-understanding
information-extraction
bibliography
citation-matching
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  1. .gitattributes +7 -0
  2. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/gpu_samples.csv +850 -0
  3. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019.md +0 -0
  4. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_content_list.json +0 -0
  5. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_content_list_v2.json +0 -0
  6. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_middle.json +0 -0
  7. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_model.json +0 -0
  8. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/tabulus_run.txt +7 -0
  9. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/profiling.time.txt +23 -0
  10. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/run_metadata.json +164 -0
  11. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_009_table_001.jpg +3 -0
  12. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_015_table_002.jpg +3 -0
  13. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_016_table_003.jpg +3 -0
  14. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_017_table_004.jpg +3 -0
  15. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_018_table_005.jpg +3 -0
  16. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_019_table_006.jpg +3 -0
  17. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_019_table_007.jpg +3 -0
  18. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_020_table_008.jpg +3 -0
  19. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_020_table_009.jpg +3 -0
  20. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_022_table_010.jpg +3 -0
  21. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_023_table_011.jpg +3 -0
  22. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_024_table_012.jpg +3 -0
  23. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_025_table_013.jpg +3 -0
  24. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_026_table_014.jpg +3 -0
  25. ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/tables_index.json +305 -0
  26. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/gpu_samples.csv +623 -0
  27. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019.md +0 -0
  28. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_content_list.json +0 -0
  29. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_content_list_v2.json +0 -0
  30. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_middle.json +0 -0
  31. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_model.json +0 -0
  32. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/tabulus_run.txt +7 -0
  33. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/profiling.time.txt +23 -0
  34. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/run_metadata.json +166 -0
  35. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_009_table_001.jpg +3 -0
  36. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_015_table_002.jpg +3 -0
  37. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_016_table_003.jpg +3 -0
  38. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_017_table_004.jpg +3 -0
  39. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_018_table_005.jpg +3 -0
  40. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_019_table_006.jpg +3 -0
  41. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_019_table_007.jpg +3 -0
  42. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_020_table_008.jpg +3 -0
  43. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_020_table_009.jpg +3 -0
  44. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_022_table_010.jpg +3 -0
  45. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_023_table_011.jpg +3 -0
  46. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_024_table_012.jpg +3 -0
  47. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_025_table_013.jpg +3 -0
  48. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_026_table_014.jpg +3 -0
  49. ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/tables_index.json +305 -0
  50. ALD/Cremers_2019/step1/pipeline/20260903T120211Z__ald__mineru-pipeline__slurm-32733/mineru-output/auto/Cremers - 2019.md +0 -0
.gitattributes CHANGED
@@ -58,3 +58,10 @@ saved_model/**/* filter=lfs diff=lfs merge=lfs -text
58
  # Video files - compressed
59
  *.mp4 filter=lfs diff=lfs merge=lfs -text
60
  *.webm filter=lfs diff=lfs merge=lfs -text
 
 
 
 
 
 
 
 
58
  # Video files - compressed
59
  *.mp4 filter=lfs diff=lfs merge=lfs -text
60
  *.webm filter=lfs diff=lfs merge=lfs -text
61
+ ALD/Miikkulainen_2013/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Miikkulainen[[:space:]]2013_middle.json filter=lfs diff=lfs merge=lfs -text
62
+ ALD/Miikkulainen_2013/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Miikkulainen[[:space:]]2013_middle.json filter=lfs diff=lfs merge=lfs -text
63
+ ALD/Miikkulainen_2013/step1/pipeline/20260903T141543Z__ald__mineru-pipeline__slurm-32738/mineru-output/auto/Miikkulainen[[:space:]]2013_middle.json filter=lfs diff=lfs merge=lfs -text
64
+ ALD/Miikkulainen_2013/step6/references/reference_resolution.json filter=lfs diff=lfs merge=lfs -text
65
+ ALD/Puurunen_2005/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Puurunen[[:space:]]-[[:space:]]February[[:space:]]2005_middle.json filter=lfs diff=lfs merge=lfs -text
66
+ ALD/Puurunen_2005/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Puurunen[[:space:]]-[[:space:]]February[[:space:]]2005_middle.json filter=lfs diff=lfs merge=lfs -text
67
+ ALD/Puurunen_2005/step6/references/reference_resolution.json filter=lfs diff=lfs merge=lfs -text
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/gpu_samples.csv ADDED
@@ -0,0 +1,850 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ timestamp_utc,index,uuid,name,memory_total_mib,memory_used_mib
2
+ 2026-09-03T12:02:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
3
+ 2026-09-03T12:02:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
4
+ 2026-09-03T12:02:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
5
+ 2026-09-03T12:02:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
6
+ 2026-09-03T12:02:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
7
+ 2026-09-03T12:02:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
8
+ 2026-09-03T12:02:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
9
+ 2026-09-03T12:02:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
10
+ 2026-09-03T12:02:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
11
+ 2026-09-03T12:02:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
12
+ 2026-09-03T12:02:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
13
+ 2026-09-03T12:02:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
14
+ 2026-09-03T12:02:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
15
+ 2026-09-03T12:02:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
16
+ 2026-09-03T12:02:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
17
+ 2026-09-03T12:02:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
18
+ 2026-09-03T12:02:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
19
+ 2026-09-03T12:02:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
20
+ 2026-09-03T12:02:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
21
+ 2026-09-03T12:02:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
22
+ 2026-09-03T12:02:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
23
+ 2026-09-03T12:02:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
24
+ 2026-09-03T12:02:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
25
+ 2026-09-03T12:02:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
26
+ 2026-09-03T12:02:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
27
+ 2026-09-03T12:02:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
28
+ 2026-09-03T12:02:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
29
+ 2026-09-03T12:02:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
30
+ 2026-09-03T12:02:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
31
+ 2026-09-03T12:02:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
32
+ 2026-09-03T12:02:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
33
+ 2026-09-03T12:02:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
34
+ 2026-09-03T12:02:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
35
+ 2026-09-03T12:02:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
36
+ 2026-09-03T12:02:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
37
+ 2026-09-03T12:02:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
38
+ 2026-09-03T12:02:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
39
+ 2026-09-03T12:02:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
40
+ 2026-09-03T12:02:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
41
+ 2026-09-03T12:02:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
42
+ 2026-09-03T12:02:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
43
+ 2026-09-03T12:02:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
44
+ 2026-09-03T12:02:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
45
+ 2026-09-03T12:02:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
46
+ 2026-09-03T12:02:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
47
+ 2026-09-03T12:02:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,0.0
48
+ 2026-09-03T12:02:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
49
+ 2026-09-03T12:02:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
50
+ 2026-09-03T12:03:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
51
+ 2026-09-03T12:03:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
52
+ 2026-09-03T12:03:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
53
+ 2026-09-03T12:03:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
54
+ 2026-09-03T12:03:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
55
+ 2026-09-03T12:03:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
56
+ 2026-09-03T12:03:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
57
+ 2026-09-03T12:03:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
58
+ 2026-09-03T12:03:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
59
+ 2026-09-03T12:03:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
60
+ 2026-09-03T12:03:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
61
+ 2026-09-03T12:03:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
62
+ 2026-09-03T12:03:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
63
+ 2026-09-03T12:03:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
64
+ 2026-09-03T12:03:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
65
+ 2026-09-03T12:03:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
66
+ 2026-09-03T12:03:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
67
+ 2026-09-03T12:03:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
68
+ 2026-09-03T12:03:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
69
+ 2026-09-03T12:03:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
70
+ 2026-09-03T12:03:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
71
+ 2026-09-03T12:03:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
72
+ 2026-09-03T12:03:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
73
+ 2026-09-03T12:03:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
74
+ 2026-09-03T12:03:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
75
+ 2026-09-03T12:03:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
76
+ 2026-09-03T12:03:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
77
+ 2026-09-03T12:03:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
78
+ 2026-09-03T12:03:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
79
+ 2026-09-03T12:03:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
80
+ 2026-09-03T12:03:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
81
+ 2026-09-03T12:03:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
82
+ 2026-09-03T12:03:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
83
+ 2026-09-03T12:03:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
84
+ 2026-09-03T12:03:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
85
+ 2026-09-03T12:03:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
86
+ 2026-09-03T12:03:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
87
+ 2026-09-03T12:03:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
88
+ 2026-09-03T12:03:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
89
+ 2026-09-03T12:03:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
90
+ 2026-09-03T12:03:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
91
+ 2026-09-03T12:03:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
92
+ 2026-09-03T12:03:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
93
+ 2026-09-03T12:03:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
94
+ 2026-09-03T12:03:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
95
+ 2026-09-03T12:03:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
96
+ 2026-09-03T12:03:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
97
+ 2026-09-03T12:03:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
98
+ 2026-09-03T12:03:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
99
+ 2026-09-03T12:03:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
100
+ 2026-09-03T12:03:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
101
+ 2026-09-03T12:03:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
102
+ 2026-09-03T12:03:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
103
+ 2026-09-03T12:03:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
104
+ 2026-09-03T12:03:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
105
+ 2026-09-03T12:03:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
106
+ 2026-09-03T12:03:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
107
+ 2026-09-03T12:04:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
108
+ 2026-09-03T12:04:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
109
+ 2026-09-03T12:04:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
110
+ 2026-09-03T12:04:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
111
+ 2026-09-03T12:04:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
112
+ 2026-09-03T12:04:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
113
+ 2026-09-03T12:04:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
114
+ 2026-09-03T12:04:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
115
+ 2026-09-03T12:04:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
116
+ 2026-09-03T12:04:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
117
+ 2026-09-03T12:04:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
118
+ 2026-09-03T12:04:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
119
+ 2026-09-03T12:04:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
120
+ 2026-09-03T12:04:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
121
+ 2026-09-03T12:04:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
122
+ 2026-09-03T12:04:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
123
+ 2026-09-03T12:04:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
124
+ 2026-09-03T12:04:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
125
+ 2026-09-03T12:04:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
126
+ 2026-09-03T12:04:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
127
+ 2026-09-03T12:04:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
128
+ 2026-09-03T12:04:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
129
+ 2026-09-03T12:04:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
130
+ 2026-09-03T12:04:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
131
+ 2026-09-03T12:04:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
132
+ 2026-09-03T12:04:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
133
+ 2026-09-03T12:04:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
134
+ 2026-09-03T12:04:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
135
+ 2026-09-03T12:04:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
136
+ 2026-09-03T12:04:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
137
+ 2026-09-03T12:04:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
138
+ 2026-09-03T12:04:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
139
+ 2026-09-03T12:04:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
140
+ 2026-09-03T12:04:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
141
+ 2026-09-03T12:04:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
142
+ 2026-09-03T12:04:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
143
+ 2026-09-03T12:04:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
144
+ 2026-09-03T12:04:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
145
+ 2026-09-03T12:04:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
146
+ 2026-09-03T12:04:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
147
+ 2026-09-03T12:04:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
148
+ 2026-09-03T12:04:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
149
+ 2026-09-03T12:04:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
150
+ 2026-09-03T12:04:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
151
+ 2026-09-03T12:04:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
152
+ 2026-09-03T12:04:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
153
+ 2026-09-03T12:04:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
154
+ 2026-09-03T12:04:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
155
+ 2026-09-03T12:04:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
156
+ 2026-09-03T12:04:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
157
+ 2026-09-03T12:04:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
158
+ 2026-09-03T12:04:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
159
+ 2026-09-03T12:04:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
160
+ 2026-09-03T12:04:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
161
+ 2026-09-03T12:04:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
162
+ 2026-09-03T12:04:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
163
+ 2026-09-03T12:04:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
164
+ 2026-09-03T12:04:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
165
+ 2026-09-03T12:04:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
166
+ 2026-09-03T12:05:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
167
+ 2026-09-03T12:05:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
168
+ 2026-09-03T12:05:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
169
+ 2026-09-03T12:05:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
170
+ 2026-09-03T12:05:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
171
+ 2026-09-03T12:05:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
172
+ 2026-09-03T12:05:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
173
+ 2026-09-03T12:05:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
174
+ 2026-09-03T12:05:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
175
+ 2026-09-03T12:05:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
176
+ 2026-09-03T12:05:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
177
+ 2026-09-03T12:05:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
178
+ 2026-09-03T12:05:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
179
+ 2026-09-03T12:05:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
180
+ 2026-09-03T12:05:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
181
+ 2026-09-03T12:05:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
182
+ 2026-09-03T12:05:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
183
+ 2026-09-03T12:05:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
184
+ 2026-09-03T12:05:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
185
+ 2026-09-03T12:05:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
186
+ 2026-09-03T12:05:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
187
+ 2026-09-03T12:05:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
188
+ 2026-09-03T12:05:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
189
+ 2026-09-03T12:05:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
190
+ 2026-09-03T12:05:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
191
+ 2026-09-03T12:05:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
192
+ 2026-09-03T12:05:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
193
+ 2026-09-03T12:05:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
194
+ 2026-09-03T12:05:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
195
+ 2026-09-03T12:05:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
196
+ 2026-09-03T12:05:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
197
+ 2026-09-03T12:05:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
198
+ 2026-09-03T12:05:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
199
+ 2026-09-03T12:05:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
200
+ 2026-09-03T12:05:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
201
+ 2026-09-03T12:05:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
202
+ 2026-09-03T12:05:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
203
+ 2026-09-03T12:05:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
204
+ 2026-09-03T12:05:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
205
+ 2026-09-03T12:05:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
206
+ 2026-09-03T12:05:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
207
+ 2026-09-03T12:05:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
208
+ 2026-09-03T12:05:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
209
+ 2026-09-03T12:05:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
210
+ 2026-09-03T12:05:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
211
+ 2026-09-03T12:05:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
212
+ 2026-09-03T12:05:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
213
+ 2026-09-03T12:05:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
214
+ 2026-09-03T12:05:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
215
+ 2026-09-03T12:05:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
216
+ 2026-09-03T12:05:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
217
+ 2026-09-03T12:05:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
218
+ 2026-09-03T12:05:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
219
+ 2026-09-03T12:05:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
220
+ 2026-09-03T12:05:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
221
+ 2026-09-03T12:05:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
222
+ 2026-09-03T12:05:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
223
+ 2026-09-03T12:06:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
224
+ 2026-09-03T12:06:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
225
+ 2026-09-03T12:06:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
226
+ 2026-09-03T12:06:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
227
+ 2026-09-03T12:06:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
228
+ 2026-09-03T12:06:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
229
+ 2026-09-03T12:06:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,435.0
230
+ 2026-09-03T12:06:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,435.0
231
+ 2026-09-03T12:06:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
232
+ 2026-09-03T12:06:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
233
+ 2026-09-03T12:06:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
234
+ 2026-09-03T12:06:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
235
+ 2026-09-03T12:06:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
236
+ 2026-09-03T12:06:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,547.0
237
+ 2026-09-03T12:06:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
238
+ 2026-09-03T12:06:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
239
+ 2026-09-03T12:06:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
240
+ 2026-09-03T12:06:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
241
+ 2026-09-03T12:06:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
242
+ 2026-09-03T12:06:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
243
+ 2026-09-03T12:06:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
244
+ 2026-09-03T12:06:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
245
+ 2026-09-03T12:06:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
246
+ 2026-09-03T12:06:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
247
+ 2026-09-03T12:06:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
248
+ 2026-09-03T12:06:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
249
+ 2026-09-03T12:06:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
250
+ 2026-09-03T12:06:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
251
+ 2026-09-03T12:06:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
252
+ 2026-09-03T12:06:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
253
+ 2026-09-03T12:06:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
254
+ 2026-09-03T12:06:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
255
+ 2026-09-03T12:06:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
256
+ 2026-09-03T12:06:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
257
+ 2026-09-03T12:06:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
258
+ 2026-09-03T12:06:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
259
+ 2026-09-03T12:06:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
260
+ 2026-09-03T12:06:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
261
+ 2026-09-03T12:06:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
262
+ 2026-09-03T12:06:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
263
+ 2026-09-03T12:06:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
264
+ 2026-09-03T12:06:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
265
+ 2026-09-03T12:06:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3079.0
266
+ 2026-09-03T12:06:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3085.0
267
+ 2026-09-03T12:06:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3745.0
268
+ 2026-09-03T12:06:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3745.0
269
+ 2026-09-03T12:06:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3745.0
270
+ 2026-09-03T12:06:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3745.0
271
+ 2026-09-03T12:06:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3745.0
272
+ 2026-09-03T12:06:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3825.0
273
+ 2026-09-03T12:06:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
274
+ 2026-09-03T12:06:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
275
+ 2026-09-03T12:06:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
276
+ 2026-09-03T12:06:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
277
+ 2026-09-03T12:06:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
278
+ 2026-09-03T12:06:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
279
+ 2026-09-03T12:06:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
280
+ 2026-09-03T12:06:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
281
+ 2026-09-03T12:06:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
282
+ 2026-09-03T12:07:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
283
+ 2026-09-03T12:07:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
284
+ 2026-09-03T12:07:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
285
+ 2026-09-03T12:07:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
286
+ 2026-09-03T12:07:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
287
+ 2026-09-03T12:07:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
288
+ 2026-09-03T12:07:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
289
+ 2026-09-03T12:07:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
290
+ 2026-09-03T12:07:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
291
+ 2026-09-03T12:07:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
292
+ 2026-09-03T12:07:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
293
+ 2026-09-03T12:07:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
294
+ 2026-09-03T12:07:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
295
+ 2026-09-03T12:07:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
296
+ 2026-09-03T12:07:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4867.0
297
+ 2026-09-03T12:07:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4867.0
298
+ 2026-09-03T12:07:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3129.0
299
+ 2026-09-03T12:07:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3157.0
300
+ 2026-09-03T12:07:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3165.0
301
+ 2026-09-03T12:07:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22255.0
302
+ 2026-09-03T12:07:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22371.0
303
+ 2026-09-03T12:07:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
304
+ 2026-09-03T12:07:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
305
+ 2026-09-03T12:07:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
306
+ 2026-09-03T12:07:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
307
+ 2026-09-03T12:07:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
308
+ 2026-09-03T12:07:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
309
+ 2026-09-03T12:07:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
310
+ 2026-09-03T12:07:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
311
+ 2026-09-03T12:07:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
312
+ 2026-09-03T12:07:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
313
+ 2026-09-03T12:07:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
314
+ 2026-09-03T12:07:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
315
+ 2026-09-03T12:07:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
316
+ 2026-09-03T12:07:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
317
+ 2026-09-03T12:07:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
318
+ 2026-09-03T12:07:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
319
+ 2026-09-03T12:07:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
320
+ 2026-09-03T12:07:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
321
+ 2026-09-03T12:07:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
322
+ 2026-09-03T12:07:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
323
+ 2026-09-03T12:07:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
324
+ 2026-09-03T12:07:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
325
+ 2026-09-03T12:07:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
326
+ 2026-09-03T12:07:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23254.0
327
+ 2026-09-03T12:07:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23694.0
328
+ 2026-09-03T12:07:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23694.0
329
+ 2026-09-03T12:07:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23694.0
330
+ 2026-09-03T12:07:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23694.0
331
+ 2026-09-03T12:07:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24010.0
332
+ 2026-09-03T12:07:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25070.0
333
+ 2026-09-03T12:07:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25482.0
334
+ 2026-09-03T12:07:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25492.0
335
+ 2026-09-03T12:07:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25492.0
336
+ 2026-09-03T12:07:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25492.0
337
+ 2026-09-03T12:07:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25498.0
338
+ 2026-09-03T12:07:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25498.0
339
+ 2026-09-03T12:07:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25498.0
340
+ 2026-09-03T12:08:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25850.0
341
+ 2026-09-03T12:08:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25854.0
342
+ 2026-09-03T12:08:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25854.0
343
+ 2026-09-03T12:08:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25854.0
344
+ 2026-09-03T12:08:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25910.0
345
+ 2026-09-03T12:08:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
346
+ 2026-09-03T12:08:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
347
+ 2026-09-03T12:08:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
348
+ 2026-09-03T12:08:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
349
+ 2026-09-03T12:08:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
350
+ 2026-09-03T12:08:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26318.0
351
+ 2026-09-03T12:08:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26324.0
352
+ 2026-09-03T12:08:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26324.0
353
+ 2026-09-03T12:08:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26324.0
354
+ 2026-09-03T12:08:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
355
+ 2026-09-03T12:08:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
356
+ 2026-09-03T12:08:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
357
+ 2026-09-03T12:08:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
358
+ 2026-09-03T12:08:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
359
+ 2026-09-03T12:08:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
360
+ 2026-09-03T12:08:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
361
+ 2026-09-03T12:08:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26326.0
362
+ 2026-09-03T12:08:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
363
+ 2026-09-03T12:08:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26334.0
364
+ 2026-09-03T12:08:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26334.0
365
+ 2026-09-03T12:08:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26334.0
366
+ 2026-09-03T12:08:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26336.0
367
+ 2026-09-03T12:08:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26336.0
368
+ 2026-09-03T12:08:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26336.0
369
+ 2026-09-03T12:08:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26336.0
370
+ 2026-09-03T12:08:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26338.0
371
+ 2026-09-03T12:08:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26338.0
372
+ 2026-09-03T12:08:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26338.0
373
+ 2026-09-03T12:08:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27562.0
374
+ 2026-09-03T12:08:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27562.0
375
+ 2026-09-03T12:08:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27562.0
376
+ 2026-09-03T12:08:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27562.0
377
+ 2026-09-03T12:08:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27562.0
378
+ 2026-09-03T12:08:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27562.0
379
+ 2026-09-03T12:08:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27562.0
380
+ 2026-09-03T12:08:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27572.0
381
+ 2026-09-03T12:08:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24298.0
382
+ 2026-09-03T12:08:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24298.0
383
+ 2026-09-03T12:08:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24298.0
384
+ 2026-09-03T12:08:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24298.0
385
+ 2026-09-03T12:08:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24298.0
386
+ 2026-09-03T12:08:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24298.0
387
+ 2026-09-03T12:08:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24298.0
388
+ 2026-09-03T12:08:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1109.0
389
+ 2026-09-03T12:08:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1109.0
390
+ 2026-09-03T12:08:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1109.0
391
+ 2026-09-03T12:08:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1109.0
392
+ 2026-09-03T12:08:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1109.0
393
+ 2026-09-03T12:08:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
394
+ 2026-09-03T12:08:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
395
+ 2026-09-03T12:08:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
396
+ 2026-09-03T12:08:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
397
+ 2026-09-03T12:08:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
398
+ 2026-09-03T12:09:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
399
+ 2026-09-03T12:09:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
400
+ 2026-09-03T12:09:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
401
+ 2026-09-03T12:09:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
402
+ 2026-09-03T12:09:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
403
+ 2026-09-03T12:09:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
404
+ 2026-09-03T12:09:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
405
+ 2026-09-03T12:09:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
406
+ 2026-09-03T12:09:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
407
+ 2026-09-03T12:09:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
408
+ 2026-09-03T12:09:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
409
+ 2026-09-03T12:09:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
410
+ 2026-09-03T12:09:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
411
+ 2026-09-03T12:09:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
412
+ 2026-09-03T12:09:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
413
+ 2026-09-03T12:09:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
414
+ 2026-09-03T12:09:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
415
+ 2026-09-03T12:09:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
416
+ 2026-09-03T12:09:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
417
+ 2026-09-03T12:09:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
418
+ 2026-09-03T12:09:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
419
+ 2026-09-03T12:09:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
420
+ 2026-09-03T12:09:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
421
+ 2026-09-03T12:09:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
422
+ 2026-09-03T12:09:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
423
+ 2026-09-03T12:09:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
424
+ 2026-09-03T12:09:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
425
+ 2026-09-03T12:09:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
426
+ 2026-09-03T12:09:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
427
+ 2026-09-03T12:09:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
428
+ 2026-09-03T12:09:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
429
+ 2026-09-03T12:09:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
430
+ 2026-09-03T12:09:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
431
+ 2026-09-03T12:09:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
432
+ 2026-09-03T12:09:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
433
+ 2026-09-03T12:09:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
434
+ 2026-09-03T12:09:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
435
+ 2026-09-03T12:09:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
436
+ 2026-09-03T12:09:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
437
+ 2026-09-03T12:09:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
438
+ 2026-09-03T12:09:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
439
+ 2026-09-03T12:09:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
440
+ 2026-09-03T12:09:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
441
+ 2026-09-03T12:09:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
442
+ 2026-09-03T12:09:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
443
+ 2026-09-03T12:09:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
444
+ 2026-09-03T12:09:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
445
+ 2026-09-03T12:09:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
446
+ 2026-09-03T12:09:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
447
+ 2026-09-03T12:09:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
448
+ 2026-09-03T12:09:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
449
+ 2026-09-03T12:09:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
450
+ 2026-09-03T12:09:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
451
+ 2026-09-03T12:09:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
452
+ 2026-09-03T12:09:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
453
+ 2026-09-03T12:09:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
454
+ 2026-09-03T12:09:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
455
+ 2026-09-03T12:10:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
456
+ 2026-09-03T12:10:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
457
+ 2026-09-03T12:10:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
458
+ 2026-09-03T12:10:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
459
+ 2026-09-03T12:10:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
460
+ 2026-09-03T12:10:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
461
+ 2026-09-03T12:10:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
462
+ 2026-09-03T12:10:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
463
+ 2026-09-03T12:10:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
464
+ 2026-09-03T12:10:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
465
+ 2026-09-03T12:10:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
466
+ 2026-09-03T12:10:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
467
+ 2026-09-03T12:10:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
468
+ 2026-09-03T12:10:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
469
+ 2026-09-03T12:10:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
470
+ 2026-09-03T12:10:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
471
+ 2026-09-03T12:10:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
472
+ 2026-09-03T12:10:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
473
+ 2026-09-03T12:10:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
474
+ 2026-09-03T12:10:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
475
+ 2026-09-03T12:10:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
476
+ 2026-09-03T12:10:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
477
+ 2026-09-03T12:10:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
478
+ 2026-09-03T12:10:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
479
+ 2026-09-03T12:10:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
480
+ 2026-09-03T12:10:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
481
+ 2026-09-03T12:10:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
482
+ 2026-09-03T12:10:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
483
+ 2026-09-03T12:10:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
484
+ 2026-09-03T12:10:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
485
+ 2026-09-03T12:10:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
486
+ 2026-09-03T12:10:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
487
+ 2026-09-03T12:10:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
488
+ 2026-09-03T12:10:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
489
+ 2026-09-03T12:10:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
490
+ 2026-09-03T12:10:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
491
+ 2026-09-03T12:10:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
492
+ 2026-09-03T12:10:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
493
+ 2026-09-03T12:10:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
494
+ 2026-09-03T12:10:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
495
+ 2026-09-03T12:10:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
496
+ 2026-09-03T12:10:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
497
+ 2026-09-03T12:10:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
498
+ 2026-09-03T12:10:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
499
+ 2026-09-03T12:10:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
500
+ 2026-09-03T12:10:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,435.0
501
+ 2026-09-03T12:10:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
502
+ 2026-09-03T12:10:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
503
+ 2026-09-03T12:10:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
504
+ 2026-09-03T12:10:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
505
+ 2026-09-03T12:10:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
506
+ 2026-09-03T12:10:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
507
+ 2026-09-03T12:10:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
508
+ 2026-09-03T12:10:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3745.0
509
+ 2026-09-03T12:10:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
510
+ 2026-09-03T12:10:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
511
+ 2026-09-03T12:10:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
512
+ 2026-09-03T12:10:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
513
+ 2026-09-03T12:10:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
514
+ 2026-09-03T12:11:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
515
+ 2026-09-03T12:11:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
516
+ 2026-09-03T12:11:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
517
+ 2026-09-03T12:11:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
518
+ 2026-09-03T12:11:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
519
+ 2026-09-03T12:11:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
520
+ 2026-09-03T12:11:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4867.0
521
+ 2026-09-03T12:11:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3121.0
522
+ 2026-09-03T12:11:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22343.0
523
+ 2026-09-03T12:11:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
524
+ 2026-09-03T12:11:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
525
+ 2026-09-03T12:11:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
526
+ 2026-09-03T12:11:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
527
+ 2026-09-03T12:11:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
528
+ 2026-09-03T12:11:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
529
+ 2026-09-03T12:11:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
530
+ 2026-09-03T12:11:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
531
+ 2026-09-03T12:11:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
532
+ 2026-09-03T12:11:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
533
+ 2026-09-03T12:11:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
534
+ 2026-09-03T12:11:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
535
+ 2026-09-03T12:11:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
536
+ 2026-09-03T12:11:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
537
+ 2026-09-03T12:11:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
538
+ 2026-09-03T12:11:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
539
+ 2026-09-03T12:11:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
540
+ 2026-09-03T12:11:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
541
+ 2026-09-03T12:11:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
542
+ 2026-09-03T12:11:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
543
+ 2026-09-03T12:11:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
544
+ 2026-09-03T12:11:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
545
+ 2026-09-03T12:11:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
546
+ 2026-09-03T12:11:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
547
+ 2026-09-03T12:11:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
548
+ 2026-09-03T12:11:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23254.0
549
+ 2026-09-03T12:11:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25492.0
550
+ 2026-09-03T12:11:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25498.0
551
+ 2026-09-03T12:11:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25850.0
552
+ 2026-09-03T12:11:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25850.0
553
+ 2026-09-03T12:11:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25850.0
554
+ 2026-09-03T12:11:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25850.0
555
+ 2026-09-03T12:11:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26312.0
556
+ 2026-09-03T12:11:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26312.0
557
+ 2026-09-03T12:11:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26312.0
558
+ 2026-09-03T12:11:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26312.0
559
+ 2026-09-03T12:11:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26312.0
560
+ 2026-09-03T12:11:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26312.0
561
+ 2026-09-03T12:11:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26312.0
562
+ 2026-09-03T12:11:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26314.0
563
+ 2026-09-03T12:11:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26314.0
564
+ 2026-09-03T12:11:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26314.0
565
+ 2026-09-03T12:11:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26314.0
566
+ 2026-09-03T12:11:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26766.0
567
+ 2026-09-03T12:11:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26998.0
568
+ 2026-09-03T12:11:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27000.0
569
+ 2026-09-03T12:11:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
570
+ 2026-09-03T12:11:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
571
+ 2026-09-03T12:12:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
572
+ 2026-09-03T12:12:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
573
+ 2026-09-03T12:12:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
574
+ 2026-09-03T12:12:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
575
+ 2026-09-03T12:12:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
576
+ 2026-09-03T12:12:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
577
+ 2026-09-03T12:12:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
578
+ 2026-09-03T12:12:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
579
+ 2026-09-03T12:12:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
580
+ 2026-09-03T12:12:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
581
+ 2026-09-03T12:12:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
582
+ 2026-09-03T12:12:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27004.0
583
+ 2026-09-03T12:12:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27014.0
584
+ 2026-09-03T12:12:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
585
+ 2026-09-03T12:12:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
586
+ 2026-09-03T12:12:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
587
+ 2026-09-03T12:12:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
588
+ 2026-09-03T12:12:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
589
+ 2026-09-03T12:12:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
590
+ 2026-09-03T12:12:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
591
+ 2026-09-03T12:12:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
592
+ 2026-09-03T12:12:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
593
+ 2026-09-03T12:12:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27018.0
594
+ 2026-09-03T12:12:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
595
+ 2026-09-03T12:12:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
596
+ 2026-09-03T12:12:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
597
+ 2026-09-03T12:12:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
598
+ 2026-09-03T12:12:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
599
+ 2026-09-03T12:12:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
600
+ 2026-09-03T12:12:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
601
+ 2026-09-03T12:12:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
602
+ 2026-09-03T12:12:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
603
+ 2026-09-03T12:12:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
604
+ 2026-09-03T12:12:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
605
+ 2026-09-03T12:12:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
606
+ 2026-09-03T12:12:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
607
+ 2026-09-03T12:12:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
608
+ 2026-09-03T12:12:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
609
+ 2026-09-03T12:12:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
610
+ 2026-09-03T12:12:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
611
+ 2026-09-03T12:12:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
612
+ 2026-09-03T12:12:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27028.0
613
+ 2026-09-03T12:12:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27030.0
614
+ 2026-09-03T12:12:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
615
+ 2026-09-03T12:12:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
616
+ 2026-09-03T12:12:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
617
+ 2026-09-03T12:12:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
618
+ 2026-09-03T12:12:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
619
+ 2026-09-03T12:12:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
620
+ 2026-09-03T12:12:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
621
+ 2026-09-03T12:12:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
622
+ 2026-09-03T12:12:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
623
+ 2026-09-03T12:12:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
624
+ 2026-09-03T12:12:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
625
+ 2026-09-03T12:12:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
626
+ 2026-09-03T12:12:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
627
+ 2026-09-03T12:12:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
628
+ 2026-09-03T12:12:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
629
+ 2026-09-03T12:13:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
630
+ 2026-09-03T12:13:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27930.0
631
+ 2026-09-03T12:13:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27942.0
632
+ 2026-09-03T12:13:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25150.0
633
+ 2026-09-03T12:13:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25150.0
634
+ 2026-09-03T12:13:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25150.0
635
+ 2026-09-03T12:13:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25150.0
636
+ 2026-09-03T12:13:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25150.0
637
+ 2026-09-03T12:13:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1279.0
638
+ 2026-09-03T12:13:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1279.0
639
+ 2026-09-03T12:13:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1279.0
640
+ 2026-09-03T12:13:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1279.0
641
+ 2026-09-03T12:13:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1279.0
642
+ 2026-09-03T12:13:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
643
+ 2026-09-03T12:13:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
644
+ 2026-09-03T12:13:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
645
+ 2026-09-03T12:13:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
646
+ 2026-09-03T12:13:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
647
+ 2026-09-03T12:13:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
648
+ 2026-09-03T12:13:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
649
+ 2026-09-03T12:13:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
650
+ 2026-09-03T12:13:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
651
+ 2026-09-03T12:13:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
652
+ 2026-09-03T12:13:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
653
+ 2026-09-03T12:13:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
654
+ 2026-09-03T12:13:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
655
+ 2026-09-03T12:13:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
656
+ 2026-09-03T12:13:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
657
+ 2026-09-03T12:13:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
658
+ 2026-09-03T12:13:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
659
+ 2026-09-03T12:13:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
660
+ 2026-09-03T12:13:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
661
+ 2026-09-03T12:13:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
662
+ 2026-09-03T12:13:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
663
+ 2026-09-03T12:13:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
664
+ 2026-09-03T12:13:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
665
+ 2026-09-03T12:13:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
666
+ 2026-09-03T12:13:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
667
+ 2026-09-03T12:13:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
668
+ 2026-09-03T12:13:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
669
+ 2026-09-03T12:13:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
670
+ 2026-09-03T12:13:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
671
+ 2026-09-03T12:13:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
672
+ 2026-09-03T12:13:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
673
+ 2026-09-03T12:13:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
674
+ 2026-09-03T12:13:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
675
+ 2026-09-03T12:13:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
676
+ 2026-09-03T12:13:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
677
+ 2026-09-03T12:13:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
678
+ 2026-09-03T12:13:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
679
+ 2026-09-03T12:13:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
680
+ 2026-09-03T12:13:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
681
+ 2026-09-03T12:13:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
682
+ 2026-09-03T12:13:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
683
+ 2026-09-03T12:13:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
684
+ 2026-09-03T12:13:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
685
+ 2026-09-03T12:13:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
686
+ 2026-09-03T12:14:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
687
+ 2026-09-03T12:14:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
688
+ 2026-09-03T12:14:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
689
+ 2026-09-03T12:14:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
690
+ 2026-09-03T12:14:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
691
+ 2026-09-03T12:14:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
692
+ 2026-09-03T12:14:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
693
+ 2026-09-03T12:14:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
694
+ 2026-09-03T12:14:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
695
+ 2026-09-03T12:14:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
696
+ 2026-09-03T12:14:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
697
+ 2026-09-03T12:14:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
698
+ 2026-09-03T12:14:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
699
+ 2026-09-03T12:14:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
700
+ 2026-09-03T12:14:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
701
+ 2026-09-03T12:14:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
702
+ 2026-09-03T12:14:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
703
+ 2026-09-03T12:14:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
704
+ 2026-09-03T12:14:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
705
+ 2026-09-03T12:14:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
706
+ 2026-09-03T12:14:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
707
+ 2026-09-03T12:14:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
708
+ 2026-09-03T12:14:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
709
+ 2026-09-03T12:14:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
710
+ 2026-09-03T12:14:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
711
+ 2026-09-03T12:14:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
712
+ 2026-09-03T12:14:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
713
+ 2026-09-03T12:14:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
714
+ 2026-09-03T12:14:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
715
+ 2026-09-03T12:14:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
716
+ 2026-09-03T12:14:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
717
+ 2026-09-03T12:14:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
718
+ 2026-09-03T12:14:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
719
+ 2026-09-03T12:14:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
720
+ 2026-09-03T12:14:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
721
+ 2026-09-03T12:14:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
722
+ 2026-09-03T12:14:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
723
+ 2026-09-03T12:14:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
724
+ 2026-09-03T12:14:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
725
+ 2026-09-03T12:14:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
726
+ 2026-09-03T12:14:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
727
+ 2026-09-03T12:14:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
728
+ 2026-09-03T12:14:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
729
+ 2026-09-03T12:14:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
730
+ 2026-09-03T12:14:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
731
+ 2026-09-03T12:14:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
732
+ 2026-09-03T12:14:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
733
+ 2026-09-03T12:14:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
734
+ 2026-09-03T12:14:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
735
+ 2026-09-03T12:14:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
736
+ 2026-09-03T12:14:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
737
+ 2026-09-03T12:14:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
738
+ 2026-09-03T12:14:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
739
+ 2026-09-03T12:14:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
740
+ 2026-09-03T12:14:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
741
+ 2026-09-03T12:14:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
742
+ 2026-09-03T12:14:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
743
+ 2026-09-03T12:14:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
744
+ 2026-09-03T12:14:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
745
+ 2026-09-03T12:15:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
746
+ 2026-09-03T12:15:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
747
+ 2026-09-03T12:15:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
748
+ 2026-09-03T12:15:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
749
+ 2026-09-03T12:15:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
750
+ 2026-09-03T12:15:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
751
+ 2026-09-03T12:15:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
752
+ 2026-09-03T12:15:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
753
+ 2026-09-03T12:15:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
754
+ 2026-09-03T12:15:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
755
+ 2026-09-03T12:15:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
756
+ 2026-09-03T12:15:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,545.0
757
+ 2026-09-03T12:15:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2213.0
758
+ 2026-09-03T12:15:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2781.0
759
+ 2026-09-03T12:15:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,2915.0
760
+ 2026-09-03T12:15:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3745.0
761
+ 2026-09-03T12:15:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
762
+ 2026-09-03T12:15:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
763
+ 2026-09-03T12:15:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
764
+ 2026-09-03T12:15:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
765
+ 2026-09-03T12:15:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
766
+ 2026-09-03T12:15:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
767
+ 2026-09-03T12:15:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
768
+ 2026-09-03T12:15:24Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
769
+ 2026-09-03T12:15:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4865.0
770
+ 2026-09-03T12:15:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,4867.0
771
+ 2026-09-03T12:15:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3121.0
772
+ 2026-09-03T12:15:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22385.0
773
+ 2026-09-03T12:15:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
774
+ 2026-09-03T12:15:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
775
+ 2026-09-03T12:15:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
776
+ 2026-09-03T12:15:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
777
+ 2026-09-03T12:15:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
778
+ 2026-09-03T12:15:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
779
+ 2026-09-03T12:15:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
780
+ 2026-09-03T12:15:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
781
+ 2026-09-03T12:15:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
782
+ 2026-09-03T12:15:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
783
+ 2026-09-03T12:15:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
784
+ 2026-09-03T12:15:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
785
+ 2026-09-03T12:15:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
786
+ 2026-09-03T12:15:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
787
+ 2026-09-03T12:15:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
788
+ 2026-09-03T12:15:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
789
+ 2026-09-03T12:15:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
790
+ 2026-09-03T12:15:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
791
+ 2026-09-03T12:15:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
792
+ 2026-09-03T12:15:49Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
793
+ 2026-09-03T12:15:50Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,22721.0
794
+ 2026-09-03T12:15:51Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23248.0
795
+ 2026-09-03T12:15:52Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,23694.0
796
+ 2026-09-03T12:15:53Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25498.0
797
+ 2026-09-03T12:15:54Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25850.0
798
+ 2026-09-03T12:15:55Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25854.0
799
+ 2026-09-03T12:15:56Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,25854.0
800
+ 2026-09-03T12:15:57Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
801
+ 2026-09-03T12:15:58Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
802
+ 2026-09-03T12:15:59Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
803
+ 2026-09-03T12:16:00Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
804
+ 2026-09-03T12:16:01Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
805
+ 2026-09-03T12:16:02Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26316.0
806
+ 2026-09-03T12:16:03Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26318.0
807
+ 2026-09-03T12:16:04Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26322.0
808
+ 2026-09-03T12:16:05Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26322.0
809
+ 2026-09-03T12:16:06Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26328.0
810
+ 2026-09-03T12:16:07Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
811
+ 2026-09-03T12:16:08Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
812
+ 2026-09-03T12:16:09Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
813
+ 2026-09-03T12:16:10Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
814
+ 2026-09-03T12:16:11Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
815
+ 2026-09-03T12:16:12Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
816
+ 2026-09-03T12:16:13Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
817
+ 2026-09-03T12:16:14Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
818
+ 2026-09-03T12:16:15Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
819
+ 2026-09-03T12:16:16Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26330.0
820
+ 2026-09-03T12:16:17Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26342.0
821
+ 2026-09-03T12:16:18Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26342.0
822
+ 2026-09-03T12:16:19Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,26802.0
823
+ 2026-09-03T12:16:20Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27522.0
824
+ 2026-09-03T12:16:21Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27522.0
825
+ 2026-09-03T12:16:22Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27522.0
826
+ 2026-09-03T12:16:23Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27522.0
827
+ 2026-09-03T12:16:25Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27522.0
828
+ 2026-09-03T12:16:26Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27522.0
829
+ 2026-09-03T12:16:27Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27522.0
830
+ 2026-09-03T12:16:28Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,27532.0
831
+ 2026-09-03T12:16:29Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24302.0
832
+ 2026-09-03T12:16:30Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24302.0
833
+ 2026-09-03T12:16:31Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24302.0
834
+ 2026-09-03T12:16:32Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,24302.0
835
+ 2026-09-03T12:16:33Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1109.0
836
+ 2026-09-03T12:16:34Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,1109.0
837
+ 2026-09-03T12:16:35Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
838
+ 2026-09-03T12:16:36Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
839
+ 2026-09-03T12:16:37Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
840
+ 2026-09-03T12:16:38Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
841
+ 2026-09-03T12:16:39Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
842
+ 2026-09-03T12:16:40Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
843
+ 2026-09-03T12:16:41Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
844
+ 2026-09-03T12:16:42Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
845
+ 2026-09-03T12:16:43Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
846
+ 2026-09-03T12:16:44Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
847
+ 2026-09-03T12:16:45Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
848
+ 2026-09-03T12:16:46Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
849
+ 2026-09-03T12:16:47Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
850
+ 2026-09-03T12:16:48Z,0,GPU-d3de00fd-a435-8187-8fc6-b7011548409a,NVIDIA L40S,46068.0,3.0
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019.md ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_content_list.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_content_list_v2.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_middle.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/Cremers - 2019_model.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/hybrid_auto/tabulus_run.txt ADDED
@@ -0,0 +1,7 @@
 
 
 
 
 
 
 
 
1
+ requested_backend=hybrid-engine
2
+ resolved_backend=hybrid-engine
3
+ fallback_reason=
4
+ method=auto
5
+ effort=high
6
+ duration_seconds=361.869
7
+ return_code=0
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/profiling.time.txt ADDED
@@ -0,0 +1,23 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ Command being timed: "original-home://miniconda3/envs/tabulus-mineru/bin/python -m tabulus.cli profile --folder original-home://ald-papers --backend hybrid-engine --method auto --effort high --out original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output --table-crops-out original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops"
2
+ User time (seconds): 1201.34
3
+ System time (seconds): 99.36
4
+ Percent of CPU this job got: 148%
5
+ Elapsed (wall clock) time (h:mm:ss or m:ss): 14:37.73
6
+ Average shared text size (kbytes): 0
7
+ Average unshared data size (kbytes): 0
8
+ Average stack size (kbytes): 0
9
+ Average total size (kbytes): 0
10
+ Maximum resident set size (kbytes): 13696764
11
+ Average resident set size (kbytes): 0
12
+ Major (requiring I/O) page faults: 23684
13
+ Minor (reclaiming a frame) page faults: 16157960
14
+ Voluntary context switches: 886175
15
+ Involuntary context switches: 1038662
16
+ Swaps: 0
17
+ File system inputs: 7163528
18
+ File system outputs: 653416
19
+ Socket messages sent: 0
20
+ Socket messages received: 0
21
+ Signals delivered: 0
22
+ Page size (bytes): 4096
23
+ Exit status: 0
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/run_metadata.json ADDED
@@ -0,0 +1,164 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ {
2
+ "schema_version": 1,
3
+ "stage": "profiling",
4
+ "run_id": "20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734",
5
+ "corpus": "ald",
6
+ "profiler": "mineru",
7
+ "backend": "hybrid-engine",
8
+ "method": "auto",
9
+ "effort": "high",
10
+ "status": "success",
11
+ "git": {
12
+ "commit": "15718f6204a8df3c615e1256ea76db47b44b95b6",
13
+ "branch": "main",
14
+ "tracked_worktree_dirty": false,
15
+ "tracked_status": []
16
+ },
17
+ "host": {
18
+ "hostname": "gpu-l40s-01",
19
+ "fqdn": "gpu-l40s-01.research.tib.eu"
20
+ },
21
+ "slurm": {
22
+ "slurm_job_id": "32734",
23
+ "slurm_job_partition": "p_48G",
24
+ "slurm_job_nodelist": "gpu-l40s-01",
25
+ "slurmd_nodename": "gpu-l40s-01",
26
+ "slurm_job_gpus": "2",
27
+ "slurm_step_gpus": null,
28
+ "slurm_cpus_per_task": "8",
29
+ "slurm_mem_per_node": "32768",
30
+ "slurm_mem_per_cpu": null,
31
+ "cuda_visible_devices": "0"
32
+ },
33
+ "environment": {
34
+ "python_executable": "original-home://miniconda3/envs/tabulus-mineru/bin/python",
35
+ "python_version": "3.12.13 | packaged by Anaconda, Inc. | (main, Jul 9 2026, 14:38:16) [GCC 14.3.0]",
36
+ "conda_default_env": "tabulus-mineru"
37
+ },
38
+ "resources": {
39
+ "allocated_gpus": [
40
+ {
41
+ "index": "0",
42
+ "uuid": "GPU-d3de00fd-a435-8187-8fc6-b7011548409a",
43
+ "name": "NVIDIA L40S",
44
+ "memory_total_mib": 46068.0,
45
+ "memory_used_mib": 0.0
46
+ }
47
+ ],
48
+ "gpu_inventory": [
49
+ {
50
+ "index": "0",
51
+ "uuid": "GPU-d3de00fd-a435-8187-8fc6-b7011548409a",
52
+ "name": "NVIDIA L40S",
53
+ "memory_total_mib": 46068.0,
54
+ "memory_used_mib": 0.0
55
+ }
56
+ ],
57
+ "gpu": {
58
+ "peak_gpu_memory_mib": 27942.0,
59
+ "peak_gpu_memory_by_uuid_mib": {
60
+ "GPU-d3de00fd-a435-8187-8fc6-b7011548409a": 27942.0
61
+ },
62
+ "measurement": "nvidia-smi device-wide memory.used sampled during the run",
63
+ "sample_interval_seconds": 1.0
64
+ },
65
+ "max_host_rss_mib": 13375.74609375
66
+ },
67
+ "input": {
68
+ "pdfs_requested": 3,
69
+ "pdf_names": [
70
+ "Cremers - 2019.pdf",
71
+ "Miikkulainen 2013.pdf",
72
+ "Puurunen - February 2005.pdf"
73
+ ],
74
+ "page_counts": {
75
+ "Cremers - 2019.pdf": null,
76
+ "Miikkulainen 2013.pdf": null,
77
+ "Puurunen - February 2005.pdf": null
78
+ },
79
+ "pages_known_for_pdfs": 0,
80
+ "pages_total_known": 0,
81
+ "pages_complete": false
82
+ },
83
+ "timing": {
84
+ "start_time_utc": "2026-09-03T12:02:11Z",
85
+ "end_time_utc": "2026-09-03T12:16:49Z",
86
+ "total_wall_seconds": 877.9837184995413,
87
+ "profiling_wall_seconds": 877.7522966451943
88
+ },
89
+ "paths": {
90
+ "run_dir": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734",
91
+ "pdf_folder": "original-home://ald-papers",
92
+ "profiler_root": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output",
93
+ "crops_root": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops",
94
+ "run_metadata": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/run_metadata.json",
95
+ "gpu_samples": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/gpu_samples.csv"
96
+ },
97
+ "commands": {
98
+ "profiling": {
99
+ "command": [
100
+ "original-home://miniconda3/envs/tabulus-mineru/bin/python",
101
+ "-m",
102
+ "tabulus.cli",
103
+ "profile",
104
+ "--folder",
105
+ "original-home://ald-papers",
106
+ "--backend",
107
+ "hybrid-engine",
108
+ "--method",
109
+ "auto",
110
+ "--effort",
111
+ "high",
112
+ "--out",
113
+ "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output",
114
+ "--table-crops-out",
115
+ "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops"
116
+ ],
117
+ "command_shell": "original-home://miniconda3/envs/tabulus-mineru/bin/python -m tabulus.cli profile --folder original-home://ald-papers --backend hybrid-engine --method auto --effort high --out original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output --table-crops-out original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops",
118
+ "return_code": 0,
119
+ "start_time_utc": "2026-09-03T12:02:11Z",
120
+ "end_time_utc": "2026-09-03T12:16:49Z",
121
+ "wall_seconds": 877.7522966451943,
122
+ "stdout": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/profiling.stdout.log",
123
+ "stderr": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/profiling.stderr.log",
124
+ "resource_usage": {
125
+ "max_rss_kib": 13696764,
126
+ "max_rss_mib": 13375.74609375
127
+ }
128
+ }
129
+ },
130
+ "canonical_crops": {
131
+ "paper_crop_roots": 3,
132
+ "tables_found": 83,
133
+ "crops_saved": 83,
134
+ "papers": [
135
+ {
136
+ "paper": "Cremers - 2019",
137
+ "tables_index": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/Cremers - 2019/tables_index.json",
138
+ "tables_found": 14,
139
+ "crops_saved": 14,
140
+ "refs_start_page": 37
141
+ },
142
+ {
143
+ "paper": "Miikkulainen 2013",
144
+ "tables_index": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/Miikkulainen 2013/tables_index.json",
145
+ "tables_found": 46,
146
+ "crops_saved": 46,
147
+ "refs_start_page": null
148
+ },
149
+ {
150
+ "paper": "Puurunen - February 2005",
151
+ "tables_index": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/Puurunen - February 2005/tables_index.json",
152
+ "tables_found": 23,
153
+ "crops_saved": 23,
154
+ "refs_start_page": null
155
+ }
156
+ ]
157
+ },
158
+ "git_end": {
159
+ "commit": "15718f6204a8df3c615e1256ea76db47b44b95b6",
160
+ "branch": "main",
161
+ "tracked_worktree_dirty": false,
162
+ "tracked_status": []
163
+ }
164
+ }
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_009_table_001.jpg ADDED

Git LFS Details

  • SHA256: 7cd3483a950372bb0a9f3a694b0bf4370db3d53bcee754cf41724bd22912f6eb
  • Pointer size: 130 Bytes
  • Size of remote file: 77.8 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_015_table_002.jpg ADDED

Git LFS Details

  • SHA256: 7bfff2f717fa307b06d1e389cc3aaa384d8d3cdfa9c074b86fd68d6d51c7af3d
  • Pointer size: 131 Bytes
  • Size of remote file: 234 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_016_table_003.jpg ADDED

Git LFS Details

  • SHA256: 0fd4e369d103748dbab3ff0049a4aa89ea6a8694327e2b3adac64c2743051f05
  • Pointer size: 131 Bytes
  • Size of remote file: 177 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_017_table_004.jpg ADDED

Git LFS Details

  • SHA256: 83377cb507e6b2d933d0fcd9617b96d19f0f3f92391c1333a66ca705a5df66d3
  • Pointer size: 131 Bytes
  • Size of remote file: 156 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_018_table_005.jpg ADDED

Git LFS Details

  • SHA256: 4ad8193c06ba20133f27aac2e1d20d61dc2375d5150a7954e4d3e5357a0d7fb1
  • Pointer size: 131 Bytes
  • Size of remote file: 229 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_019_table_006.jpg ADDED

Git LFS Details

  • SHA256: db40782d48f3b3339d78a8d3b5dbe054e8a466083795da68b9eb51e53e5179af
  • Pointer size: 130 Bytes
  • Size of remote file: 42 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_019_table_007.jpg ADDED

Git LFS Details

  • SHA256: c152ea32f6b23713b092d13cd339b4ea17f1d86091daa7e461d7605db348cea8
  • Pointer size: 131 Bytes
  • Size of remote file: 139 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_020_table_008.jpg ADDED

Git LFS Details

  • SHA256: 1b04bb4289cfe13a5bbae165dc651a1518fa566f32ead293c4df13417eeee377
  • Pointer size: 130 Bytes
  • Size of remote file: 22.1 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_020_table_009.jpg ADDED

Git LFS Details

  • SHA256: 41b9f071e7c9b2fc5546eae7f8de853ad5ba29dd81051e43922844035f07e2af
  • Pointer size: 130 Bytes
  • Size of remote file: 99.5 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_022_table_010.jpg ADDED

Git LFS Details

  • SHA256: dc7e6c8929200decdd3be192a4ec152007a50720ba6d285acaf8af52f4014a22
  • Pointer size: 131 Bytes
  • Size of remote file: 206 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_023_table_011.jpg ADDED

Git LFS Details

  • SHA256: 1b2fdacc7b3692d89ffbbd16aadb72b9ff26e234bc5f2050cf6e74d9b7a24855
  • Pointer size: 131 Bytes
  • Size of remote file: 200 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_024_table_012.jpg ADDED

Git LFS Details

  • SHA256: 31869e506bbea7820f5712224bfbd30ba11a5db8e7352111f10330b40e093529
  • Pointer size: 131 Bytes
  • Size of remote file: 208 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_025_table_013.jpg ADDED

Git LFS Details

  • SHA256: e990983eae6914f41e40b7f2da4f8c2a6ab9a24a4b78d174f3782f09712d331a
  • Pointer size: 131 Bytes
  • Size of remote file: 161 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/images/page_026_table_014.jpg ADDED

Git LFS Details

  • SHA256: ce955e8d873e80e921c6c68fe5dfceba35be0c187d09d92cfa6626a77a11d176
  • Pointer size: 131 Bytes
  • Size of remote file: 166 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/tables_index.json ADDED
@@ -0,0 +1,305 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ {
2
+ "tables_found": 14,
3
+ "crops_saved": 14,
4
+ "refs_start_page": 37,
5
+ "image_format_policy": "preserve-source-extension",
6
+ "images_dir": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/table-crops/Cremers - 2019/images",
7
+ "tables": [
8
+ {
9
+ "table_id": 1,
10
+ "page_nr": 9,
11
+ "in_references": false,
12
+ "image": "images/page_009_table_001.jpg",
13
+ "image_name": "page_009_table_001.jpg",
14
+ "bbox": [
15
+ 81,
16
+ 655,
17
+ 916,
18
+ 865
19
+ ],
20
+ "table_caption": [
21
+ "TABLE I. Overview of test structures used to quantify the conformality of an ALD process. The labels (a)-(j) correspond to the labeled images in Fig. 8."
22
+ ],
23
+ "table_footnote": [],
24
+ "mineru_img_path": "images/d536cf7f5f24b13fc750a786c551d7c96150b52311cc993dc9d9d57ab1c80b4e.jpg",
25
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/d536cf7f5f24b13fc750a786c551d7c96150b52311cc993dc9d9d57ab1c80b4e.jpg",
26
+ "mineru_table_body": "<table><tr><td>Structure</td><td>Characterization method</td><td>References</td></tr><tr><td>Macroscopic lateral trenches (a)</td><td>Ellipsometry/XRR/XRF/EDX</td><td>67, 69, 83, and 84</td></tr><tr><td>Capillary tubes (b)</td><td>Optical microscope</td><td>85</td></tr><tr><td>Microscopic lateral trenches (c)</td><td>Optical and IR microscope/reflectometrySEM/EDX</td><td>83 and 86\u201388</td></tr><tr><td>Micron trenches (d)</td><td>TEM</td><td>89 and 90</td></tr><tr><td>Pillars (e)</td><td>SEM/EDX</td><td>91\u201394</td></tr><tr><td>Anodized alumina (AAO) (f)</td><td>EPMA/TEM</td><td>65, 95, and 96</td></tr><tr><td>Nano trenches</td><td>TEM</td><td>79 and 97</td></tr><tr><td>Forests of carbon nanotubes (g)</td><td>SEM/EDX/TEM</td><td>98\u2013100</td></tr><tr><td>Opals (h)</td><td>FE-SEM/TEM</td><td>101\u2013104</td></tr><tr><td>Mesoporous thin films (i)</td><td>XRF/porosimetry/TEM/SIMS</td><td>47 and 105\u2013108</td></tr><tr><td>Mesoporous powders (j)</td><td>TEM/SEM/EDX</td><td>109\u2013113</td></tr></table>",
27
+ "source": "mineru"
28
+ },
29
+ {
30
+ "table_id": 2,
31
+ "page_nr": 15,
32
+ "in_references": false,
33
+ "image": "images/page_015_table_002.jpg",
34
+ "image_name": "page_015_table_002.jpg",
35
+ "bbox": [
36
+ 81,
37
+ 156,
38
+ 915,
39
+ 861
40
+ ],
41
+ "table_caption": [
42
+ "TABLE II. Overview of experimental results on the conformality of thermal ALD processes. The coated EAR equals the EAR of the structure in the case of complete coverage or is determined by PD<sup>50%</sup> in the case of incomplete coverage and indicated with <sup>\b</sup>. If the results were presented in a thickness profile (film thickness as a function of the depth of the structure), \u201cD\u201d is noted after the coated EAR"
43
+ ],
44
+ "table_footnote": [],
45
+ "mineru_img_path": "images/2e2b726ca99f7049e637034f18cbef602960e5e7e3967f009e2d17fc8573e931.jpg",
46
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/2e2b726ca99f7049e637034f18cbef602960e5e7e3967f009e2d17fc8573e931.jpg",
47
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Exposure $(10^3\\mathrm{L})$ </td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"39\">Oxides</td><td rowspan=\"12\"> $Al_2O_3(TMA/H_2O)$ </td><td>Macro lateral</td><td>100</td><td>200</td><td>9</td><td>SE</td><td>50*(D)</td><td>67</td></tr><tr><td>Trench</td><td>5</td><td>300</td><td></td><td>SEM</td><td>5</td><td>134</td></tr><tr><td>AAO</td><td>8.5</td><td>200</td><td>300</td><td>SEM/TEM</td><td>8.5</td><td>135</td></tr><tr><td> $Nanorods (ZnO)^{136}$ </td><td></td><td>300</td><td>560</td><td>TEM</td><td>Conformal</td><td>99</td></tr><tr><td>Pillars $(Si)^{137}$ </td><td></td><td>125</td><td></td><td>TEM</td><td>Conformal</td><td>93</td></tr><tr><td>AAO</td><td>1750</td><td>177</td><td></td><td>SEM/TEM</td><td>1750</td><td>96</td></tr><tr><td>AAO</td><td>770</td><td>177</td><td>4500</td><td>SEM</td><td>770</td><td>65</td></tr><tr><td>LHAR</td><td>10-12500</td><td>300</td><td></td><td>Reflectometry,optical/IRmicroscopy,SEM</td><td>75*(D)</td><td>86</td></tr><tr><td>LHAR</td><td>10-12500</td><td>300</td><td></td><td>Reflectometry</td><td>130*(D)</td><td>77</td></tr><tr><td>Trench</td><td>11</td><td></td><td></td><td>SEM</td><td>11</td><td>138</td></tr><tr><td>Macro lateral</td><td>5</td><td>75</td><td>18</td><td>SEM/EDX</td><td>2.5*(D)</td><td>69</td></tr><tr><td>Hole</td><td>17</td><td>200</td><td>370</td><td>SEM</td><td>17</td><td>139</td></tr><tr><td rowspan=\"7\"> $TiO_2 (TiCl_4/H_2O)$ </td><td>Pillars $(Si)^{137}$ </td><td></td><td>110</td><td></td><td>TEM</td><td>Conformal</td><td>93</td></tr><tr><td>AAO</td><td>7.5</td><td>200</td><td></td><td>SEM/TEM</td><td>7.5</td><td>140</td></tr><tr><td>LHAR</td><td>10-12500</td><td>110</td><td></td><td>ReflectometryIR microscopy</td><td>90*(D)</td><td>77</td></tr><tr><td>LHAR</td><td>10-12500</td><td>110</td><td></td><td>Reflectometry</td><td>65*(D)</td><td>86</td></tr><tr><td>AAO</td><td>7000</td><td>100</td><td></td><td>SEM/TEM/EDAX</td><td>7000</td><td>96</td></tr><tr><td>Opal</td><td></td><td>70</td><td></td><td>FE-SEM</td><td>Conformal</td><td>101</td></tr><tr><td>Opal</td><td></td><td>80</td><td></td><td>SEM</td><td></td><td>141</td></tr><tr><td> $TiO_2 (TTIP/H_2O)$ </td><td> $VACNT^{142}$ </td><td></td><td>225</td><td></td><td>SEM</td><td>(D)</td><td>100</td></tr><tr><td> $V_2O_5 (VOTP/H_2O_2)$ </td><td>AAO</td><td>7000</td><td>100</td><td></td><td>SEM/TEM/EDAX</td><td>7000</td><td>96</td></tr><tr><td> $Fe_2O_3 [Fe_2(O^tBu)_6/H_2O]$ </td><td>AAO</td><td>100</td><td>140</td><td></td><td>SEM/TEM</td><td>100</td><td>143</td></tr><tr><td> $Fe_3O_4 [Fe(Cp)_2/O_2]$ </td><td>AAO</td><td></td><td>400</td><td></td><td>SEM/TEM</td><td></td><td>144</td></tr><tr><td rowspan=\"5\"> $ZnO (DEZ/H_2O)$ </td><td>AAO</td><td>700</td><td>177</td><td>2000</td><td>EPMA</td><td>700(D)</td><td>65</td></tr><tr><td>AAO</td><td>5000</td><td>177</td><td>6 00 000</td><td>EPMA</td><td>5000(D)</td><td>65</td></tr><tr><td>Opal</td><td></td><td>85</td><td></td><td>SEM</td><td></td><td>102</td></tr><tr><td>Trench</td><td>3</td><td>250</td><td></td><td>SEM</td><td>3</td><td>90</td></tr><tr><td> $Nanowire (CuO)^{145}$ </td><td></td><td>150</td><td></td><td>SEM/TEM</td><td>Conformal</td><td>146</td></tr><tr><td> $Y_2O_3 [(CpCH_3)_3Y/H_2O]$ </td><td>Trench</td><td>35</td><td>300</td><td>50 000</td><td>TEM</td><td>15*</td><td>89</td></tr><tr><td> $ZrO [Zr(NMe_2)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $ZrO [Zr(NEtMe)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $ZrO [Zr(NEt_2)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $RuO_2 [Ru(od)_3/O_2]$ </td><td> $CNT^{147}$ </td><td></td><td>300</td><td></td><td>SEM/TEM</td><td>Conformal</td><td>148</td></tr><tr><td> $SnO_x (SnCl_4/H_2O)$ </td><td>Porous silicon</td><td>140</td><td>500</td><td></td><td>TEM/SIMS</td><td>140(D)</td><td>107</td></tr><tr><td> $HfO_2 (HfCl_4/H_2O)$ </td><td>Trench</td><td>35</td><td>300</td><td>2000</td><td>TEM</td><td>22*</td><td>89</td></tr><tr><td rowspan=\"2\"> $HfO_2 [Hf(NMe_2)_4/H_2O]$ </td><td>Holes</td><td>36</td><td>150</td><td>9</td><td>SEM</td><td>36</td><td>62</td></tr><tr><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $HfO_2 [Hf(NEtMe)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $HfO_2 [Hf(NEt_2)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td rowspan=\"3\">Nitrides</td><td>BN ( $BBr_3/NH_3$ )</td><td>AAO</td><td>10000</td><td>750</td><td></td><td>SEM</td><td>20</td><td>149</td></tr><tr><td>AlN (TMA/ $NH_3$ )</td><td>Trench</td><td>17.5</td><td>420</td><td></td><td>SEM</td><td>17.5</td><td>150</td></tr><tr><td>TiN ( $TiCl_4/Zn/NH_3$ )</td><td>Trench</td><td>5</td><td>500</td><td></td><td>SEM</td><td>5</td><td>134</td></tr></table>",
48
+ "source": "mineru"
49
+ },
50
+ {
51
+ "table_id": 3,
52
+ "page_nr": 16,
53
+ "in_references": false,
54
+ "image": "images/page_016_table_003.jpg",
55
+ "image_name": "page_016_table_003.jpg",
56
+ "bbox": [
57
+ 81,
58
+ 134,
59
+ 918,
60
+ 694
61
+ ],
62
+ "table_caption": [
63
+ "TABLE II. (Continued.)"
64
+ ],
65
+ "table_footnote": [],
66
+ "mineru_img_path": "images/098183554d8312ee07420c4b76cc5883e604cfffd8751b7c625faca1150c7078.jpg",
67
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/098183554d8312ee07420c4b76cc5883e604cfffd8751b7c625faca1150c7078.jpg",
68
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Exposure $(10^3\\mathrm{L})$ </td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"29\">Metals</td><td>TaN (TBTDET/ $NH_3$ )</td><td>Trench</td><td>11</td><td></td><td></td><td>SEM</td><td>11</td><td>138</td></tr><tr><td>WN $[(^{i}BuN)_2(Me_2N)_2W/ NH_3]$ </td><td>Silica capillary tube</td><td>1000</td><td>300</td><td>110</td><td>Optical microscopy</td><td>210</td><td>85</td></tr><tr><td rowspan=\"3\">Ru $[(^{i}Pr-Me-Be)Ru(CHD)/O_2]$ </td><td>Hole</td><td>4.6</td><td>225, 270, and 310</td><td></td><td>TEM</td><td>4.6</td><td>151</td></tr><tr><td>Hole</td><td>25</td><td>270</td><td></td><td>TEM</td><td> $25^{152}$ </td><td>151</td></tr><tr><td>Hole</td><td>24</td><td>220</td><td></td><td>XTEM</td><td>24</td><td>153</td></tr><tr><td rowspan=\"2\">Ru [(EtCp)Ru(DMPD)/ $O_2$ ]</td><td>AAO</td><td>20</td><td>280</td><td></td><td>TEM</td><td>20</td><td>154</td></tr><tr><td>Hole</td><td>17</td><td>250</td><td></td><td>SEM</td><td> $17^{155}$ </td><td>156</td></tr><tr><td>Ru [(Et-Be)Ru(CHD)/ $O_2$ ]</td><td>Trench</td><td>2.25</td><td>225</td><td></td><td>TEM</td><td>2.25</td><td>157</td></tr><tr><td>Ru [(Et-Be)Ru(Et-CHD)/ $O_2$ ]</td><td>Hole</td><td>32</td><td>225 and 270</td><td></td><td>XTEM</td><td>32</td><td>158</td></tr><tr><td>Ru [Ru(Me- $Me_2$ - $CHD$ ) $_2$ / $O_2$ ]</td><td>AAO</td><td>166</td><td>300</td><td></td><td>TEM</td><td>100</td><td>159</td></tr><tr><td rowspan=\"2\">Ru [(EtCp)Ru(Py)/ $O_2$ ]</td><td>Hole</td><td>20</td><td>275</td><td></td><td>SEM</td><td>20*</td><td>160</td></tr><tr><td>Trench</td><td>11</td><td></td><td></td><td>SEM</td><td>11</td><td>138</td></tr><tr><td rowspan=\"2\">Ru [Ru(EtCp) $_2$ / $O_2$ ]</td><td>Trench</td><td>4</td><td>270</td><td></td><td>SEM</td><td>4</td><td>161</td></tr><tr><td>AAO</td><td>10</td><td>300</td><td></td><td>SEM/TEM</td><td>10</td><td>162</td></tr><tr><td>Ru ( $RuO_4/H_2$ )</td><td>Pillars ( $Si$ ) $^{163}$ </td><td>10</td><td>100</td><td></td><td>SEM/EDX</td><td>Conformal (D)</td><td>94</td></tr><tr><td>Pd [Pd(hfac) $_2$ /formalin]</td><td>AAO</td><td>1500</td><td>200</td><td></td><td>SEM/EDX electrical conductivity</td><td>1500</td><td>164</td></tr><tr><td>W ( $Si_2H_6/WF_6$ )</td><td>AAO</td><td>1750</td><td>200</td><td> $60\\ 00\\ 000^{165}$ </td><td>SEM/EDX</td><td>1750 (D)</td><td>166</td></tr><tr><td>Ir [Ir(acac) $_3$ / $O_2$ / $H_2$ ]</td><td>LHAR</td><td>10-12500</td><td>250</td><td></td><td>EDX optical microscopy</td><td>20* (D)</td><td>87</td></tr><tr><td rowspan=\"3\">Ir [Ir(acac) $_3$ / $O_2$ ]</td><td>LHAR</td><td>10-12500</td><td>250</td><td></td><td>EDX optical microscopy</td><td>15* (D)</td><td>87</td></tr><tr><td>Hole</td><td>142</td><td>300</td><td></td><td></td><td>Ref. 167</td><td>168</td></tr><tr><td>Trench</td><td></td><td>370</td><td></td><td>SEM</td><td></td><td>169</td></tr><tr><td rowspan=\"6\">Pt ( $MeCpPtMe_3$ / $O_2$ )</td><td>AAO</td><td>8.5</td><td>250</td><td>405</td><td>SEM/TEM</td><td>8.5</td><td>135</td></tr><tr><td>AAO</td><td>150</td><td>250</td><td></td><td>SEM/EDX/SANS</td><td> $110^{*}(D)^{170}$ </td><td>171</td></tr><tr><td>AAO</td><td>200</td><td>300</td><td></td><td>SEM</td><td>94</td><td>172</td></tr><tr><td>Trench</td><td>6</td><td>300</td><td></td><td>TEM</td><td>6</td><td>79</td></tr><tr><td>AAO</td><td>200</td><td>300</td><td></td><td>SEM/TEM</td><td>50</td><td>173</td></tr><tr><td>Hole</td><td>90</td><td>300</td><td></td><td>SEM/TEM</td><td>30</td><td>173</td></tr><tr><td rowspan=\"2\">PtIr alloy [MeCpPtMe $_3$ / $O_2$ /Ir(acac) $_3$ / $O_2$ ]</td><td>AAO</td><td>7.1</td><td>300</td><td></td><td>SEM</td><td>7.1</td><td>172</td></tr><tr><td>Trench</td><td>9.5</td><td>300</td><td></td><td>SEM</td><td>9.5</td><td>174</td></tr></table>",
69
+ "source": "mineru"
70
+ },
71
+ {
72
+ "table_id": 4,
73
+ "page_nr": 17,
74
+ "in_references": false,
75
+ "image": "images/page_017_table_004.jpg",
76
+ "image_name": "page_017_table_004.jpg",
77
+ "bbox": [
78
+ 81,
79
+ 158,
80
+ 915,
81
+ 563
82
+ ],
83
+ "table_caption": [
84
+ "TABLE III. Overview of the experimental results on the conformality of ozone-based ALD processes. The coated EAR equals the EAR of the structure in the case of complete coverage or is determined by PD<sup>50%</sup> in the case of incomplete coverage and indicated with <sup>\b</sup>. If the results were presented in a thickness profile (film thickness as a function of the depth of the structure), \u201cD\u201d is noted after the coated EAR."
85
+ ],
86
+ "table_footnote": [],
87
+ "mineru_img_path": "images/8db9f55a05012f982162eccc88acc796f028e034820fbb79911d86ae00061a00.jpg",
88
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/8db9f55a05012f982162eccc88acc796f028e034820fbb79911d86ae00061a00.jpg",
89
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Exposure $(10^3\\mathrm{L})$ </td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"19\">Oxides</td><td> $Al_2O_3(TMA/O_3)$ </td><td>Trench</td><td></td><td></td><td></td><td></td><td>Ref. 175</td><td>176</td></tr><tr><td> $SiO_2([H_2N(CH_2)_3Si(OCH_2CH_3)_3]/H_2O/O_3)$ </td><td>AAO</td><td>400</td><td></td><td></td><td>SEM/TEM</td><td>400</td><td>177</td></tr><tr><td rowspan=\"2\"> $TiO_2(TDMAT/O_3)$ </td><td>Hole</td><td>20</td><td>180</td><td></td><td>TEM</td><td>20* (D)</td><td>178</td></tr><tr><td> $CNT^{179}$ </td><td></td><td>100</td><td>4500</td><td>TEM/SEM/EDX</td><td></td><td>98</td></tr><tr><td> $TiO_2[Cp*Ti(OMe)_3/O_3]$ </td><td>Hole</td><td>15.3</td><td>270</td><td></td><td>SEM/TEM</td><td>(D)</td><td>180</td></tr><tr><td rowspan=\"2\"> $V_2O_5(VOTP/O_3)$ </td><td>AAO</td><td>100</td><td></td><td></td><td>SEM/EDX</td><td>100</td><td>150</td></tr><tr><td>AAO</td><td>185</td><td>170</td><td></td><td>SEM/TEM</td><td>44</td><td>159</td></tr><tr><td rowspan=\"2\"> $Fe_2O_3[Fe(Cp)_2/O_3]$ </td><td>Trench</td><td>2</td><td>250</td><td></td><td>SEM</td><td>2</td><td>181</td></tr><tr><td>Silica aerogel</td><td>150</td><td>250</td><td></td><td>SEM/EDX</td><td>150 (D)</td><td>181</td></tr><tr><td> $Fe_2O_3[CpFeC_5H_4CHN(CH_3)_2/O_3]$ </td><td>Nanowire ( $TiO_2$ )</td><td></td><td>230</td><td></td><td>TEM/EDX</td><td>Conformal</td><td>182</td></tr><tr><td> $Co_3O_4(CoCp_2/O_3)$ </td><td> $Anodisc^{183}$ </td><td>375</td><td>167</td><td></td><td>SEM/EDX</td><td>375 (D)</td><td>184</td></tr><tr><td>NiO [Ni(CpEt) $_2$ /O $_3$ ]</td><td>AAO</td><td>70</td><td>250</td><td></td><td>TEM/SEM/EDX</td><td>70</td><td>185</td></tr><tr><td>NiO ( $NiCp_2/O_3$ )</td><td>AAO</td><td>238</td><td>300</td><td></td><td>TEM/SEM</td><td>238</td><td>186</td></tr><tr><td rowspan=\"2\">ZnO (DEZ/O $_3$ )</td><td>AAO</td><td>250</td><td>50</td><td></td><td>SEM/EDX</td><td>250 (D)</td><td>187</td></tr><tr><td> $Hole^{188}$ </td><td>2</td><td>85</td><td></td><td>SEM</td><td>2</td><td>189</td></tr><tr><td> $HfO_2(TEMAHf/O_3)$ </td><td>Hole</td><td>15.3</td><td>180</td><td></td><td>SEM/TEM</td><td>9.6* (D)</td><td>180</td></tr><tr><td> $IrO_2[Ir(acac)_3/O_3]$ </td><td>LHAR</td><td>10-12500</td><td>185</td><td></td><td> $EDX^{190}$ optical microscopy</td><td>15* (D)</td><td>87</td></tr><tr><td> $PtO_x(Pt(acac)_2/O_3)$ </td><td>Trench</td><td>3.5</td><td>120</td><td></td><td>FE-SEM</td><td>3.5</td><td>191</td></tr><tr><td> $PtO_x(MeCpPtMe_3/O_3)$ </td><td>Trench</td><td>5</td><td>120</td><td></td><td>SEM</td><td>5</td><td>192</td></tr><tr><td rowspan=\"5\">Metal</td><td>Ru [Ru(EtCp) $_2$ /O $_3$ ]</td><td>Hole</td><td>16</td><td>275</td><td></td><td>TEM</td><td> $16^{193}$ </td><td>194</td></tr><tr><td rowspan=\"2\">Ir [Ir(acac) $_3$ /O $_3$ /H $_2$ ]</td><td>LHAR</td><td>10-12500</td><td>185</td><td></td><td>EDX optical microscopy</td><td>45*(D)</td><td>87</td></tr><tr><td>Trench</td><td></td><td>165</td><td></td><td>FE-SEM</td><td></td><td>192</td></tr><tr><td>Pt ( $MeCpPtMe_3/O_3$ )</td><td>AAO</td><td>150</td><td>150</td><td></td><td>SEM/EDX</td><td>35* (D)</td><td>195</td></tr><tr><td>Pt ( $Pt(acac)_2/O_3$ )</td><td>AAO</td><td>120</td><td>150</td><td></td><td>SEM</td><td>50</td><td>196</td></tr></table>",
90
+ "source": "mineru"
91
+ },
92
+ {
93
+ "table_id": 5,
94
+ "page_nr": 18,
95
+ "in_references": false,
96
+ "image": "images/page_018_table_005.jpg",
97
+ "image_name": "page_018_table_005.jpg",
98
+ "bbox": [
99
+ 81,
100
+ 156,
101
+ 915,
102
+ 861
103
+ ],
104
+ "table_caption": [
105
+ "TABLE IV. Overview of the experimental results on the conformality of PE-ALD processes. The plasma configuration is indicated as C (capacitive), I (inductive), R (remote), and RE (radical enhanced). The coated EAR equals the EAR of the structure in the case of complete coverage or is determined by PD<sup>50%</sup> in the case of incomplete coverage and indicated with <sup>\b</sup>. If the results were presented in a thickness profile (film thickness as a function of the depth of the structure), \u201cD\u201d is noted after the coated EAR."
106
+ ],
107
+ "table_footnote": [],
108
+ "mineru_img_path": "images/9747e41fa370542ac92b287a672e4f16029a7e57b46d11fe690819f79cc25e84.jpg",
109
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/9747e41fa370542ac92b287a672e4f16029a7e57b46d11fe690819f79cc25e84.jpg",
110
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Plasma configuration</td><td>Exposure ( $10^3$ L)</td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"17\">Oxides</td><td rowspan=\"7\"> $\\mathrm{Al_2O_3(TMA/O_2^*)}$ </td><td>Macro lateral</td><td>10</td><td>200</td><td>RI</td><td>27</td><td>SE</td><td>10 (D)</td><td>70</td></tr><tr><td>Hole</td><td>8</td><td>200</td><td>RI</td><td></td><td>SEM</td><td>8</td><td>197</td></tr><tr><td>Trench</td><td>13.5</td><td>250</td><td>RC</td><td></td><td>SEM</td><td>13.5</td><td>198</td></tr><tr><td>Macro lateral $^{199}$ </td><td>5</td><td>75</td><td>RI</td><td>5</td><td>EDX</td><td>0.75* (D)</td><td>69</td></tr><tr><td>Hole</td><td>10</td><td>225</td><td></td><td>30</td><td>FE-SEM</td><td>10</td><td>200</td></tr><tr><td>Trench</td><td>2</td><td>250</td><td>C</td><td></td><td>TEM</td><td>2</td><td>201</td></tr><tr><td>Trench</td><td>15</td><td></td><td>R</td><td></td><td>SEM</td><td>15*</td><td>202</td></tr><tr><td> $\\mathrm{SiO_2(3DMAS/O_2^*)}$ </td><td>Trench</td><td>30</td><td>250</td><td>RC</td><td></td><td>SEM</td><td>30</td><td>198</td></tr><tr><td rowspan=\"2\"> $\\mathrm{SiO_2(H_2Si[N(C_2H_5)_2]_2/O_2^*)}$ </td><td>Trench</td><td>15</td><td></td><td>R</td><td></td><td>SEM</td><td>15</td><td>202</td></tr><tr><td>Hole</td><td>50</td><td>75</td><td></td><td></td><td>TEM</td><td>(D)</td><td>203</td></tr><tr><td rowspan=\"2\"> $\\mathrm{TiO_2(TTIP/O_2^*)}$ </td><td>Trench</td><td>13.5</td><td>150</td><td>RC</td><td></td><td>SEM</td><td>13.5</td><td>198</td></tr><tr><td>Hole</td><td>8.7</td><td>225</td><td></td><td></td><td>TEM</td><td>8.7 (D)</td><td>204</td></tr><tr><td> $\\mathrm{Ti(TiCl_4/O_2^*)}$ </td><td>Trench</td><td>4.5</td><td>200</td><td>RI</td><td>75</td><td>FE-SEM/FEI</td><td>4.5</td><td>205</td></tr><tr><td> $\\mathrm{HfO_2(TEMAHf/O_2^*)}$ </td><td>Trench</td><td>30</td><td>250</td><td>RC</td><td></td><td>SEM</td><td>30</td><td>198</td></tr><tr><td rowspan=\"2\"> $\\mathrm{Ta_2O_5(Ta(OEt)_5/O^*)}$ </td><td>Trench</td><td>2.5</td><td>150-250</td><td>RE</td><td></td><td>SEM</td><td>2.5</td><td>206</td></tr><tr><td>Trench</td><td>5</td><td>150-250</td><td>RE</td><td></td><td>SEM</td><td>5</td><td>206</td></tr><tr><td> $\\mathrm{Ta_2O_5(Ta(OEt)_5/O_2^*)}$ </td><td>Trench</td><td>10</td><td>200</td><td>RC</td><td></td><td>SEM</td><td>10</td><td>198</td></tr><tr><td rowspan=\"16\">Nitrides</td><td> $\\mathrm{AlN(TMA/NH_3^*)}$ </td><td>Macro lateral</td><td>10</td><td>200</td><td>RI</td><td> $40^{207}$ </td><td>SE</td><td>2.5* (D)</td><td>70</td></tr><tr><td> $\\mathrm{SiNx(Si_2Cl_6/NH_3^*)}$ </td><td>Trench</td><td>2.5</td><td>400</td><td>C</td><td></td><td>TEM</td><td>2.5</td><td>208</td></tr><tr><td> $\\mathrm{SiNx(DTDN2-H2/N_2^*)}$ </td><td>Trench</td><td>2.75</td><td>300</td><td></td><td></td><td>TEM</td><td>Ref. 209</td><td>81</td></tr><tr><td> $\\mathrm{TiN(TDMAT/NH_3^*)}$ </td><td>Hole</td><td>10</td><td>250</td><td>R</td><td></td><td>FE-SEM/AES</td><td>10</td><td>210</td></tr><tr><td> $\\mathrm{TiN(TDMAT/NH_3/H_2^*)}$ </td><td>Trench</td><td>10</td><td>180</td><td>C</td><td></td><td>FE-SEM</td><td>10</td><td>80</td></tr><tr><td> $\\mathrm{TiN(TDMAT/H_2^*)}$ </td><td>Hole</td><td>10</td><td>250</td><td>R</td><td></td><td>FE-SEM/AES</td><td>10</td><td>210</td></tr><tr><td rowspan=\"2\"> $\\mathrm{TiN(TDMAT/N_2^*)}$ </td><td>Hole</td><td>10</td><td>250</td><td>R</td><td></td><td>FE-SEM/AES</td><td>10</td><td>210</td></tr><tr><td>AAO</td><td>14</td><td>200</td><td></td><td></td><td>FE-SEM</td><td>14</td><td>211</td></tr><tr><td rowspan=\"3\"> $\\mathrm{TiN(TiCl_4/H_2^* + N_2^*)}$ </td><td>Hole</td><td>6</td><td>350</td><td>C</td><td></td><td>SEM</td><td>6</td><td>201</td></tr><tr><td>Nanotube ( $\\mathrm{TiO_2}$ )</td><td></td><td>200</td><td>R</td><td></td><td>FE-SEM</td><td></td><td>212</td></tr><tr><td>Trench</td><td>10.5</td><td>400</td><td>RI</td><td></td><td>SEM</td><td>10.5</td><td>213</td></tr><tr><td> $\\mathrm{Mo_2N(Mo(N^tBu)_2(S^tBu)_2/H_2^*)}$ </td><td>Nanotrench</td><td>2.25</td><td>300</td><td></td><td></td><td>XTEM</td><td>Ref. 214</td><td>215</td></tr><tr><td rowspan=\"2\"> $\\mathrm{TaN(TBTDET/H_2^*)}$ </td><td>Hole</td><td>10</td><td>260</td><td>C</td><td></td><td>SEM</td><td>10</td><td>216</td></tr><tr><td>Trench</td><td>2</td><td></td><td></td><td></td><td>TEM</td><td>2</td><td>97</td></tr><tr><td> $\\mathrm{TaN(TBTEMAT/H_2^*)}$ </td><td>Hole</td><td>7</td><td>250</td><td></td><td></td><td></td><td>7</td><td>217</td></tr><tr><td> $\\mathrm{TaNx(PDMAT/H_2^*)}$ </td><td>Trench</td><td>5</td><td>250</td><td></td><td></td><td>TEM</td><td>5</td><td>218</td></tr><tr><td rowspan=\"11\">Metals</td><td> $\\mathrm{Co((C_5H_5)_2Co/NH_3^*)}$ </td><td>Trench</td><td>5.5</td><td>300</td><td>HW</td><td>20</td><td>FE-SEM</td><td> $5.5^{219}$ </td><td>220</td></tr><tr><td> $\\mathrm{Ni(Ni(Cp)_2/H_2O/H_2^*)}$ </td><td>Hole (TaN)</td><td>3.3</td><td>165</td><td>C</td><td></td><td>SEM</td><td>3.3</td><td>221</td></tr><tr><td rowspan=\"3\"> $\\mathrm{Cu(Cu(acac)_2/H_2^*)}$ </td><td>Trench ( $\\mathrm{SiO_2}$ )</td><td>1.75</td><td>85</td><td>C</td><td></td><td>SEM</td><td>1.75</td><td>222</td></tr><tr><td></td><td>2.5</td><td>85</td><td></td><td></td><td></td><td>2.5</td><td>222</td></tr><tr><td></td><td>4.5</td><td>85</td><td></td><td></td><td></td><td>4.5</td><td>222</td></tr><tr><td rowspan=\"2\"> $\\mathrm{Ru(Ru(EtCp)_2/NH_3^*)}$ </td><td>Trench</td><td>2</td><td>290</td><td></td><td></td><td>TEM</td><td> $2^{223}$ </td><td>97</td></tr><tr><td>Si,Si/TaN</td><td></td><td></td><td></td><td></td><td></td><td></td><td></td></tr><tr><td>Ag</td><td>Trench</td><td>30</td><td>120</td><td>RC</td><td></td><td>FE-SEM</td><td> $5^{224}$ </td><td>198</td></tr><tr><td> $(\\mathrm{Ag(fod)(PEt_3)/H_2^*)}$ </td><td> $(\\mathrm{SiO_2/TiN})$ </td><td></td><td></td><td></td><td></td><td></td><td></td><td></td></tr><tr><td>Ag</td><td>Trench</td><td>4.5</td><td>140</td><td>RE</td><td></td><td>SEM</td><td>4.5</td><td>225</td></tr><tr><td> $(\\mathrm{(Ag(O_2C^tBu)(PEt_3))/H^*)$ </td><td></td><td></td><td></td><td></td><td></td><td></td><td></td><td></td></tr></table>",
111
+ "source": "mineru"
112
+ },
113
+ {
114
+ "table_id": 6,
115
+ "page_nr": 19,
116
+ "in_references": false,
117
+ "image": "images/page_019_table_006.jpg",
118
+ "image_name": "page_019_table_006.jpg",
119
+ "bbox": [
120
+ 81,
121
+ 134,
122
+ 915,
123
+ 244
124
+ ],
125
+ "table_caption": [
126
+ "TABLE IV. (Continued.)"
127
+ ],
128
+ "table_footnote": [],
129
+ "mineru_img_path": "images/868526b44e6f1a226fff409ad62386f20ea7264e6a88c265e589bf572c707855.jpg",
130
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/868526b44e6f1a226fff409ad62386f20ea7264e6a88c265e589bf572c707855.jpg",
131
+ "mineru_table_body": "<table><tr><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Plasma configuration</td><td>Exposure ( $10^3$ L)</td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"2\"> $Ir (Ir(acac)_3/O_2^*)$ </td><td>Hole (elongated)</td><td></td><td>370</td><td>I</td><td></td><td>SEM</td><td></td><td>226</td></tr><tr><td>Trench</td><td></td><td>370</td><td></td><td></td><td>SEM</td><td></td><td>169</td></tr><tr><td> $Pt (MeCpPtMe_3/O_2^*)^{227}$ </td><td>Trench</td><td>17</td><td>300</td><td>I</td><td></td><td>SEM</td><td>17 (D)</td><td>228</td></tr><tr><td> $Ta(TaCl_5/H_2^*)$ </td><td>Trench</td><td>3</td><td>250</td><td>I</td><td></td><td>SEM</td><td>3</td><td>229</td></tr></table>",
132
+ "source": "mineru"
133
+ },
134
+ {
135
+ "table_id": 7,
136
+ "page_nr": 19,
137
+ "in_references": false,
138
+ "image": "images/page_019_table_007.jpg",
139
+ "image_name": "page_019_table_007.jpg",
140
+ "bbox": [
141
+ 78,
142
+ 443,
143
+ 918,
144
+ 865
145
+ ],
146
+ "table_caption": [
147
+ "TABLE V. Sticking probabilities for several ALD reactants and the method how they were derived, as reported in the literature. Updated from H. C. M. Knoops et al., J. Electrochem. Soc. 157(12), G241\u2013G249 (2010)."
148
+ ],
149
+ "table_footnote": [],
150
+ "mineru_img_path": "images/327bb54c3f52457f09d48c7c586ce681193dd44e588fc20c17980ca0dbc88597.jpg",
151
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/327bb54c3f52457f09d48c7c586ce681193dd44e588fc20c17980ca0dbc88597.jpg",
152
+ "mineru_table_body": "<table><tr><td>Species</td><td>Deposited material</td><td>Method</td><td>T (\u00b0C)</td><td>Sticking probability</td><td>References</td></tr><tr><td rowspan=\"8\"> $Al(CH_3)_3$ </td><td rowspan=\"8\"> $Al_2O_3$ </td><td>Monte Carlo model</td><td>177</td><td>0.001</td><td>65</td></tr><tr><td>Ballistic model</td><td>225</td><td>0.026</td><td>200</td></tr><tr><td>Semi-Analytical model</td><td>200</td><td>0.1</td><td>67</td></tr><tr><td>DFT</td><td></td><td>0.1-0.9</td><td>176</td></tr><tr><td>Continuum model</td><td>300</td><td>0.00572</td><td>77</td></tr><tr><td>Monte Carlo model</td><td>200</td><td>0.02</td><td>128</td></tr><tr><td>Sum-frequency generation</td><td>100-300</td><td>0.002-0.005</td><td>237</td></tr><tr><td>Auger electron spectroscopy</td><td>25</td><td>0.01</td><td>235</td></tr><tr><td> $Hf(NEtMe)_4$ </td><td> $HfO_2$ </td><td>Monte Carlo model</td><td>180-270</td><td>0.03-0.6</td><td>180</td></tr><tr><td> $Ti(NMe_2)_4$ </td><td> $TiO_2$ </td><td>Monte Carlo model</td><td>180</td><td>0.02 \u00b1 0.005</td><td>178</td></tr><tr><td> $Ti(O^iPr)_4$ </td><td> $TiO_2$ </td><td>Ballistic model</td><td>125-225</td><td>0.04-0.1</td><td>204</td></tr><tr><td> $Cp^*Ti(OMe)_3$ </td><td> $TiO_2$ </td><td>Monte Carlo model</td><td>270</td><td>0.01</td><td>180</td></tr><tr><td rowspan=\"2\"> $TiCl_4$ </td><td rowspan=\"2\">TiN</td><td>QCM</td><td>25-125</td><td>0.006 \u00b1 0.002</td><td>236</td></tr><tr><td>Continuum model</td><td>110</td><td>0.1</td><td>77</td></tr><tr><td> $ZnEt_2$ </td><td>ZnO</td><td>Monte Carlo model</td><td>177</td><td>0.007</td><td>65</td></tr><tr><td> $SiCl_4$ </td><td> $SiO_2$ </td><td>Monte Carlo model</td><td></td><td> $10^{-8}$ </td><td>65 and 239</td></tr><tr><td> $H_2Si[N(C_2H_5)_2]_2$ </td><td> $SiO_2$ </td><td>Monte Carlo model</td><td>300</td><td> $3 \\times 10^{-5}$ </td><td>128</td></tr><tr><td> $Zr(NMe_2)_4$ </td><td>ZrO</td><td>QCM</td><td>200</td><td>0.07</td><td>78</td></tr><tr><td> $Co(C_5H_5)_2$ </td><td>Co</td><td>Monte Carlo model</td><td>300</td><td>0.002</td><td>220</td></tr><tr><td rowspan=\"4\"> $H_2O$ </td><td rowspan=\"4\"> $Al_2O_3$ </td><td>DFT</td><td></td><td>0.01-0.1</td><td>176</td></tr><tr><td>Sum-frequency generation</td><td>100</td><td>0.000001</td><td>238</td></tr><tr><td>Sum-frequency generation</td><td>300</td><td>0.0001</td><td>238</td></tr><tr><td>Auger electron spectroscopy</td><td>25</td><td> $0.25; 0.009^{240}$ </td><td>235</td></tr><tr><td> $O_3$ </td><td> $Al_2O_3$ </td><td>DFT</td><td></td><td>0.001-0.01</td><td>176</td></tr><tr><td> $O^*$ </td><td> $Al_2O_3$ </td><td>DFT</td><td></td><td>0.1-0.9</td><td>176</td></tr><tr><td> $H^*$ </td><td>TiN</td><td>QCM</td><td>25-125</td><td>0.0003 \u00b1 0.0001</td><td>236</td></tr><tr><td> $N^*$ </td><td>TiN</td><td>QCM</td><td>25-125</td><td>0.01 \u00b1 0.002</td><td>236</td></tr></table>",
153
+ "source": "mineru"
154
+ },
155
+ {
156
+ "table_id": 8,
157
+ "page_nr": 20,
158
+ "in_references": false,
159
+ "image": "images/page_020_table_008.jpg",
160
+ "image_name": "page_020_table_008.jpg",
161
+ "bbox": [
162
+ 81,
163
+ 156,
164
+ 486,
165
+ 283
166
+ ],
167
+ "table_caption": [
168
+ "TABLE VI. Measured recombination probabilities of ozone for various surfaces at different temperatures. Reprinted with permission from H. C. M. Knoops et al., Chem. Mater. 23(9), 2381\u20132387 (2011). Copyright 2011 American Chemical Society."
169
+ ],
170
+ "table_footnote": [],
171
+ "mineru_img_path": "images/1c3bc97743058b398bb9206ae4a6ef679db64b49bb28281e3c8c4e43476c9615.jpg",
172
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/1c3bc97743058b398bb9206ae4a6ef679db64b49bb28281e3c8c4e43476c9615.jpg",
173
+ "mineru_table_body": "<table><tr><td>Surface</td><td>Temperature (\u00b0C)</td><td>Recombination probability</td></tr><tr><td> $Al_{2}O_{3}$ </td><td>100-200</td><td> $<10^{-6}$ </td></tr><tr><td rowspan=\"3\">ZnO</td><td>100</td><td> $<10^{-6}$ </td></tr><tr><td>150</td><td> $(5 \\pm 2) \\times 10^{-5}$ </td></tr><tr><td>200</td><td> $>10^{-3}$ </td></tr><tr><td>Pt</td><td>100</td><td> $>10^{-3}$ </td></tr><tr><td> $MnO_{x}$ </td><td>100</td><td> $>10^{-3}$ </td></tr></table>",
174
+ "source": "mineru"
175
+ },
176
+ {
177
+ "table_id": 9,
178
+ "page_nr": 20,
179
+ "in_references": false,
180
+ "image": "images/page_020_table_009.jpg",
181
+ "image_name": "page_020_table_009.jpg",
182
+ "bbox": [
183
+ 509,
184
+ 156,
185
+ 915,
186
+ 705
187
+ ],
188
+ "table_caption": [
189
+ "TABLE VII. Overview of the surface recombination probabilities of O, H, and N atoms on different surfaces as reported in the literature. Updated from H. C. M. Knoops et al., J. Electrochem. Soc. 157(12), G241\u2013G249 (2010)."
190
+ ],
191
+ "table_footnote": [],
192
+ "mineru_img_path": "images/378058bafdadde9d18ef445a7326b1bbbfbcc5d1df6e19ee05a1ad3c5ab425b3.jpg",
193
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/378058bafdadde9d18ef445a7326b1bbbfbcc5d1df6e19ee05a1ad3c5ab425b3.jpg",
194
+ "mineru_table_body": "<table><tr><td>Atom</td><td>Surface</td><td>Recombination probability r</td><td>References</td></tr><tr><td rowspan=\"17\">O</td><td rowspan=\"2\">Alumina</td><td>0.0021</td><td>250</td></tr><tr><td>0.0097 \u00b1 0.0019</td><td>251</td></tr><tr><td>Silica</td><td>0.0004</td><td>252</td></tr><tr><td>Titania</td><td>0.014 \u00b1 0.003</td><td>251</td></tr><tr><td>Iron(III)oxide</td><td>0.0052</td><td>250</td></tr><tr><td>Iron(II, III)oxide</td><td>0.015 \u00b1 0.003</td><td>251</td></tr><tr><td rowspan=\"2\">Cobalt oxide</td><td>0.0049</td><td>250</td></tr><tr><td>0.029 \u00b1 0.006</td><td>251</td></tr><tr><td>Oxidized cobalt</td><td>0.085 \u00b1 0.005</td><td>253</td></tr><tr><td>Nickel oxide</td><td>0.0089</td><td>250</td></tr><tr><td>Oxidized nickel</td><td>0.27 \u00b1 0.04</td><td>254</td></tr><tr><td>Copper (II) oxide</td><td>0.043</td><td>250</td></tr><tr><td>Oxidized copper</td><td>0.225</td><td>253</td></tr><tr><td>Zinc oxide</td><td>0.00044</td><td>250</td></tr><tr><td rowspan=\"2\">Pyrex</td><td>0.000045</td><td>250</td></tr><tr><td>0.0020 \u00b1 0.0005</td><td>255</td></tr><tr><td>Stainless steel</td><td>0.0702\u00b1 0.009</td><td>256</td></tr><tr><td rowspan=\"4\">N</td><td>Aluminum</td><td>0.0018</td><td>257</td></tr><tr><td>Silicon</td><td>0.0016</td><td>257</td></tr><tr><td>Silica</td><td>0.00021 \u00b1 0.00003</td><td>258</td></tr><tr><td>Stainless steel</td><td>0.0063</td><td>257</td></tr><tr><td rowspan=\"14\">H</td><td>Aluminum</td><td>0.29</td><td>259</td></tr><tr><td rowspan=\"2\">Oxidized aluminum</td><td>0.0018 \u00b1 0.0003</td><td>260</td></tr><tr><td>0.0017 \u00b1 0.0002</td><td>261</td></tr><tr><td rowspan=\"2\">Silicon</td><td>0.8</td><td>262</td></tr><tr><td>0.66</td><td>263</td></tr><tr><td>Oxidized silicon</td><td>0.0030 \u00b1 0.0003</td><td>260</td></tr><tr><td>Titanium</td><td>0.35</td><td>259</td></tr><tr><td rowspan=\"2\">Nickel</td><td>0.25</td><td>259</td></tr><tr><td>0.18 \u00b1 0.03</td><td>260</td></tr><tr><td>Copper</td><td>0.14</td><td>259</td></tr><tr><td rowspan=\"2\">Pyrex</td><td>0.0058 \u00b1 0.0018</td><td>259</td></tr><tr><td>0.00094 \u00b1 0.0004</td><td>261</td></tr><tr><td>Stainless steel</td><td>0.030 \u00b1 0.014</td><td>260</td></tr><tr><td>Oxidized stainless steel</td><td>0.0022 \u00b1 0.0002</td><td>261</td></tr></table>",
195
+ "source": "mineru"
196
+ },
197
+ {
198
+ "table_id": 10,
199
+ "page_nr": 22,
200
+ "in_references": false,
201
+ "image": "images/page_022_table_010.jpg",
202
+ "image_name": "page_022_table_010.jpg",
203
+ "bbox": [
204
+ 128,
205
+ 124,
206
+ 878,
207
+ 872
208
+ ],
209
+ "table_caption": [
210
+ "TAB LE VI I I <sub>.</sub> Overview of d ifferent model l i n<sub>g</sub> works descri bi n<sub>g</sub> the conformal it<sub>y</sub> of ALD <sub>p</sub>rocess <sub>,</sub> l isted i n the ch ronolo<sub>g</sub> ical order"
211
+ ],
212
+ "table_footnote": [],
213
+ "mineru_img_path": "images/08b5e8f578a20f87da86ba98f51507119c813eff74a1b3a3effded30732c4dbd.jpg",
214
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/08b5e8f578a20f87da86ba98f51507119c813eff74a1b3a3effded30732c4dbd.jpg",
215
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td>Gobbert $^{282}$ </td><td>Ballistic</td><td>Molecular flowReversible adsorption during first ALD reaction, irreversible reaction during second ALD reactionSpecies fluxes constant over small time scales</td><td>2D</td><td>Trench</td><td>Predict optimal pulse durationsSimulation results for both ALD reactions and purge steps</td></tr><tr><td>Gordon $^{62}$ </td><td>Analytical (conductance formulae)</td><td>Molecular flowIrreversible reactions assumedCosine distributed re-emission directionVapor by-products neglectedNo depletion effects</td><td>3D</td><td>HoleTrench</td><td> $\\frac{Pt}{K_{max}\\sqrt{2\\pi mkT}} = 1 + \\frac{19}{4}a + \\frac{3}{2}a^{2}$ Formula to estimate the minimum exposure required for conformal coating of a hole/trench with an aspect ratio $a$ </td></tr><tr><td>Elam $^{65}$ </td><td>Monte Carlo</td><td>Molecular flowMolecule is irreversibly adsorbed if random number &lt; sRe-emission of the molecule over a distance of $\\pm d_i^{289}$ with $d_i$ the diameter of the pore at the ith positionAll nanopores identical and molecules are entering the pores from both ends with equal rate</td><td>1D</td><td>AAO</td><td>Predict minimum exposure for conformal coating $s \\gg H$ diffusion limited growth type integrated coverage $\\sim t^{1/2}$ $s \\ll H$ reaction limited growth type integrated coverage $\\sim t$ </td></tr><tr><td>Neizvestny $^{274}$ </td><td>Monte Carlo</td><td>Only reactant molecules on the substrate are considered, not those in the gaseous phaseBy-products evaporate immediatelyNucleation starts around defects(sticking centers)</td><td>3D</td><td>Porous substrate</td><td>Growth per cycle stabilization after 2\u20134 cycles due to the roughness of the surface which increases nucleation</td></tr><tr><td>Kim $^{204}$ </td><td>Ballistic</td><td>Molecular flowIrreversible Langmuir adsorptionStudied 3 re-emission mechanisms:Cosine distributed, random, and specularAll reactant molecules chemisorbed on the surface are converted into a solid filmIdeal gas at the hole entrance (flux</td><td>3D</td><td>Hole</td><td>Study step coverage depending on the reactant injection time</td></tr></table>",
216
+ "source": "mineru"
217
+ },
218
+ {
219
+ "table_id": 11,
220
+ "page_nr": 23,
221
+ "in_references": false,
222
+ "image": "images/page_023_table_011.jpg",
223
+ "image_name": "page_023_table_011.jpg",
224
+ "bbox": [
225
+ 128,
226
+ 124,
227
+ 878,
228
+ 880
229
+ ],
230
+ "table_caption": [
231
+ "TABLE VI I I <sub>.</sub> ( Continued. )"
232
+ ],
233
+ "table_footnote": [],
234
+ "mineru_img_path": "images/36e5c77c8e28bb0e2527cc5e783ded7214edb771ea46f551035027cb28f9c8ec.jpg",
235
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/36e5c77c8e28bb0e2527cc5e783ded7214edb771ea46f551035027cb28f9c8ec.jpg",
236
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td> $Rose^{178}$ </td><td>Monte Carlo</td><td>constant in time)Molecular flow Adsorption if random number &lt; s Re-emission according a random direction</td><td>2D</td><td>Hole</td><td>Predict thickness profileMethod to determine s</td></tr><tr><td> $Dendooven^{67}$ </td><td>Semi-analytical (conductance formulae)</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission directionSurface reactions occur at a much faster time scale than gas transport into the holeIncoming flux at pore entrance constant in time</td><td>1D</td><td>Cylindrical hole</td><td>Predict coverage as a function of depthExtension Gordon model: Sticking probability different from unity</td></tr><tr><td> $Lee^{290}$ </td><td>Continuum</td><td>Molecular flowSticking probability of unity\u201cOuter\u201d transport of molecules is much faster than transport into the poresOnly radial diffusionConcentration of reactant molecules is constantIrreversible adsorption</td><td>3D</td><td>Cylindrical, spherical, and planar monoliths with tortuous pores</td><td>Calculate minimum exposure time for conformal coating. This exposure is largely dependent on the shape of the substrate.</td></tr><tr><td> $Dendooven^{70}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission direction Recombination probability</td><td>3D</td><td>Hole</td><td>Predict coverage as a function of depth of the feature, for PE-ALD</td></tr><tr><td> $Knoops^{66}$ </td><td>Monte Carlo</td><td>Molecular flow $s,r\\ constant^{291}$ Cosine distributed re-emission direction</td><td>2D</td><td>Trench</td><td>Simulate PE-ALDIntroduction of recombination limited growth type</td></tr><tr><td> $Adomaitis^{266}$ </td><td>Ballistic</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission directionReactant in - reactant out = reactant consumedSteady-state fluxes</td><td>3D</td><td>Circular hole</td><td>Derive reactant transmission probability functions for intra pore feature fluxes</td></tr></table>",
237
+ "source": "mineru"
238
+ },
239
+ {
240
+ "table_id": 12,
241
+ "page_nr": 24,
242
+ "in_references": false,
243
+ "image": "images/page_024_table_012.jpg",
244
+ "image_name": "page_024_table_012.jpg",
245
+ "bbox": [
246
+ 128,
247
+ 124,
248
+ 878,
249
+ 875
250
+ ],
251
+ "table_caption": [
252
+ "TABLE VI I I <sub>.</sub> ( Continued. )"
253
+ ],
254
+ "table_footnote": [],
255
+ "mineru_img_path": "images/334eb716deb704c09afa90d163843385a9a433dc982b25c828d20e5a4c4466a2.jpg",
256
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/334eb716deb704c09afa90d163843385a9a433dc982b25c828d20e5a4c4466a2.jpg",
257
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td>Musschoot $^{69}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionRe-emission according inverse reflectionParticles in the medium are at rest, and the moving particle is smallNeglect multiple collisions in a cellTransport equations (transmission, loss, and reflection probability)</td><td>1D</td><td>Hole filled with non-woven polyester</td><td>Simulate thermal and PE-ALDPredict coverage as function of depth in porous/fibrous substrate</td></tr><tr><td>Yanguas-Gil $^{272}$ </td><td>Continuum</td><td>Molecular flowIrreversible Langmuir adsorptionThe surface coverage changes concurrently with the diffusion process $^{292}$ Time-dependent reaction equation</td><td>1D</td><td>Via</td><td>Predict saturation exposure times and thickness profilesSuited for high tortuosity structures (high number of wall collisions)Can be extended for viscous flow, 3D,...</td></tr><tr><td>Shimizu $^{220}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission direction</td><td>2D</td><td>Trench</td><td>Determine sticking probability</td></tr><tr><td>Yazdani $^{100}$ </td><td>Continuum</td><td>Molecular flowQuick equilibrium within and outside the CNT arraysFast distribution of carrier gasAdsorption rate &gt;&gt; diffusion rateAnalytic approximation for s = 1Exclude discrete nucleation phase $^{293}$ </td><td>3D</td><td>CNT</td><td>A larger precursor supply is needed with increasing film thickness due to the increasing diameter of CNTs in combination with a larger surface area, which results in a limited penetration depth and non-uniform thickness</td></tr><tr><td>Keuter $^{294}$ </td><td>Continuum</td><td>Based on the model by Yanguas-Gil $^{272}$ Including second-order kineticsTransport to the substrate is not consideredPores are not taken individually into account (mean porosity, tortuosity, pore size, and Knudsen diffusion coefficient)Only reaction sites which are not shielded are taken into account</td><td>1D</td><td>Porous substrate</td><td>Predict thickness profile</td></tr></table>",
258
+ "source": "mineru"
259
+ },
260
+ {
261
+ "table_id": 13,
262
+ "page_nr": 25,
263
+ "in_references": false,
264
+ "image": "images/page_025_table_013.jpg",
265
+ "image_name": "page_025_table_013.jpg",
266
+ "bbox": [
267
+ 128,
268
+ 101,
269
+ 878,
270
+ 679
271
+ ],
272
+ "table_caption": [
273
+ "TABLE VIII <sub>.</sub> (Continued. )"
274
+ ],
275
+ "table_footnote": [],
276
+ "mineru_img_path": "images/f8e53841d662047578e13ed486f08957bc0c9c3dcf984665dfdd3e22fdff5fce.jpg",
277
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/f8e53841d662047578e13ed486f08957bc0c9c3dcf984665dfdd3e22fdff5fce.jpg",
278
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td rowspan=\"2\"> $Cremers^{51}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission direction</td><td>3D</td><td>Square holeSquare pillar</td><td>The required exposure for conformal coating of an array of pillars is a factor of 2-30 times smaller than an array of holes with equal surface area</td></tr><tr><td>Analytic</td><td>Molecular flowInitial sticking coefficient of unityCosine distributed re-emission direction</td><td></td><td></td><td></td></tr><tr><td> $Schwille^{129}$ </td><td>Monte Carlo</td><td>Molecular and viscous flowCosine distributed/specular re-emission directionCoverage if random number &lt; s</td><td>2Dcentro-symmetric</td><td>Cavity</td><td>Predict film thickness in 3D structuresExtraction of the sticking probability of the reactant</td></tr><tr><td rowspan=\"2\"> $Jin^{295}$ </td><td>Monte Carlo</td><td>Molecular and viscous flow</td><td>3D</td><td>Nanoparticle agglomerates</td><td>Predict pulse time for conformal coating</td></tr><tr><td>Analytic</td><td>Molecular flow</td><td></td><td></td><td></td></tr><tr><td rowspan=\"2\"> $Poodt^{139}$ </td><td>Monte Carlo</td><td>Molecular and viscous flowIrreversible Langmuir adsorptionSimplified diffuse reflection $model^{296}$ </td><td>2D</td><td>Trench</td><td>Predict exposure for 95% coverage</td></tr><tr><td>Analytic</td><td>Molecular and viscous flow</td><td>3D</td><td>Hole</td><td>Predict the saturation dose for complete coverage (only valid in the diffusion limited growth type)</td></tr><tr><td> $Ylilammi^{77}$ </td><td>Continuum</td><td>Molecular flowReversible Langmuir adsorptionIrreversible successive surface reaction</td><td>1D</td><td>LHAR</td><td>Calculate the thickness profile in high-aspect ratio trenchesExtract kinetic growth information</td></tr></table>",
279
+ "source": "mineru"
280
+ },
281
+ {
282
+ "table_id": 14,
283
+ "page_nr": 26,
284
+ "in_references": false,
285
+ "image": "images/page_026_table_014.jpg",
286
+ "image_name": "page_026_table_014.jpg",
287
+ "bbox": [
288
+ 78,
289
+ 134,
290
+ 915,
291
+ 533
292
+ ],
293
+ "table_caption": [
294
+ "TABLE IX. Overview of multiscale modelling works describing the conformality of ALD, listed in the chronological order."
295
+ ],
296
+ "table_footnote": [],
297
+ "mineru_img_path": "images/b56acd30e8180406f2b6f06e60bdc9168ed57578634db1657d87c952b2f13934.jpg",
298
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/images/b56acd30e8180406f2b6f06e60bdc9168ed57578634db1657d87c952b2f13934.jpg",
299
+ "mineru_table_body": "<table><tr><td>References</td><td>Scale</td><td>Model</td><td>Key assumptions</td><td>Space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td rowspan=\"2\">Prechtl $^{176}$ </td><td>Feature</td><td>Ballistic</td><td rowspan=\"2\">B3LYP gradient corrected DFT functionalMolecular flowViscous flow</td><td>2D</td><td>Trench</td><td rowspan=\"2\">Derive the activation energy of the initial adsorption and sFor low s, depletion on the reactor scale is small; filling time ~ 1/sFor high s, filling time independent of sPredict minimum exposure for conformal coating</td></tr><tr><td>Reactor</td><td></td><td>2D</td><td>Showerhead reactor</td></tr><tr><td rowspan=\"2\">Lankhorst $^{230}$ </td><td>Feature</td><td>Continuum</td><td>Molecular flow</td><td>1D</td><td>Trench</td><td rowspan=\"2\">Deposition time for conformal coating of trenched wafers &gt;&gt; than for flat wafers</td></tr><tr><td>Reactor</td><td>Continuum</td><td>Viscous flow</td><td>3D</td><td>Batch reactor</td></tr><tr><td rowspan=\"2\">Adomaitis $^{266,270}$ </td><td>Feature</td><td>Continuum</td><td>Molecular flow</td><td>1D</td><td rowspan=\"2\">Nanopore</td><td rowspan=\"2\">Observe GPC, film density, and surface roughness with varying ALD cycles and reactant dose</td></tr><tr><td>Reaction</td><td>Monte Carlo</td><td>Molecular flow</td><td>2D</td></tr><tr><td rowspan=\"2\">Yanguas-Gil $^{264}$ </td><td>Feature</td><td>Ballistic</td><td rowspan=\"2\">Markov chainMolecular flowCosine distributed re-emission directionMultiple reaction channels each with a specific probability</td><td rowspan=\"2\">3D</td><td rowspan=\"2\">Circular pores</td><td rowspan=\"2\">Track the probabilities as a function of the number of collisionsGeneral expression for the absorption, escape, and effective reaction probability of the featurePredict total exposure required to cover the substrate</td></tr><tr><td>Reaction</td><td></td></tr><tr><td rowspan=\"2\">Miyano $^{203}$ </td><td>Reactor</td><td>Continuum</td><td rowspan=\"2\">Flow rate of the gas below the inlet is uniform over the planeMolecular flowReversible physisorption, irreversible chemisorption</td><td>2D</td><td>Showerhead reactor</td><td rowspan=\"2\">Predict the thickness profile in a holePrecursor partial pressure and feeding time can be estimated for a hole with a given a</td></tr><tr><td>Feature</td><td></td><td>2D</td><td>Hole</td></tr></table>",
300
+ "source": "mineru"
301
+ }
302
+ ],
303
+ "mineru_output_dir": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto",
304
+ "mineru_content_list": "original-run://profiling/ald/hybrid-engine/20260903T120211Z__ald__mineru-hybrid-engine__slurm-32734/mineru-output/Cremers - 2019/hybrid_auto/Cremers - 2019_content_list.json"
305
+ }
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/gpu_samples.csv ADDED
@@ -0,0 +1,623 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ timestamp_utc,index,uuid,name,memory_total_mib,memory_used_mib
2
+ 2026-09-03T14:40:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,0.0
3
+ 2026-09-03T14:40:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,0.0
4
+ 2026-09-03T14:40:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,0.0
5
+ 2026-09-03T14:40:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,0.0
6
+ 2026-09-03T14:40:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,0.0
7
+ 2026-09-03T14:40:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,0.0
8
+ 2026-09-03T14:40:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
9
+ 2026-09-03T14:40:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
10
+ 2026-09-03T14:40:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
11
+ 2026-09-03T14:40:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
12
+ 2026-09-03T14:40:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
13
+ 2026-09-03T14:40:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
14
+ 2026-09-03T14:40:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
15
+ 2026-09-03T14:40:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
16
+ 2026-09-03T14:40:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
17
+ 2026-09-03T14:40:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
18
+ 2026-09-03T14:40:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
19
+ 2026-09-03T14:40:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
20
+ 2026-09-03T14:40:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
21
+ 2026-09-03T14:40:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
22
+ 2026-09-03T14:40:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
23
+ 2026-09-03T14:40:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
24
+ 2026-09-03T14:40:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
25
+ 2026-09-03T14:40:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
26
+ 2026-09-03T14:40:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
27
+ 2026-09-03T14:40:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
28
+ 2026-09-03T14:40:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
29
+ 2026-09-03T14:40:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
30
+ 2026-09-03T14:40:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
31
+ 2026-09-03T14:40:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
32
+ 2026-09-03T14:40:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
33
+ 2026-09-03T14:40:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
34
+ 2026-09-03T14:40:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
35
+ 2026-09-03T14:40:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
36
+ 2026-09-03T14:40:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
37
+ 2026-09-03T14:40:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
38
+ 2026-09-03T14:40:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
39
+ 2026-09-03T14:40:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
40
+ 2026-09-03T14:40:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
41
+ 2026-09-03T14:40:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
42
+ 2026-09-03T14:40:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
43
+ 2026-09-03T14:40:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
44
+ 2026-09-03T14:40:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
45
+ 2026-09-03T14:40:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
46
+ 2026-09-03T14:40:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
47
+ 2026-09-03T14:40:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
48
+ 2026-09-03T14:40:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
49
+ 2026-09-03T14:40:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
50
+ 2026-09-03T14:40:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
51
+ 2026-09-03T14:40:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
52
+ 2026-09-03T14:40:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
53
+ 2026-09-03T14:40:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
54
+ 2026-09-03T14:40:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
55
+ 2026-09-03T14:40:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
56
+ 2026-09-03T14:41:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
57
+ 2026-09-03T14:41:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
58
+ 2026-09-03T14:41:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
59
+ 2026-09-03T14:41:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
60
+ 2026-09-03T14:41:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
61
+ 2026-09-03T14:41:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
62
+ 2026-09-03T14:41:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
63
+ 2026-09-03T14:41:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
64
+ 2026-09-03T14:41:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
65
+ 2026-09-03T14:41:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
66
+ 2026-09-03T14:41:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
67
+ 2026-09-03T14:41:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
68
+ 2026-09-03T14:41:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
69
+ 2026-09-03T14:41:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
70
+ 2026-09-03T14:41:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
71
+ 2026-09-03T14:41:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
72
+ 2026-09-03T14:41:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
73
+ 2026-09-03T14:41:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
74
+ 2026-09-03T14:41:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
75
+ 2026-09-03T14:41:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
76
+ 2026-09-03T14:41:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
77
+ 2026-09-03T14:41:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
78
+ 2026-09-03T14:41:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
79
+ 2026-09-03T14:41:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
80
+ 2026-09-03T14:41:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
81
+ 2026-09-03T14:41:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
82
+ 2026-09-03T14:41:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
83
+ 2026-09-03T14:41:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
84
+ 2026-09-03T14:41:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
85
+ 2026-09-03T14:41:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
86
+ 2026-09-03T14:41:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
87
+ 2026-09-03T14:41:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
88
+ 2026-09-03T14:41:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
89
+ 2026-09-03T14:41:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
90
+ 2026-09-03T14:41:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
91
+ 2026-09-03T14:41:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
92
+ 2026-09-03T14:41:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
93
+ 2026-09-03T14:41:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
94
+ 2026-09-03T14:41:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
95
+ 2026-09-03T14:41:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
96
+ 2026-09-03T14:41:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
97
+ 2026-09-03T14:41:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
98
+ 2026-09-03T14:41:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
99
+ 2026-09-03T14:41:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
100
+ 2026-09-03T14:41:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
101
+ 2026-09-03T14:41:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
102
+ 2026-09-03T14:41:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
103
+ 2026-09-03T14:41:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
104
+ 2026-09-03T14:41:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
105
+ 2026-09-03T14:41:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
106
+ 2026-09-03T14:41:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
107
+ 2026-09-03T14:41:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
108
+ 2026-09-03T14:41:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
109
+ 2026-09-03T14:41:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2213.0
110
+ 2026-09-03T14:41:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2213.0
111
+ 2026-09-03T14:41:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2915.0
112
+ 2026-09-03T14:41:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2915.0
113
+ 2026-09-03T14:41:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3745.0
114
+ 2026-09-03T14:42:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
115
+ 2026-09-03T14:42:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
116
+ 2026-09-03T14:42:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
117
+ 2026-09-03T14:42:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
118
+ 2026-09-03T14:42:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
119
+ 2026-09-03T14:42:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
120
+ 2026-09-03T14:42:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
121
+ 2026-09-03T14:42:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
122
+ 2026-09-03T14:42:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
123
+ 2026-09-03T14:42:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
124
+ 2026-09-03T14:42:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4867.0
125
+ 2026-09-03T14:42:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3121.0
126
+ 2026-09-03T14:42:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22329.0
127
+ 2026-09-03T14:42:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
128
+ 2026-09-03T14:42:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
129
+ 2026-09-03T14:42:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
130
+ 2026-09-03T14:42:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
131
+ 2026-09-03T14:42:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
132
+ 2026-09-03T14:42:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
133
+ 2026-09-03T14:42:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
134
+ 2026-09-03T14:42:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
135
+ 2026-09-03T14:42:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
136
+ 2026-09-03T14:42:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
137
+ 2026-09-03T14:42:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
138
+ 2026-09-03T14:42:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
139
+ 2026-09-03T14:42:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
140
+ 2026-09-03T14:42:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
141
+ 2026-09-03T14:42:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
142
+ 2026-09-03T14:42:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
143
+ 2026-09-03T14:42:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
144
+ 2026-09-03T14:42:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
145
+ 2026-09-03T14:42:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
146
+ 2026-09-03T14:42:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
147
+ 2026-09-03T14:42:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,23254.0
148
+ 2026-09-03T14:42:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25492.0
149
+ 2026-09-03T14:42:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25850.0
150
+ 2026-09-03T14:42:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25854.0
151
+ 2026-09-03T14:42:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25854.0
152
+ 2026-09-03T14:42:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
153
+ 2026-09-03T14:42:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
154
+ 2026-09-03T14:42:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
155
+ 2026-09-03T14:42:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
156
+ 2026-09-03T14:42:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
157
+ 2026-09-03T14:42:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26318.0
158
+ 2026-09-03T14:42:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26320.0
159
+ 2026-09-03T14:42:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26324.0
160
+ 2026-09-03T14:42:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26324.0
161
+ 2026-09-03T14:42:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26326.0
162
+ 2026-09-03T14:42:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26326.0
163
+ 2026-09-03T14:42:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26326.0
164
+ 2026-09-03T14:42:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26326.0
165
+ 2026-09-03T14:42:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26326.0
166
+ 2026-09-03T14:42:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26326.0
167
+ 2026-09-03T14:42:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26326.0
168
+ 2026-09-03T14:42:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26336.0
169
+ 2026-09-03T14:42:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26338.0
170
+ 2026-09-03T14:42:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26338.0
171
+ 2026-09-03T14:42:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28192.0
172
+ 2026-09-03T14:42:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28192.0
173
+ 2026-09-03T14:43:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28192.0
174
+ 2026-09-03T14:43:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28192.0
175
+ 2026-09-03T14:43:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28192.0
176
+ 2026-09-03T14:43:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28192.0
177
+ 2026-09-03T14:43:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28192.0
178
+ 2026-09-03T14:43:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,28202.0
179
+ 2026-09-03T14:43:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24298.0
180
+ 2026-09-03T14:43:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24298.0
181
+ 2026-09-03T14:43:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24298.0
182
+ 2026-09-03T14:43:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,1109.0
183
+ 2026-09-03T14:43:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,1109.0
184
+ 2026-09-03T14:43:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
185
+ 2026-09-03T14:43:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
186
+ 2026-09-03T14:43:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
187
+ 2026-09-03T14:43:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
188
+ 2026-09-03T14:43:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
189
+ 2026-09-03T14:43:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
190
+ 2026-09-03T14:43:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
191
+ 2026-09-03T14:43:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
192
+ 2026-09-03T14:43:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
193
+ 2026-09-03T14:43:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
194
+ 2026-09-03T14:43:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
195
+ 2026-09-03T14:43:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
196
+ 2026-09-03T14:43:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
197
+ 2026-09-03T14:43:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
198
+ 2026-09-03T14:43:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
199
+ 2026-09-03T14:43:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
200
+ 2026-09-03T14:43:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
201
+ 2026-09-03T14:43:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
202
+ 2026-09-03T14:43:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
203
+ 2026-09-03T14:43:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
204
+ 2026-09-03T14:43:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
205
+ 2026-09-03T14:43:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
206
+ 2026-09-03T14:43:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
207
+ 2026-09-03T14:43:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
208
+ 2026-09-03T14:43:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
209
+ 2026-09-03T14:43:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
210
+ 2026-09-03T14:43:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
211
+ 2026-09-03T14:43:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
212
+ 2026-09-03T14:43:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
213
+ 2026-09-03T14:43:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
214
+ 2026-09-03T14:43:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
215
+ 2026-09-03T14:43:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
216
+ 2026-09-03T14:43:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
217
+ 2026-09-03T14:43:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
218
+ 2026-09-03T14:43:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
219
+ 2026-09-03T14:43:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
220
+ 2026-09-03T14:43:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
221
+ 2026-09-03T14:43:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
222
+ 2026-09-03T14:43:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
223
+ 2026-09-03T14:43:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
224
+ 2026-09-03T14:43:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
225
+ 2026-09-03T14:43:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
226
+ 2026-09-03T14:43:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
227
+ 2026-09-03T14:43:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
228
+ 2026-09-03T14:43:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
229
+ 2026-09-03T14:43:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
230
+ 2026-09-03T14:43:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
231
+ 2026-09-03T14:44:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
232
+ 2026-09-03T14:44:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
233
+ 2026-09-03T14:44:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
234
+ 2026-09-03T14:44:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
235
+ 2026-09-03T14:44:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
236
+ 2026-09-03T14:44:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
237
+ 2026-09-03T14:44:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
238
+ 2026-09-03T14:44:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
239
+ 2026-09-03T14:44:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
240
+ 2026-09-03T14:44:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
241
+ 2026-09-03T14:44:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
242
+ 2026-09-03T14:44:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
243
+ 2026-09-03T14:44:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
244
+ 2026-09-03T14:44:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
245
+ 2026-09-03T14:44:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
246
+ 2026-09-03T14:44:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
247
+ 2026-09-03T14:44:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
248
+ 2026-09-03T14:44:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
249
+ 2026-09-03T14:44:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
250
+ 2026-09-03T14:44:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
251
+ 2026-09-03T14:44:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
252
+ 2026-09-03T14:44:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
253
+ 2026-09-03T14:44:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
254
+ 2026-09-03T14:44:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
255
+ 2026-09-03T14:44:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
256
+ 2026-09-03T14:44:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
257
+ 2026-09-03T14:44:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
258
+ 2026-09-03T14:44:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
259
+ 2026-09-03T14:44:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
260
+ 2026-09-03T14:44:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
261
+ 2026-09-03T14:44:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
262
+ 2026-09-03T14:44:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
263
+ 2026-09-03T14:44:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
264
+ 2026-09-03T14:44:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
265
+ 2026-09-03T14:44:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
266
+ 2026-09-03T14:44:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
267
+ 2026-09-03T14:44:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
268
+ 2026-09-03T14:44:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
269
+ 2026-09-03T14:44:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
270
+ 2026-09-03T14:44:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
271
+ 2026-09-03T14:44:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
272
+ 2026-09-03T14:44:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
273
+ 2026-09-03T14:44:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
274
+ 2026-09-03T14:44:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
275
+ 2026-09-03T14:44:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
276
+ 2026-09-03T14:44:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
277
+ 2026-09-03T14:44:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
278
+ 2026-09-03T14:44:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
279
+ 2026-09-03T14:44:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
280
+ 2026-09-03T14:44:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
281
+ 2026-09-03T14:44:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
282
+ 2026-09-03T14:44:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
283
+ 2026-09-03T14:44:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
284
+ 2026-09-03T14:44:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
285
+ 2026-09-03T14:44:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
286
+ 2026-09-03T14:44:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
287
+ 2026-09-03T14:44:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
288
+ 2026-09-03T14:44:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
289
+ 2026-09-03T14:45:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
290
+ 2026-09-03T14:45:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
291
+ 2026-09-03T14:45:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
292
+ 2026-09-03T14:45:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
293
+ 2026-09-03T14:45:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
294
+ 2026-09-03T14:45:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2213.0
295
+ 2026-09-03T14:45:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2915.0
296
+ 2026-09-03T14:45:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2915.0
297
+ 2026-09-03T14:45:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3745.0
298
+ 2026-09-03T14:45:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
299
+ 2026-09-03T14:45:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
300
+ 2026-09-03T14:45:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
301
+ 2026-09-03T14:45:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
302
+ 2026-09-03T14:45:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
303
+ 2026-09-03T14:45:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
304
+ 2026-09-03T14:45:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
305
+ 2026-09-03T14:45:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
306
+ 2026-09-03T14:45:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
307
+ 2026-09-03T14:45:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
308
+ 2026-09-03T14:45:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4867.0
309
+ 2026-09-03T14:45:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22199.0
310
+ 2026-09-03T14:45:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22381.0
311
+ 2026-09-03T14:45:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
312
+ 2026-09-03T14:45:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
313
+ 2026-09-03T14:45:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
314
+ 2026-09-03T14:45:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
315
+ 2026-09-03T14:45:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
316
+ 2026-09-03T14:45:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
317
+ 2026-09-03T14:45:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
318
+ 2026-09-03T14:45:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
319
+ 2026-09-03T14:45:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
320
+ 2026-09-03T14:45:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
321
+ 2026-09-03T14:45:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
322
+ 2026-09-03T14:45:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
323
+ 2026-09-03T14:45:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
324
+ 2026-09-03T14:45:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
325
+ 2026-09-03T14:45:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
326
+ 2026-09-03T14:45:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
327
+ 2026-09-03T14:45:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
328
+ 2026-09-03T14:45:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
329
+ 2026-09-03T14:45:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
330
+ 2026-09-03T14:45:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
331
+ 2026-09-03T14:45:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
332
+ 2026-09-03T14:45:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,23254.0
333
+ 2026-09-03T14:45:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25498.0
334
+ 2026-09-03T14:45:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25850.0
335
+ 2026-09-03T14:45:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25850.0
336
+ 2026-09-03T14:45:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25850.0
337
+ 2026-09-03T14:45:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25850.0
338
+ 2026-09-03T14:45:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26312.0
339
+ 2026-09-03T14:45:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26312.0
340
+ 2026-09-03T14:45:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26312.0
341
+ 2026-09-03T14:45:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26312.0
342
+ 2026-09-03T14:45:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26312.0
343
+ 2026-09-03T14:45:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26312.0
344
+ 2026-09-03T14:45:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26312.0
345
+ 2026-09-03T14:45:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26314.0
346
+ 2026-09-03T14:45:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26314.0
347
+ 2026-09-03T14:46:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26314.0
348
+ 2026-09-03T14:46:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26314.0
349
+ 2026-09-03T14:46:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26764.0
350
+ 2026-09-03T14:46:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26764.0
351
+ 2026-09-03T14:46:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26764.0
352
+ 2026-09-03T14:46:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26766.0
353
+ 2026-09-03T14:46:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26766.0
354
+ 2026-09-03T14:46:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26766.0
355
+ 2026-09-03T14:46:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
356
+ 2026-09-03T14:46:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
357
+ 2026-09-03T14:46:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
358
+ 2026-09-03T14:46:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
359
+ 2026-09-03T14:46:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
360
+ 2026-09-03T14:46:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
361
+ 2026-09-03T14:46:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
362
+ 2026-09-03T14:46:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
363
+ 2026-09-03T14:46:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
364
+ 2026-09-03T14:46:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26768.0
365
+ 2026-09-03T14:46:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26778.0
366
+ 2026-09-03T14:46:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
367
+ 2026-09-03T14:46:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
368
+ 2026-09-03T14:46:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
369
+ 2026-09-03T14:46:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
370
+ 2026-09-03T14:46:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
371
+ 2026-09-03T14:46:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
372
+ 2026-09-03T14:46:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
373
+ 2026-09-03T14:46:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
374
+ 2026-09-03T14:46:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
375
+ 2026-09-03T14:46:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
376
+ 2026-09-03T14:46:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26784.0
377
+ 2026-09-03T14:46:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
378
+ 2026-09-03T14:46:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
379
+ 2026-09-03T14:46:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
380
+ 2026-09-03T14:46:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
381
+ 2026-09-03T14:46:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
382
+ 2026-09-03T14:46:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
383
+ 2026-09-03T14:46:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
384
+ 2026-09-03T14:46:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
385
+ 2026-09-03T14:46:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
386
+ 2026-09-03T14:46:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
387
+ 2026-09-03T14:46:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
388
+ 2026-09-03T14:46:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
389
+ 2026-09-03T14:46:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
390
+ 2026-09-03T14:46:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
391
+ 2026-09-03T14:46:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
392
+ 2026-09-03T14:46:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
393
+ 2026-09-03T14:46:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
394
+ 2026-09-03T14:46:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
395
+ 2026-09-03T14:46:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26794.0
396
+ 2026-09-03T14:46:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26798.0
397
+ 2026-09-03T14:46:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
398
+ 2026-09-03T14:46:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
399
+ 2026-09-03T14:46:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
400
+ 2026-09-03T14:46:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
401
+ 2026-09-03T14:46:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
402
+ 2026-09-03T14:46:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
403
+ 2026-09-03T14:46:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
404
+ 2026-09-03T14:46:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
405
+ 2026-09-03T14:46:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
406
+ 2026-09-03T14:47:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
407
+ 2026-09-03T14:47:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
408
+ 2026-09-03T14:47:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27698.0
409
+ 2026-09-03T14:47:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27708.0
410
+ 2026-09-03T14:47:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24916.0
411
+ 2026-09-03T14:47:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24916.0
412
+ 2026-09-03T14:47:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24916.0
413
+ 2026-09-03T14:47:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24916.0
414
+ 2026-09-03T14:47:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,1281.0
415
+ 2026-09-03T14:47:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,1281.0
416
+ 2026-09-03T14:47:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,1281.0
417
+ 2026-09-03T14:47:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
418
+ 2026-09-03T14:47:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
419
+ 2026-09-03T14:47:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
420
+ 2026-09-03T14:47:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
421
+ 2026-09-03T14:47:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
422
+ 2026-09-03T14:47:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
423
+ 2026-09-03T14:47:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
424
+ 2026-09-03T14:47:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
425
+ 2026-09-03T14:47:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
426
+ 2026-09-03T14:47:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
427
+ 2026-09-03T14:47:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
428
+ 2026-09-03T14:47:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
429
+ 2026-09-03T14:47:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
430
+ 2026-09-03T14:47:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
431
+ 2026-09-03T14:47:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
432
+ 2026-09-03T14:47:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
433
+ 2026-09-03T14:47:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
434
+ 2026-09-03T14:47:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
435
+ 2026-09-03T14:47:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
436
+ 2026-09-03T14:47:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
437
+ 2026-09-03T14:47:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
438
+ 2026-09-03T14:47:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
439
+ 2026-09-03T14:47:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
440
+ 2026-09-03T14:47:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
441
+ 2026-09-03T14:47:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
442
+ 2026-09-03T14:47:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
443
+ 2026-09-03T14:47:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
444
+ 2026-09-03T14:47:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
445
+ 2026-09-03T14:47:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
446
+ 2026-09-03T14:47:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
447
+ 2026-09-03T14:47:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
448
+ 2026-09-03T14:47:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
449
+ 2026-09-03T14:47:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
450
+ 2026-09-03T14:47:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
451
+ 2026-09-03T14:47:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
452
+ 2026-09-03T14:47:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
453
+ 2026-09-03T14:47:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
454
+ 2026-09-03T14:47:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
455
+ 2026-09-03T14:47:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
456
+ 2026-09-03T14:47:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
457
+ 2026-09-03T14:47:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
458
+ 2026-09-03T14:47:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
459
+ 2026-09-03T14:47:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
460
+ 2026-09-03T14:47:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
461
+ 2026-09-03T14:47:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
462
+ 2026-09-03T14:47:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
463
+ 2026-09-03T14:47:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
464
+ 2026-09-03T14:48:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
465
+ 2026-09-03T14:48:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
466
+ 2026-09-03T14:48:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
467
+ 2026-09-03T14:48:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
468
+ 2026-09-03T14:48:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
469
+ 2026-09-03T14:48:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
470
+ 2026-09-03T14:48:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
471
+ 2026-09-03T14:48:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
472
+ 2026-09-03T14:48:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
473
+ 2026-09-03T14:48:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
474
+ 2026-09-03T14:48:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
475
+ 2026-09-03T14:48:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
476
+ 2026-09-03T14:48:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
477
+ 2026-09-03T14:48:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
478
+ 2026-09-03T14:48:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
479
+ 2026-09-03T14:48:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
480
+ 2026-09-03T14:48:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
481
+ 2026-09-03T14:48:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
482
+ 2026-09-03T14:48:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
483
+ 2026-09-03T14:48:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
484
+ 2026-09-03T14:48:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
485
+ 2026-09-03T14:48:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
486
+ 2026-09-03T14:48:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
487
+ 2026-09-03T14:48:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
488
+ 2026-09-03T14:48:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
489
+ 2026-09-03T14:48:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
490
+ 2026-09-03T14:48:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
491
+ 2026-09-03T14:48:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
492
+ 2026-09-03T14:48:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
493
+ 2026-09-03T14:48:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
494
+ 2026-09-03T14:48:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
495
+ 2026-09-03T14:48:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
496
+ 2026-09-03T14:48:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
497
+ 2026-09-03T14:48:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
498
+ 2026-09-03T14:48:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
499
+ 2026-09-03T14:48:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
500
+ 2026-09-03T14:48:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
501
+ 2026-09-03T14:48:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
502
+ 2026-09-03T14:48:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
503
+ 2026-09-03T14:48:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
504
+ 2026-09-03T14:48:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
505
+ 2026-09-03T14:48:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
506
+ 2026-09-03T14:48:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
507
+ 2026-09-03T14:48:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
508
+ 2026-09-03T14:48:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
509
+ 2026-09-03T14:48:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
510
+ 2026-09-03T14:48:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
511
+ 2026-09-03T14:48:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
512
+ 2026-09-03T14:48:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
513
+ 2026-09-03T14:48:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
514
+ 2026-09-03T14:48:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
515
+ 2026-09-03T14:48:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
516
+ 2026-09-03T14:48:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
517
+ 2026-09-03T14:48:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
518
+ 2026-09-03T14:48:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
519
+ 2026-09-03T14:48:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
520
+ 2026-09-03T14:48:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
521
+ 2026-09-03T14:48:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
522
+ 2026-09-03T14:49:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
523
+ 2026-09-03T14:49:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
524
+ 2026-09-03T14:49:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
525
+ 2026-09-03T14:49:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
526
+ 2026-09-03T14:49:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
527
+ 2026-09-03T14:49:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
528
+ 2026-09-03T14:49:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,545.0
529
+ 2026-09-03T14:49:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2213.0
530
+ 2026-09-03T14:49:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2213.0
531
+ 2026-09-03T14:49:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,2915.0
532
+ 2026-09-03T14:49:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3745.0
533
+ 2026-09-03T14:49:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
534
+ 2026-09-03T14:49:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
535
+ 2026-09-03T14:49:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
536
+ 2026-09-03T14:49:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
537
+ 2026-09-03T14:49:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
538
+ 2026-09-03T14:49:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
539
+ 2026-09-03T14:49:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
540
+ 2026-09-03T14:49:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
541
+ 2026-09-03T14:49:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
542
+ 2026-09-03T14:49:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4865.0
543
+ 2026-09-03T14:49:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,4867.0
544
+ 2026-09-03T14:49:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3121.0
545
+ 2026-09-03T14:49:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22363.0
546
+ 2026-09-03T14:49:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
547
+ 2026-09-03T14:49:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
548
+ 2026-09-03T14:49:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
549
+ 2026-09-03T14:49:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
550
+ 2026-09-03T14:49:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
551
+ 2026-09-03T14:49:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
552
+ 2026-09-03T14:49:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
553
+ 2026-09-03T14:49:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
554
+ 2026-09-03T14:49:32Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
555
+ 2026-09-03T14:49:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
556
+ 2026-09-03T14:49:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
557
+ 2026-09-03T14:49:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
558
+ 2026-09-03T14:49:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
559
+ 2026-09-03T14:49:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
560
+ 2026-09-03T14:49:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
561
+ 2026-09-03T14:49:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
562
+ 2026-09-03T14:49:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
563
+ 2026-09-03T14:49:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,22721.0
564
+ 2026-09-03T14:49:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,23254.0
565
+ 2026-09-03T14:49:44Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25492.0
566
+ 2026-09-03T14:49:45Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25498.0
567
+ 2026-09-03T14:49:46Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25854.0
568
+ 2026-09-03T14:49:47Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25854.0
569
+ 2026-09-03T14:49:48Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,25854.0
570
+ 2026-09-03T14:49:49Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
571
+ 2026-09-03T14:49:50Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
572
+ 2026-09-03T14:49:51Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
573
+ 2026-09-03T14:49:52Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
574
+ 2026-09-03T14:49:53Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
575
+ 2026-09-03T14:49:54Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26316.0
576
+ 2026-09-03T14:49:55Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26318.0
577
+ 2026-09-03T14:49:56Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26322.0
578
+ 2026-09-03T14:49:57Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26322.0
579
+ 2026-09-03T14:49:58Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26328.0
580
+ 2026-09-03T14:49:59Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
581
+ 2026-09-03T14:50:00Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
582
+ 2026-09-03T14:50:01Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
583
+ 2026-09-03T14:50:02Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
584
+ 2026-09-03T14:50:03Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
585
+ 2026-09-03T14:50:04Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
586
+ 2026-09-03T14:50:05Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
587
+ 2026-09-03T14:50:06Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
588
+ 2026-09-03T14:50:07Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
589
+ 2026-09-03T14:50:08Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26330.0
590
+ 2026-09-03T14:50:09Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26338.0
591
+ 2026-09-03T14:50:10Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26342.0
592
+ 2026-09-03T14:50:11Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26342.0
593
+ 2026-09-03T14:50:12Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,26342.0
594
+ 2026-09-03T14:50:13Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
595
+ 2026-09-03T14:50:14Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
596
+ 2026-09-03T14:50:15Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
597
+ 2026-09-03T14:50:16Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
598
+ 2026-09-03T14:50:17Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
599
+ 2026-09-03T14:50:18Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
600
+ 2026-09-03T14:50:19Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
601
+ 2026-09-03T14:50:20Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
602
+ 2026-09-03T14:50:21Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
603
+ 2026-09-03T14:50:22Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,27522.0
604
+ 2026-09-03T14:50:23Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24302.0
605
+ 2026-09-03T14:50:24Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24302.0
606
+ 2026-09-03T14:50:25Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24302.0
607
+ 2026-09-03T14:50:26Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,24302.0
608
+ 2026-09-03T14:50:27Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,1109.0
609
+ 2026-09-03T14:50:28Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,1109.0
610
+ 2026-09-03T14:50:29Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
611
+ 2026-09-03T14:50:30Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
612
+ 2026-09-03T14:50:31Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
613
+ 2026-09-03T14:50:33Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
614
+ 2026-09-03T14:50:34Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
615
+ 2026-09-03T14:50:35Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
616
+ 2026-09-03T14:50:36Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
617
+ 2026-09-03T14:50:37Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
618
+ 2026-09-03T14:50:38Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
619
+ 2026-09-03T14:50:39Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
620
+ 2026-09-03T14:50:40Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
621
+ 2026-09-03T14:50:41Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
622
+ 2026-09-03T14:50:42Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
623
+ 2026-09-03T14:50:43Z,0,GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f,NVIDIA L40S,46068.0,3.0
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019.md ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_content_list.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_content_list_v2.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_middle.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/Cremers - 2019_model.json ADDED
The diff for this file is too large to render. See raw diff
 
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/hybrid_auto/tabulus_run.txt ADDED
@@ -0,0 +1,7 @@
 
 
 
 
 
 
 
 
1
+ requested_backend=hybrid-engine
2
+ resolved_backend=hybrid-engine
3
+ fallback_reason=
4
+ method=auto
5
+ effort=high
6
+ duration_seconds=192.143
7
+ return_code=0
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/profiling.time.txt ADDED
@@ -0,0 +1,23 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ Command being timed: "original-home://miniconda3/envs/tabulus-mineru/bin/python -m tabulus.cli profile --folder original-home://ald-papers --backend hybrid-engine --method auto --effort high --out original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output --table-crops-out original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops"
2
+ User time (seconds): 1155.99
3
+ System time (seconds): 44.79
4
+ Percent of CPU this job got: 187%
5
+ Elapsed (wall clock) time (h:mm:ss or m:ss): 10:39.12
6
+ Average shared text size (kbytes): 0
7
+ Average unshared data size (kbytes): 0
8
+ Average stack size (kbytes): 0
9
+ Average total size (kbytes): 0
10
+ Maximum resident set size (kbytes): 13987688
11
+ Average resident set size (kbytes): 0
12
+ Major (requiring I/O) page faults: 49
13
+ Minor (reclaiming a frame) page faults: 9688580
14
+ Voluntary context switches: 747870
15
+ Involuntary context switches: 1197626
16
+ Swaps: 0
17
+ File system inputs: 108728
18
+ File system outputs: 654048
19
+ Socket messages sent: 0
20
+ Socket messages received: 0
21
+ Signals delivered: 0
22
+ Page size (bytes): 4096
23
+ Exit status: 0
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/run_metadata.json ADDED
@@ -0,0 +1,166 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ {
2
+ "schema_version": 1,
3
+ "stage": "profiling",
4
+ "run_id": "20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744",
5
+ "corpus": "ald",
6
+ "profiler": "mineru",
7
+ "backend": "hybrid-engine",
8
+ "method": "auto",
9
+ "effort": "high",
10
+ "canonical_crop_export": true,
11
+ "status": "success",
12
+ "git": {
13
+ "commit": "1e93033da29e35ce3ef4ab0f556528cb9714befc",
14
+ "branch": "main",
15
+ "tracked_worktree_dirty": false,
16
+ "tracked_status": []
17
+ },
18
+ "host": {
19
+ "hostname": "gpu-l40s-02",
20
+ "fqdn": "gpu-l40s-02.research.tib.eu"
21
+ },
22
+ "slurm": {
23
+ "slurm_job_id": "32744",
24
+ "slurm_job_partition": "p_48G",
25
+ "slurm_job_nodelist": "gpu-l40s-02",
26
+ "slurmd_nodename": "gpu-l40s-02",
27
+ "slurm_job_gpus": "0",
28
+ "slurm_step_gpus": null,
29
+ "slurm_cpus_per_task": "8",
30
+ "slurm_mem_per_node": "32768",
31
+ "slurm_mem_per_cpu": null,
32
+ "cuda_visible_devices": "0"
33
+ },
34
+ "environment": {
35
+ "python_executable": "original-home://miniconda3/envs/tabulus-mineru/bin/python",
36
+ "python_version": "3.12.13 | packaged by Anaconda, Inc. | (main, Jul 9 2026, 14:38:16) [GCC 14.3.0]",
37
+ "conda_default_env": "tabulus-mineru"
38
+ },
39
+ "resources": {
40
+ "allocated_gpus": [
41
+ {
42
+ "index": "0",
43
+ "uuid": "GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f",
44
+ "name": "NVIDIA L40S",
45
+ "memory_total_mib": 46068.0,
46
+ "memory_used_mib": 0.0
47
+ }
48
+ ],
49
+ "gpu_inventory": [
50
+ {
51
+ "index": "0",
52
+ "uuid": "GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f",
53
+ "name": "NVIDIA L40S",
54
+ "memory_total_mib": 46068.0,
55
+ "memory_used_mib": 0.0
56
+ }
57
+ ],
58
+ "gpu": {
59
+ "peak_gpu_memory_mib": 28202.0,
60
+ "peak_gpu_memory_by_uuid_mib": {
61
+ "GPU-fd2b4af6-5f37-7e54-b531-fc092e61a20f": 28202.0
62
+ },
63
+ "measurement": "nvidia-smi device-wide memory.used sampled during the run",
64
+ "sample_interval_seconds": 1.0
65
+ },
66
+ "max_host_rss_mib": 13659.8515625
67
+ },
68
+ "input": {
69
+ "pdfs_requested": 3,
70
+ "pdf_names": [
71
+ "Cremers - 2019.pdf",
72
+ "Miikkulainen 2013.pdf",
73
+ "Puurunen - February 2005.pdf"
74
+ ],
75
+ "page_counts": {
76
+ "Cremers - 2019.pdf": null,
77
+ "Miikkulainen 2013.pdf": null,
78
+ "Puurunen - February 2005.pdf": null
79
+ },
80
+ "pages_known_for_pdfs": 0,
81
+ "pages_total_known": 0,
82
+ "pages_complete": false
83
+ },
84
+ "timing": {
85
+ "start_time_utc": "2026-09-03T14:40:04Z",
86
+ "end_time_utc": "2026-09-03T14:50:43Z",
87
+ "total_wall_seconds": 639.1970440163277,
88
+ "profiling_wall_seconds": 639.1407904387452
89
+ },
90
+ "paths": {
91
+ "run_dir": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744",
92
+ "pdf_folder": "original-home://ald-papers",
93
+ "profiler_root": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output",
94
+ "crops_root": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops",
95
+ "run_metadata": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/run_metadata.json",
96
+ "gpu_samples": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/gpu_samples.csv"
97
+ },
98
+ "commands": {
99
+ "profiling": {
100
+ "command": [
101
+ "original-home://miniconda3/envs/tabulus-mineru/bin/python",
102
+ "-m",
103
+ "tabulus.cli",
104
+ "profile",
105
+ "--folder",
106
+ "original-home://ald-papers",
107
+ "--backend",
108
+ "hybrid-engine",
109
+ "--method",
110
+ "auto",
111
+ "--effort",
112
+ "high",
113
+ "--out",
114
+ "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output",
115
+ "--table-crops-out",
116
+ "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops"
117
+ ],
118
+ "command_shell": "original-home://miniconda3/envs/tabulus-mineru/bin/python -m tabulus.cli profile --folder original-home://ald-papers --backend hybrid-engine --method auto --effort high --out original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output --table-crops-out original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops",
119
+ "return_code": 0,
120
+ "start_time_utc": "2026-09-03T14:40:04Z",
121
+ "end_time_utc": "2026-09-03T14:50:43Z",
122
+ "wall_seconds": 639.1407904387452,
123
+ "stdout": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/profiling.stdout.log",
124
+ "stderr": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/profiling.stderr.log",
125
+ "resource_usage": {
126
+ "max_rss_kib": 13987688,
127
+ "max_rss_mib": 13659.8515625
128
+ }
129
+ }
130
+ },
131
+ "canonical_crops": {
132
+ "export_enabled": true,
133
+ "paper_crop_roots": 3,
134
+ "tables_found": 83,
135
+ "crops_saved": 83,
136
+ "papers": [
137
+ {
138
+ "paper": "Cremers - 2019",
139
+ "tables_index": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/Cremers - 2019/tables_index.json",
140
+ "tables_found": 14,
141
+ "crops_saved": 14,
142
+ "refs_start_page": 37
143
+ },
144
+ {
145
+ "paper": "Miikkulainen 2013",
146
+ "tables_index": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/Miikkulainen 2013/tables_index.json",
147
+ "tables_found": 46,
148
+ "crops_saved": 46,
149
+ "refs_start_page": null
150
+ },
151
+ {
152
+ "paper": "Puurunen - February 2005",
153
+ "tables_index": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/Puurunen - February 2005/tables_index.json",
154
+ "tables_found": 23,
155
+ "crops_saved": 23,
156
+ "refs_start_page": null
157
+ }
158
+ ]
159
+ },
160
+ "git_end": {
161
+ "commit": "1e93033da29e35ce3ef4ab0f556528cb9714befc",
162
+ "branch": "main",
163
+ "tracked_worktree_dirty": false,
164
+ "tracked_status": []
165
+ }
166
+ }
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_009_table_001.jpg ADDED

Git LFS Details

  • SHA256: 7cd3483a950372bb0a9f3a694b0bf4370db3d53bcee754cf41724bd22912f6eb
  • Pointer size: 130 Bytes
  • Size of remote file: 77.8 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_015_table_002.jpg ADDED

Git LFS Details

  • SHA256: 7bfff2f717fa307b06d1e389cc3aaa384d8d3cdfa9c074b86fd68d6d51c7af3d
  • Pointer size: 131 Bytes
  • Size of remote file: 234 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_016_table_003.jpg ADDED

Git LFS Details

  • SHA256: 0fd4e369d103748dbab3ff0049a4aa89ea6a8694327e2b3adac64c2743051f05
  • Pointer size: 131 Bytes
  • Size of remote file: 177 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_017_table_004.jpg ADDED

Git LFS Details

  • SHA256: 83377cb507e6b2d933d0fcd9617b96d19f0f3f92391c1333a66ca705a5df66d3
  • Pointer size: 131 Bytes
  • Size of remote file: 156 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_018_table_005.jpg ADDED

Git LFS Details

  • SHA256: 4ad8193c06ba20133f27aac2e1d20d61dc2375d5150a7954e4d3e5357a0d7fb1
  • Pointer size: 131 Bytes
  • Size of remote file: 229 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_019_table_006.jpg ADDED

Git LFS Details

  • SHA256: db40782d48f3b3339d78a8d3b5dbe054e8a466083795da68b9eb51e53e5179af
  • Pointer size: 130 Bytes
  • Size of remote file: 42 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_019_table_007.jpg ADDED

Git LFS Details

  • SHA256: c152ea32f6b23713b092d13cd339b4ea17f1d86091daa7e461d7605db348cea8
  • Pointer size: 131 Bytes
  • Size of remote file: 139 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_020_table_008.jpg ADDED

Git LFS Details

  • SHA256: 1b04bb4289cfe13a5bbae165dc651a1518fa566f32ead293c4df13417eeee377
  • Pointer size: 130 Bytes
  • Size of remote file: 22.1 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_020_table_009.jpg ADDED

Git LFS Details

  • SHA256: e8b3fe59aec634d09959300c1c51ba471be7f5fd920874f2c0db59afcf444f0b
  • Pointer size: 130 Bytes
  • Size of remote file: 99.5 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_022_table_010.jpg ADDED

Git LFS Details

  • SHA256: dc7e6c8929200decdd3be192a4ec152007a50720ba6d285acaf8af52f4014a22
  • Pointer size: 131 Bytes
  • Size of remote file: 206 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_023_table_011.jpg ADDED

Git LFS Details

  • SHA256: 1b2fdacc7b3692d89ffbbd16aadb72b9ff26e234bc5f2050cf6e74d9b7a24855
  • Pointer size: 131 Bytes
  • Size of remote file: 200 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_024_table_012.jpg ADDED

Git LFS Details

  • SHA256: 31869e506bbea7820f5712224bfbd30ba11a5db8e7352111f10330b40e093529
  • Pointer size: 131 Bytes
  • Size of remote file: 208 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_025_table_013.jpg ADDED

Git LFS Details

  • SHA256: e990983eae6914f41e40b7f2da4f8c2a6ab9a24a4b78d174f3782f09712d331a
  • Pointer size: 131 Bytes
  • Size of remote file: 161 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/images/page_026_table_014.jpg ADDED

Git LFS Details

  • SHA256: ce955e8d873e80e921c6c68fe5dfceba35be0c187d09d92cfa6626a77a11d176
  • Pointer size: 131 Bytes
  • Size of remote file: 166 kB
ALD/Cremers_2019/step1/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/tables_index.json ADDED
@@ -0,0 +1,305 @@
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
1
+ {
2
+ "tables_found": 14,
3
+ "crops_saved": 14,
4
+ "refs_start_page": 37,
5
+ "image_format_policy": "preserve-source-extension",
6
+ "images_dir": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/table-crops/Cremers - 2019/images",
7
+ "tables": [
8
+ {
9
+ "table_id": 1,
10
+ "page_nr": 9,
11
+ "in_references": false,
12
+ "image": "images/page_009_table_001.jpg",
13
+ "image_name": "page_009_table_001.jpg",
14
+ "bbox": [
15
+ 81,
16
+ 655,
17
+ 916,
18
+ 865
19
+ ],
20
+ "table_caption": [
21
+ "TABLE I. Overview of test structures used to quantify the conformality of an ALD process. The labels (a)-(j) correspond to the labeled images in Fig. 8."
22
+ ],
23
+ "table_footnote": [],
24
+ "mineru_img_path": "images/d536cf7f5f24b13fc750a786c551d7c96150b52311cc993dc9d9d57ab1c80b4e.jpg",
25
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/d536cf7f5f24b13fc750a786c551d7c96150b52311cc993dc9d9d57ab1c80b4e.jpg",
26
+ "mineru_table_body": "<table><tr><td>Structure</td><td>Characterization method</td><td>References</td></tr><tr><td>Macroscopic lateral trenches (a)</td><td>Ellipsometry/XRR/XRF/EDX</td><td>67, 69, 83, and 84</td></tr><tr><td>Capillary tubes (b)</td><td>Optical microscope</td><td>85</td></tr><tr><td>Microscopic lateral trenches (c)</td><td>Optical and IR microscope/reflectometrySEM/EDX</td><td>83 and 86\u201388</td></tr><tr><td>Micron trenches (d)</td><td>TEM</td><td>89 and 90</td></tr><tr><td>Pillars (e)</td><td>SEM/EDX</td><td>91\u201394</td></tr><tr><td>Anodized alumina (AAO) (f)</td><td>EPMA/TEM</td><td>65, 95, and 96</td></tr><tr><td>Nano trenches</td><td>TEM</td><td>79 and 97</td></tr><tr><td>Forests of carbon nanotubes (g)</td><td>SEM/EDX/TEM</td><td>98\u2013100</td></tr><tr><td>Opals (h)</td><td>FE-SEM/TEM</td><td>101\u2013104</td></tr><tr><td>Mesoporous thin films (i)</td><td>XRF/porosimetry/TEM/SIMS</td><td>47 and 105\u2013108</td></tr><tr><td>Mesoporous powders (j)</td><td>TEM/SEM/EDX</td><td>109\u2013113</td></tr></table>",
27
+ "source": "mineru"
28
+ },
29
+ {
30
+ "table_id": 2,
31
+ "page_nr": 15,
32
+ "in_references": false,
33
+ "image": "images/page_015_table_002.jpg",
34
+ "image_name": "page_015_table_002.jpg",
35
+ "bbox": [
36
+ 81,
37
+ 156,
38
+ 915,
39
+ 861
40
+ ],
41
+ "table_caption": [
42
+ "TABLE II. Overview of experimental results on the conformality of thermal ALD processes. The coated EAR equals the EAR of the structure in the case of complete coverage or is determined by PD<sup>50%</sup> in the case of incomplete coverage and indicated with <sup>\b</sup>. If the results were presented in a thickness profile (film thickness as a function of the depth of the structure), \u201cD\u201d is noted after the coated EAR"
43
+ ],
44
+ "table_footnote": [],
45
+ "mineru_img_path": "images/2e2b726ca99f7049e637034f18cbef602960e5e7e3967f009e2d17fc8573e931.jpg",
46
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/2e2b726ca99f7049e637034f18cbef602960e5e7e3967f009e2d17fc8573e931.jpg",
47
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Exposure $(10^3\\mathrm{L})$ </td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"39\">Oxides</td><td rowspan=\"12\"> $Al_2O_3(TMA/H_2O)$ </td><td>Macro lateral</td><td>100</td><td>200</td><td>9</td><td>SE</td><td>50*(D)</td><td>67</td></tr><tr><td>Trench</td><td>5</td><td>300</td><td></td><td>SEM</td><td>5</td><td>134</td></tr><tr><td>AAO</td><td>8.5</td><td>200</td><td>300</td><td>SEM/TEM</td><td>8.5</td><td>135</td></tr><tr><td> $Nanorods (ZnO)^{136}$ </td><td></td><td>300</td><td>560</td><td>TEM</td><td>Conformal</td><td>99</td></tr><tr><td>Pillars $(Si)^{137}$ </td><td></td><td>125</td><td></td><td>TEM</td><td>Conformal</td><td>93</td></tr><tr><td>AAO</td><td>1750</td><td>177</td><td></td><td>SEM/TEM</td><td>1750</td><td>96</td></tr><tr><td>AAO</td><td>770</td><td>177</td><td>4500</td><td>SEM</td><td>770</td><td>65</td></tr><tr><td>LHAR</td><td>10-12500</td><td>300</td><td></td><td>Reflectometry,optical/IRmicroscopy,SEM</td><td>75*(D)</td><td>86</td></tr><tr><td>LHAR</td><td>10-12500</td><td>300</td><td></td><td>Reflectometry</td><td>130*(D)</td><td>77</td></tr><tr><td>Trench</td><td>11</td><td></td><td></td><td>SEM</td><td>11</td><td>138</td></tr><tr><td>Macro lateral</td><td>5</td><td>75</td><td>18</td><td>SEM/EDX</td><td>2.5*(D)</td><td>69</td></tr><tr><td>Hole</td><td>17</td><td>200</td><td>370</td><td>SEM</td><td>17</td><td>139</td></tr><tr><td rowspan=\"7\"> $TiO_2 (TiCl_4/H_2O)$ </td><td>Pillars $(Si)^{137}$ </td><td></td><td>110</td><td></td><td>TEM</td><td>Conformal</td><td>93</td></tr><tr><td>AAO</td><td>7.5</td><td>200</td><td></td><td>SEM/TEM</td><td>7.5</td><td>140</td></tr><tr><td>LHAR</td><td>10-12500</td><td>110</td><td></td><td>ReflectometryIR microscopy</td><td>90*(D)</td><td>77</td></tr><tr><td>LHAR</td><td>10-12500</td><td>110</td><td></td><td>Reflectometry</td><td>65*(D)</td><td>86</td></tr><tr><td>AAO</td><td>7000</td><td>100</td><td></td><td>SEM/TEM/EDAX</td><td>7000</td><td>96</td></tr><tr><td>Opal</td><td></td><td>70</td><td></td><td>FE-SEM</td><td>Conformal</td><td>101</td></tr><tr><td>Opal</td><td></td><td>80</td><td></td><td>SEM</td><td></td><td>141</td></tr><tr><td> $TiO_2 (TTIP/H_2O)$ </td><td> $VACNT^{142}$ </td><td></td><td>225</td><td></td><td>SEM</td><td>(D)</td><td>100</td></tr><tr><td> $V_2O_5 (VOTP/H_2O_2)$ </td><td>AAO</td><td>7000</td><td>100</td><td></td><td>SEM/TEM/EDAX</td><td>7000</td><td>96</td></tr><tr><td> $Fe_2O_3 [Fe_2(O^tBu)_6/H_2O]$ </td><td>AAO</td><td>100</td><td>140</td><td></td><td>SEM/TEM</td><td>100</td><td>143</td></tr><tr><td> $Fe_3O_4 [Fe(Cp)_2/O_2]$ </td><td>AAO</td><td></td><td>400</td><td></td><td>SEM/TEM</td><td></td><td>144</td></tr><tr><td rowspan=\"5\"> $ZnO (DEZ/H_2O)$ </td><td>AAO</td><td>700</td><td>177</td><td>2000</td><td>EPMA</td><td>700(D)</td><td>65</td></tr><tr><td>AAO</td><td>5000</td><td>177</td><td>6 00 000</td><td>EPMA</td><td>5000(D)</td><td>65</td></tr><tr><td>Opal</td><td></td><td>85</td><td></td><td>SEM</td><td></td><td>102</td></tr><tr><td>Trench</td><td>3</td><td>250</td><td></td><td>SEM</td><td>3</td><td>90</td></tr><tr><td> $Nanowire (CuO)^{145}$ </td><td></td><td>150</td><td></td><td>SEM/TEM</td><td>Conformal</td><td>146</td></tr><tr><td> $Y_2O_3 [(CpCH_3)_3Y/H_2O]$ </td><td>Trench</td><td>35</td><td>300</td><td>50 000</td><td>TEM</td><td>15*</td><td>89</td></tr><tr><td> $ZrO [Zr(NMe_2)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $ZrO [Zr(NEtMe)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $ZrO [Zr(NEt_2)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $RuO_2 [Ru(od)_3/O_2]$ </td><td> $CNT^{147}$ </td><td></td><td>300</td><td></td><td>SEM/TEM</td><td>Conformal</td><td>148</td></tr><tr><td> $SnO_x (SnCl_4/H_2O)$ </td><td>Porous silicon</td><td>140</td><td>500</td><td></td><td>TEM/SIMS</td><td>140(D)</td><td>107</td></tr><tr><td> $HfO_2 (HfCl_4/H_2O)$ </td><td>Trench</td><td>35</td><td>300</td><td>2000</td><td>TEM</td><td>22*</td><td>89</td></tr><tr><td rowspan=\"2\"> $HfO_2 [Hf(NMe_2)_4/H_2O]$ </td><td>Holes</td><td>36</td><td>150</td><td>9</td><td>SEM</td><td>36</td><td>62</td></tr><tr><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $HfO_2 [Hf(NEtMe)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td> $HfO_2 [Hf(NEt_2)_4/H_2O]$ </td><td>Elliptical holes</td><td>36</td><td></td><td>6</td><td>SEM</td><td>36</td><td>78</td></tr><tr><td rowspan=\"3\">Nitrides</td><td>BN ( $BBr_3/NH_3$ )</td><td>AAO</td><td>10000</td><td>750</td><td></td><td>SEM</td><td>20</td><td>149</td></tr><tr><td>AlN (TMA/ $NH_3$ )</td><td>Trench</td><td>17.5</td><td>420</td><td></td><td>SEM</td><td>17.5</td><td>150</td></tr><tr><td>TiN ( $TiCl_4/Zn/NH_3$ )</td><td>Trench</td><td>5</td><td>500</td><td></td><td>SEM</td><td>5</td><td>134</td></tr></table>",
48
+ "source": "mineru"
49
+ },
50
+ {
51
+ "table_id": 3,
52
+ "page_nr": 16,
53
+ "in_references": false,
54
+ "image": "images/page_016_table_003.jpg",
55
+ "image_name": "page_016_table_003.jpg",
56
+ "bbox": [
57
+ 81,
58
+ 134,
59
+ 918,
60
+ 694
61
+ ],
62
+ "table_caption": [
63
+ "TABLE II. (Continued.)"
64
+ ],
65
+ "table_footnote": [],
66
+ "mineru_img_path": "images/098183554d8312ee07420c4b76cc5883e604cfffd8751b7c625faca1150c7078.jpg",
67
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/098183554d8312ee07420c4b76cc5883e604cfffd8751b7c625faca1150c7078.jpg",
68
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Exposure $(10^3\\mathrm{L})$ </td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"29\">Metals</td><td>TaN (TBTDET/ $NH_3$ )</td><td>Trench</td><td>11</td><td></td><td></td><td>SEM</td><td>11</td><td>138</td></tr><tr><td>WN $[(^{i}BuN)_2(Me_2N)_2W/ NH_3]$ </td><td>Silica capillary tube</td><td>1000</td><td>300</td><td>110</td><td>Optical microscopy</td><td>210</td><td>85</td></tr><tr><td rowspan=\"3\">Ru $[(^{i}Pr-Me-Be)Ru(CHD)/O_2]$ </td><td>Hole</td><td>4.6</td><td>225, 270, and 310</td><td></td><td>TEM</td><td>4.6</td><td>151</td></tr><tr><td>Hole</td><td>25</td><td>270</td><td></td><td>TEM</td><td> $25^{152}$ </td><td>151</td></tr><tr><td>Hole</td><td>24</td><td>220</td><td></td><td>XTEM</td><td>24</td><td>153</td></tr><tr><td rowspan=\"2\">Ru [(EtCp)Ru(DMPD)/ $O_2$ ]</td><td>AAO</td><td>20</td><td>280</td><td></td><td>TEM</td><td>20</td><td>154</td></tr><tr><td>Hole</td><td>17</td><td>250</td><td></td><td>SEM</td><td> $17^{155}$ </td><td>156</td></tr><tr><td>Ru [(Et-Be)Ru(CHD)/ $O_2$ ]</td><td>Trench</td><td>2.25</td><td>225</td><td></td><td>TEM</td><td>2.25</td><td>157</td></tr><tr><td>Ru [(Et-Be)Ru(Et-CHD)/ $O_2$ ]</td><td>Hole</td><td>32</td><td>225 and 270</td><td></td><td>XTEM</td><td>32</td><td>158</td></tr><tr><td>Ru [Ru(Me- $Me_2-CHD)_2/O_2$ ]</td><td>AAO</td><td>166</td><td>300</td><td></td><td>TEM</td><td>100</td><td>159</td></tr><tr><td rowspan=\"2\">Ru [(EtCp)Ru(Py)/ $O_2$ ]</td><td>Hole</td><td>20</td><td>275</td><td></td><td>SEM</td><td>20*</td><td>160</td></tr><tr><td>Trench</td><td>11</td><td></td><td></td><td>SEM</td><td>11</td><td>138</td></tr><tr><td rowspan=\"2\">Ru [Ru(EtCp) $_2$ / $O_2$ ]</td><td>Trench</td><td>4</td><td>270</td><td></td><td>SEM</td><td>4</td><td>161</td></tr><tr><td>AAO</td><td>10</td><td>300</td><td></td><td>SEM/TEM</td><td>10</td><td>162</td></tr><tr><td>Ru ( $RuO_4/H_2$ )</td><td>Pillars ( $Si$ ) $^{163}$ </td><td>10</td><td>100</td><td></td><td>SEM/EDX</td><td>Conformal (D)</td><td>94</td></tr><tr><td>Pd [Pd(hfac) $_2$ /formalin]</td><td>AAO</td><td>1500</td><td>200</td><td></td><td>SEM/EDX electrical conductivity</td><td>1500</td><td>164</td></tr><tr><td>W ( $Si_2H_6/WF_6$ )</td><td>AAO</td><td>1750</td><td>200</td><td> $60\\ 00\\ 000^{165}$ </td><td>SEM/EDX</td><td>1750 (D)</td><td>166</td></tr><tr><td>Ir [Ir(acac) $_3$ / $O_2$ / $H_2$ ]</td><td>LHAR</td><td>10-12500</td><td>250</td><td></td><td>EDX optical microscopy</td><td>20* (D)</td><td>87</td></tr><tr><td rowspan=\"3\">Ir [Ir(acac) $_3$ / $O_2$ ]</td><td>LHAR</td><td>10-12500</td><td>250</td><td></td><td>EDX optical microscopy</td><td>15* (D)</td><td>87</td></tr><tr><td>Hole</td><td>142</td><td>300</td><td></td><td></td><td>Ref. 167</td><td>168</td></tr><tr><td>Trench</td><td></td><td>370</td><td></td><td>SEM</td><td></td><td>169</td></tr><tr><td rowspan=\"6\">Pt ( $MeCpPtMe_3/O_2$ )</td><td>AAO</td><td>8.5</td><td>250</td><td>405</td><td>SEM/TEM</td><td>8.5</td><td>135</td></tr><tr><td>AAO</td><td>150</td><td>250</td><td></td><td>SEM/EDX/SANS</td><td> $110^{*}(D)^{170}$ </td><td>171</td></tr><tr><td>AAO</td><td>200</td><td>300</td><td></td><td>SEM</td><td>94</td><td>172</td></tr><tr><td>Trench</td><td>6</td><td>300</td><td></td><td>TEM</td><td>6</td><td>79</td></tr><tr><td>AAO</td><td>200</td><td>300</td><td></td><td>SEM/TEM</td><td>50</td><td>173</td></tr><tr><td>Hole</td><td>90</td><td>300</td><td></td><td>SEM/TEM</td><td>30</td><td>173</td></tr><tr><td rowspan=\"2\">PtIr alloy [MeCpPtMe $_3$ / $O_2$ /Ir(acac) $_3$ / $O_2$ ]</td><td>AAO</td><td>7.1</td><td>300</td><td></td><td>SEM</td><td>7.1</td><td>172</td></tr><tr><td>Trench</td><td>9.5</td><td>300</td><td></td><td>SEM</td><td>9.5</td><td>174</td></tr></table>",
69
+ "source": "mineru"
70
+ },
71
+ {
72
+ "table_id": 4,
73
+ "page_nr": 17,
74
+ "in_references": false,
75
+ "image": "images/page_017_table_004.jpg",
76
+ "image_name": "page_017_table_004.jpg",
77
+ "bbox": [
78
+ 81,
79
+ 158,
80
+ 915,
81
+ 563
82
+ ],
83
+ "table_caption": [
84
+ "TABLE III. Overview of the experimental results on the conformality of ozone-based ALD processes. The coated EAR equals the EAR of the structure in the case of complete coverage or is determined by PD<sup>50%</sup> in the case of incomplete coverage and indicated with <sup>\b</sup>. If the results were presented in a thickness profile (film thickness as a function of the depth of the structure), \u201cD\u201d is noted after the coated EAR."
85
+ ],
86
+ "table_footnote": [],
87
+ "mineru_img_path": "images/8db9f55a05012f982162eccc88acc796f028e034820fbb79911d86ae00061a00.jpg",
88
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/8db9f55a05012f982162eccc88acc796f028e034820fbb79911d86ae00061a00.jpg",
89
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Exposure $(10^3 \\text{ L})$ </td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"20\">Oxides</td><td> $Al_2O_3$ (TMA/ $O_3$ )</td><td>Trench</td><td></td><td></td><td></td><td></td><td>Ref. 175</td><td>176</td></tr><tr><td> $SiO_2$ ( $[H_2N(CH_2)_3$ )</td><td>AAO</td><td>400</td><td></td><td></td><td>SEM/TEM</td><td>400</td><td>177</td></tr><tr><td> $Si(OCH_2CH_3)_3$ / $H_2O/O_3$ </td><td></td><td></td><td></td><td></td><td></td><td></td><td></td></tr><tr><td rowspan=\"2\"> $TiO_2$ (TDMAT/ $O_3$ )</td><td>Hole</td><td>20</td><td>180</td><td></td><td>TEM</td><td>20* (D)</td><td>178</td></tr><tr><td> $CNT^{179}$ </td><td></td><td>100</td><td>4500</td><td>TEM/SEM/EDX</td><td></td><td>98</td></tr><tr><td> $TiO_2$ [ $Cp^*Ti(OMe)_3$ / $O_3$ ]</td><td>Hole</td><td>15.3</td><td>270</td><td></td><td>SEM/TEM</td><td>(D)</td><td>180</td></tr><tr><td rowspan=\"2\"> $V_2O_5$ (VOTP/ $O_3$ )</td><td>AAO</td><td>100</td><td></td><td></td><td>SEM/EDX</td><td>100</td><td>150</td></tr><tr><td>AAO</td><td>185</td><td>170</td><td></td><td>SEM/TEM</td><td>44</td><td>159</td></tr><tr><td rowspan=\"2\"> $Fe_2O_3$ [ $Fe(Cp)_2$ / $O_3$ ]</td><td>Trench</td><td>2</td><td>250</td><td></td><td>SEM</td><td>2</td><td>181</td></tr><tr><td>Silica aerogel</td><td>150</td><td>250</td><td></td><td>SEM/EDX</td><td>150 (D)</td><td>181</td></tr><tr><td> $Fe_2O_3$ [ $CpFeC_5H_4CHN(CH_3)_2$ / $O_3$ ]</td><td>Nanowire ( $TiO_2$ )</td><td></td><td>230</td><td></td><td>TEM/EDX</td><td>Conformal</td><td>182</td></tr><tr><td> $Co_3O_4$ ( $CoCp_2$ / $O_3$ )</td><td> $Anodisc^{183}$ </td><td>375</td><td>167</td><td></td><td>SEM/EDX</td><td>375 (D)</td><td>184</td></tr><tr><td>NiO [ $Ni(CpEt)_2$ / $O_3$ ]</td><td>AAO</td><td>70</td><td>250</td><td></td><td>TEM/SEM/EDX</td><td>70</td><td>185</td></tr><tr><td>NiO ( $NiCp_2$ / $O_3$ )</td><td>AAO</td><td>238</td><td>300</td><td></td><td>TEM/SEM</td><td>238</td><td>186</td></tr><tr><td rowspan=\"2\">ZnO (DEZ/ $O_3$ )</td><td>AAO</td><td>250</td><td>50</td><td></td><td>SEM/EDX</td><td>250 (D)</td><td>187</td></tr><tr><td> $Hole^{188}$ </td><td>2</td><td>85</td><td></td><td>SEM</td><td>2</td><td>189</td></tr><tr><td> $HfO_2$ (TEMAHf/ $O_3$ )</td><td>Hole</td><td>15.3</td><td>180</td><td></td><td>SEM/TEM</td><td>9.6* (D)</td><td>180</td></tr><tr><td> $IrO_2$ [ $Ir(acac)_3$ / $O_3$ ]</td><td>LHAR</td><td>10-12500</td><td>185</td><td></td><td> $EDX^{190}$ optical microscopy</td><td>15* (D)</td><td>87</td></tr><tr><td> $PtO_x(Pt(acac)_2$ / $O_3$ )</td><td>Trench</td><td>3.5</td><td>120</td><td></td><td>FE-SEM</td><td>3.5</td><td>191</td></tr><tr><td> $PtO_x$ ( $MeCpPtMe_3$ / $O_3$ )</td><td>Trench</td><td>5</td><td>120</td><td></td><td>SEM</td><td>5</td><td>192</td></tr><tr><td rowspan=\"5\">Metal</td><td>Ru [ $Ru(EtCp)_2$ / $O_3$ ]</td><td>Hole</td><td>16</td><td>275</td><td></td><td>TEM</td><td> $16^{193}$ </td><td>194</td></tr><tr><td rowspan=\"2\">Ir [ $Ir(acac)_3$ / $O_3$ / $H_2$ ]</td><td>LHAR</td><td>10-12500</td><td>185</td><td></td><td>EDX optical microscopy</td><td>45*(D)</td><td>87</td></tr><tr><td>Trench</td><td></td><td>165</td><td></td><td>FE-SEM</td><td></td><td>192</td></tr><tr><td>Pt ( $MeCpPtMe_3$ / $O_3$ )</td><td>AAO</td><td>150</td><td>150</td><td></td><td>SEM/EDX</td><td>35* (D)</td><td>195</td></tr><tr><td>Pt ( $Pt(acac)_2$ / $O_3$ )</td><td>AAO</td><td>120</td><td>150</td><td></td><td>SEM</td><td>50</td><td>196</td></tr></table>",
90
+ "source": "mineru"
91
+ },
92
+ {
93
+ "table_id": 5,
94
+ "page_nr": 18,
95
+ "in_references": false,
96
+ "image": "images/page_018_table_005.jpg",
97
+ "image_name": "page_018_table_005.jpg",
98
+ "bbox": [
99
+ 81,
100
+ 156,
101
+ 915,
102
+ 861
103
+ ],
104
+ "table_caption": [
105
+ "TABLE IV. Overview of the experimental results on the conformality of PE-ALD processes. The plasma configuration is indicated as C (capacitive), I (inductive), R (remote), and RE (radical enhanced). The coated EAR equals the EAR of the structure in the case of complete coverage or is determined by PD<sup>50%</sup> in the case of incomplete coverage and indicated with <sup>\b</sup>. If the results were presented in a thickness profile (film thickness as a function of the depth of the structure), \u201cD\u201d is noted after the coated EAR."
106
+ ],
107
+ "table_footnote": [],
108
+ "mineru_img_path": "images/9747e41fa370542ac92b287a672e4f16029a7e57b46d11fe690819f79cc25e84.jpg",
109
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/9747e41fa370542ac92b287a672e4f16029a7e57b46d11fe690819f79cc25e84.jpg",
110
+ "mineru_table_body": "<table><tr><td></td><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Plasma configuration</td><td>Exposure ( $10^3$ L)</td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"17\">Oxides</td><td rowspan=\"7\"> $\\mathrm{Al_2O_3(TMA/O_2^*)}$ </td><td>Macro lateral</td><td>10</td><td>200</td><td>RI</td><td>27</td><td>SE</td><td>10 (D)</td><td>70</td></tr><tr><td>Hole</td><td>8</td><td>200</td><td>RI</td><td></td><td>SEM</td><td>8</td><td>197</td></tr><tr><td>Trench</td><td>13.5</td><td>250</td><td>RC</td><td></td><td>SEM</td><td>13.5</td><td>198</td></tr><tr><td>Macro lateral $^{199}$ </td><td>5</td><td>75</td><td>RI</td><td>5</td><td>EDX</td><td>0.75* (D)</td><td>69</td></tr><tr><td>Hole</td><td>10</td><td>225</td><td></td><td>30</td><td>FE-SEM</td><td>10</td><td>200</td></tr><tr><td>Trench</td><td>2</td><td>250</td><td>C</td><td></td><td>TEM</td><td>2</td><td>201</td></tr><tr><td>Trench</td><td>15</td><td></td><td>R</td><td></td><td>SEM</td><td>15*</td><td>202</td></tr><tr><td> $\\mathrm{SiO_2(3DMAS/O_2^*)}$ </td><td>Trench</td><td>30</td><td>250</td><td>RC</td><td></td><td>SEM</td><td>30</td><td>198</td></tr><tr><td rowspan=\"2\"> $\\mathrm{SiO_2(H_2Si[N(C_2H_5)_2]_2/O_2^*)}$ </td><td>Trench</td><td>15</td><td></td><td>R</td><td></td><td>SEM</td><td>15</td><td>202</td></tr><tr><td>Hole</td><td>50</td><td>75</td><td></td><td></td><td>TEM</td><td>(D)</td><td>203</td></tr><tr><td rowspan=\"2\"> $\\mathrm{TiO_2(TTIP/O_2^*)}$ </td><td>Trench</td><td>13.5</td><td>150</td><td>RC</td><td></td><td>SEM</td><td>13.5</td><td>198</td></tr><tr><td>Hole</td><td>8.7</td><td>225</td><td></td><td></td><td>TEM</td><td>8.7 (D)</td><td>204</td></tr><tr><td> $\\mathrm{Ti(TiCl_4/O_2^*)}$ </td><td>Trench</td><td>4.5</td><td>200</td><td>RI</td><td>75</td><td>FE-SEM/FEI</td><td>4.5</td><td>205</td></tr><tr><td> $\\mathrm{HfO_2(TEMAHf/O_2^*)}$ </td><td>Trench</td><td>30</td><td>250</td><td>RC</td><td></td><td>SEM</td><td>30</td><td>198</td></tr><tr><td rowspan=\"2\"> $\\mathrm{Ta_2O_5(Ta(OEt)_5/O^*)}$ </td><td>Trench</td><td>2.5</td><td>150-250</td><td>RE</td><td></td><td>SEM</td><td>2.5</td><td>206</td></tr><tr><td>Trench</td><td>5</td><td>150-250</td><td>RE</td><td></td><td>SEM</td><td>5</td><td>206</td></tr><tr><td> $\\mathrm{Ta_2O_5(Ta(OEt)_5/O_2^*)}$ </td><td>Trench</td><td>10</td><td>200</td><td>RC</td><td></td><td>SEM</td><td>10</td><td>198</td></tr><tr><td rowspan=\"16\">Nitrides</td><td> $\\mathrm{AlN(TMA/NH_3^*)}$ </td><td>Macro lateral</td><td>10</td><td>200</td><td>RI</td><td> $40^{207}$ </td><td>SE</td><td>2.5* (D)</td><td>70</td></tr><tr><td> $\\mathrm{SiNx(Si_2Cl_6/NH_3^*)}$ </td><td>Trench</td><td>2.5</td><td>400</td><td>C</td><td></td><td>TEM</td><td>2.5</td><td>208</td></tr><tr><td> $\\mathrm{SiNx(DTDN2-H2/N_2^*)}$ </td><td>Trench</td><td>2.75</td><td>300</td><td></td><td></td><td>TEM</td><td>Ref. 209</td><td>81</td></tr><tr><td> $\\mathrm{TiN(TDMAT/NH_3^*)}$ </td><td>Hole</td><td>10</td><td>250</td><td>R</td><td></td><td>FE-SEM/AES</td><td>10</td><td>210</td></tr><tr><td> $\\mathrm{TiN(TDMAT/NH_3/H_2^*)}$ </td><td>Trench</td><td>10</td><td>180</td><td>C</td><td></td><td>FE-SEM</td><td>10</td><td>80</td></tr><tr><td> $\\mathrm{TiN(TDMAT/H_2^*)}$ </td><td>Hole</td><td>10</td><td>250</td><td>R</td><td></td><td>FE-SEM/AES</td><td>10</td><td>210</td></tr><tr><td rowspan=\"2\"> $\\mathrm{TiN(TDMAT/N_2^*)}$ </td><td>Hole</td><td>10</td><td>250</td><td>R</td><td></td><td>FE-SEM/AES</td><td>10</td><td>210</td></tr><tr><td>AAO</td><td>14</td><td>200</td><td></td><td></td><td>FE-SEM</td><td>14</td><td>211</td></tr><tr><td rowspan=\"3\"> $\\mathrm{TiN(TiCl_4/H_2^* + N_2^*)}$ </td><td>Hole</td><td>6</td><td>350</td><td>C</td><td></td><td>SEM</td><td>6</td><td>201</td></tr><tr><td>Nanotube ( $\\mathrm{TiO_2}$ )</td><td></td><td>200</td><td>R</td><td></td><td>FE-SEM</td><td></td><td>212</td></tr><tr><td>Trench</td><td>10.5</td><td>400</td><td>RI</td><td></td><td>SEM</td><td>10.5</td><td>213</td></tr><tr><td> $\\mathrm{Mo_2N(Mo(N^tBu)_2(S^tBu)_2/H_2^*)}$ </td><td>Nanotrench</td><td>2.25</td><td>300</td><td></td><td></td><td>XTEM</td><td>Ref. 214</td><td>215</td></tr><tr><td rowspan=\"2\"> $\\mathrm{TaN(TBTDET/H_2^*)}$ </td><td>Hole</td><td>10</td><td>260</td><td>C</td><td></td><td>SEM</td><td>10</td><td>216</td></tr><tr><td>Trench</td><td>2</td><td></td><td></td><td></td><td>TEM</td><td>2</td><td>97</td></tr><tr><td> $\\mathrm{TaN(TBTEMAT/H_2^*)}$ </td><td>Hole</td><td>7</td><td>250</td><td></td><td></td><td></td><td>7</td><td>217</td></tr><tr><td> $\\mathrm{TaNx(PDMAT/H_2^*)}$ </td><td>Trench</td><td>5</td><td>250</td><td></td><td></td><td>TEM</td><td>5</td><td>218</td></tr><tr><td rowspan=\"11\">Metals</td><td> $\\mathrm{Co((C_5H_5)_2Co/NH_3^*)}$ </td><td>Trench</td><td>5.5</td><td>300</td><td>HW</td><td>20</td><td>FE-SEM</td><td> $5.5^{219}$ </td><td>220</td></tr><tr><td> $\\mathrm{Ni(Ni(Cp)_2/H_2O/H_2^*)}$ </td><td>Hole (TaN)</td><td>3.3</td><td>165</td><td>C</td><td></td><td>SEM</td><td>3.3</td><td>221</td></tr><tr><td rowspan=\"3\"> $\\mathrm{Cu(Cu(acac)_2/H_2^*)}$ </td><td>Trench ( $\\mathrm{SiO_2}$ )</td><td>1.75</td><td>85</td><td>C</td><td></td><td>SEM</td><td>1.75</td><td>222</td></tr><tr><td></td><td>2.5</td><td>85</td><td></td><td></td><td></td><td>2.5</td><td>222</td></tr><tr><td></td><td>4.5</td><td>85</td><td></td><td></td><td></td><td>4.5</td><td>222</td></tr><tr><td rowspan=\"2\"> $\\mathrm{Ru(Ru(EtCp)_2/NH_3^*)}$ </td><td>Trench</td><td>2</td><td>290</td><td></td><td></td><td>TEM</td><td> $2^{223}$ </td><td>97</td></tr><tr><td>Si,Si/TaN</td><td></td><td></td><td></td><td></td><td></td><td></td><td></td></tr><tr><td>Ag</td><td>Trench</td><td>30</td><td>120</td><td>RC</td><td></td><td>FE-SEM</td><td> $5^{224}$ </td><td>198</td></tr><tr><td> $(\\mathrm{Ag(fod)(PEt_3)/H_2^*)}$ </td><td> $(\\mathrm{SiO_2/TiN})$ </td><td></td><td></td><td></td><td></td><td></td><td></td><td></td></tr><tr><td>Ag</td><td>Trench</td><td>4.5</td><td>140</td><td>RE</td><td></td><td>SEM</td><td>4.5</td><td>225</td></tr><tr><td> $(\\mathrm{(Ag(O_2C^tBu)(PEt_3))/H^*)$ </td><td></td><td></td><td></td><td></td><td></td><td></td><td></td><td></td></tr></table>",
111
+ "source": "mineru"
112
+ },
113
+ {
114
+ "table_id": 6,
115
+ "page_nr": 19,
116
+ "in_references": false,
117
+ "image": "images/page_019_table_006.jpg",
118
+ "image_name": "page_019_table_006.jpg",
119
+ "bbox": [
120
+ 81,
121
+ 134,
122
+ 915,
123
+ 244
124
+ ],
125
+ "table_caption": [
126
+ "TABLE IV. (Continued.)"
127
+ ],
128
+ "table_footnote": [],
129
+ "mineru_img_path": "images/868526b44e6f1a226fff409ad62386f20ea7264e6a88c265e589bf572c707855.jpg",
130
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/868526b44e6f1a226fff409ad62386f20ea7264e6a88c265e589bf572c707855.jpg",
131
+ "mineru_table_body": "<table><tr><td>Film (process)</td><td>Substrate</td><td>EAR</td><td>T (\u00b0C)</td><td>Plasma configuration</td><td>Exposure ( $10^3$ L)</td><td>Characterization method</td><td>Coated EAR</td><td>References</td></tr><tr><td rowspan=\"2\"> $Ir (Ir(acac)_3/O_2^*)$ </td><td>Hole (elongated)</td><td></td><td>370</td><td>I</td><td></td><td>SEM</td><td></td><td>226</td></tr><tr><td>Trench</td><td></td><td>370</td><td></td><td></td><td>SEM</td><td></td><td>169</td></tr><tr><td> $Pt (MeCpPtMe_3/O_2^*)^{227}$ </td><td>Trench</td><td>17</td><td>300</td><td>I</td><td></td><td>SEM</td><td>17 (D)</td><td>228</td></tr><tr><td> $Ta(TaCl_5/H_2^*)$ </td><td>Trench</td><td>3</td><td>250</td><td>I</td><td></td><td>SEM</td><td>3</td><td>229</td></tr></table>",
132
+ "source": "mineru"
133
+ },
134
+ {
135
+ "table_id": 7,
136
+ "page_nr": 19,
137
+ "in_references": false,
138
+ "image": "images/page_019_table_007.jpg",
139
+ "image_name": "page_019_table_007.jpg",
140
+ "bbox": [
141
+ 78,
142
+ 443,
143
+ 918,
144
+ 865
145
+ ],
146
+ "table_caption": [
147
+ "TABLE V. Sticking probabilities for several ALD reactants and the method how they were derived, as reported in the literature. Updated from H. C. M. Knoops et al., J. Electrochem. Soc. 157(12), G241\u2013G249 (2010)."
148
+ ],
149
+ "table_footnote": [],
150
+ "mineru_img_path": "images/327bb54c3f52457f09d48c7c586ce681193dd44e588fc20c17980ca0dbc88597.jpg",
151
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/327bb54c3f52457f09d48c7c586ce681193dd44e588fc20c17980ca0dbc88597.jpg",
152
+ "mineru_table_body": "<table><tr><td>Species</td><td>Deposited material</td><td>Method</td><td>T (\u00b0C)</td><td>Sticking probability</td><td>References</td></tr><tr><td rowspan=\"8\"> $Al(CH_3)_3$ </td><td rowspan=\"8\"> $Al_2O_3$ </td><td>Monte Carlo model</td><td>177</td><td>0.001</td><td>65</td></tr><tr><td>Ballistic model</td><td>225</td><td>0.026</td><td>200</td></tr><tr><td>Semi-Analytical model</td><td>200</td><td>0.1</td><td>67</td></tr><tr><td>DFT</td><td></td><td>0.1-0.9</td><td>176</td></tr><tr><td>Continuum model</td><td>300</td><td>0.00572</td><td>77</td></tr><tr><td>Monte Carlo model</td><td>200</td><td>0.02</td><td>128</td></tr><tr><td>Sum-frequency generation</td><td>100-300</td><td>0.002-0.005</td><td>237</td></tr><tr><td>Auger electron spectroscopy</td><td>25</td><td>0.01</td><td>235</td></tr><tr><td> $Hf(NEtMe)_4$ </td><td> $HfO_2$ </td><td>Monte Carlo model</td><td>180-270</td><td>0.03-0.6</td><td>180</td></tr><tr><td> $Ti(NMe_2)_4$ </td><td> $TiO_2$ </td><td>Monte Carlo model</td><td>180</td><td>0.02 \u00b1 0.005</td><td>178</td></tr><tr><td> $Ti(O^iPr)_4$ </td><td> $TiO_2$ </td><td>Ballistic model</td><td>125-225</td><td>0.04-0.1</td><td>204</td></tr><tr><td> $Cp^*Ti(OMe)_3$ </td><td> $TiO_2$ </td><td>Monte Carlo model</td><td>270</td><td>0.01</td><td>180</td></tr><tr><td rowspan=\"2\"> $TiCl_4$ </td><td rowspan=\"2\">TiN</td><td>QCM</td><td>25-125</td><td>0.006 \u00b1 0.002</td><td>236</td></tr><tr><td>Continuum model</td><td>110</td><td>0.1</td><td>77</td></tr><tr><td> $ZnEt_2$ </td><td>ZnO</td><td>Monte Carlo model</td><td>177</td><td>0.007</td><td>65</td></tr><tr><td> $SiCl_4$ </td><td> $SiO_2$ </td><td>Monte Carlo model</td><td></td><td> $10^{-8}$ </td><td>65 and 239</td></tr><tr><td> $H_2Si[N(C_2H_5)_2]_2$ </td><td> $SiO_2$ </td><td>Monte Carlo model</td><td>300</td><td> $3 \\times 10^{-5}$ </td><td>128</td></tr><tr><td> $Zr(NMe_2)_4$ </td><td>ZrO</td><td>QCM</td><td>200</td><td>0.07</td><td>78</td></tr><tr><td> $Co(C_5H_5)_2$ </td><td>Co</td><td>Monte Carlo model</td><td>300</td><td>0.002</td><td>220</td></tr><tr><td rowspan=\"4\"> $H_2O$ </td><td rowspan=\"4\"> $Al_2O_3$ </td><td>DFT</td><td></td><td>0.01-0.1</td><td>176</td></tr><tr><td>Sum-frequency generation</td><td>100</td><td>0.000001</td><td>238</td></tr><tr><td>Sum-frequency generation</td><td>300</td><td>0.0001</td><td>238</td></tr><tr><td>Auger electron spectroscopy</td><td>25</td><td> $0.25; 0.009^{240}$ </td><td>235</td></tr><tr><td> $O_3$ </td><td> $Al_2O_3$ </td><td>DFT</td><td></td><td>0.001-0.01</td><td>176</td></tr><tr><td> $O^*$ </td><td> $Al_2O_3$ </td><td>DFT</td><td></td><td>0.1-0.9</td><td>176</td></tr><tr><td> $H^*$ </td><td>TiN</td><td>QCM</td><td>25-125</td><td>0.0003 \u00b1 0.0001</td><td>236</td></tr><tr><td> $N^*$ </td><td>TiN</td><td>QCM</td><td>25-125</td><td>0.01 \u00b1 0.002</td><td>236</td></tr></table>",
153
+ "source": "mineru"
154
+ },
155
+ {
156
+ "table_id": 8,
157
+ "page_nr": 20,
158
+ "in_references": false,
159
+ "image": "images/page_020_table_008.jpg",
160
+ "image_name": "page_020_table_008.jpg",
161
+ "bbox": [
162
+ 81,
163
+ 156,
164
+ 486,
165
+ 283
166
+ ],
167
+ "table_caption": [
168
+ "TABLE VI. Measured recombination probabilities of ozone for various surfaces at different temperatures. Reprinted with permission from H. C. M. Knoops et al., Chem. Mater. 23(9), 2381\u20132387 (2011). Copyright 2011 American Chemical Society."
169
+ ],
170
+ "table_footnote": [],
171
+ "mineru_img_path": "images/1c3bc97743058b398bb9206ae4a6ef679db64b49bb28281e3c8c4e43476c9615.jpg",
172
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/1c3bc97743058b398bb9206ae4a6ef679db64b49bb28281e3c8c4e43476c9615.jpg",
173
+ "mineru_table_body": "<table><tr><td>Surface</td><td>Temperature (\u00b0C)</td><td>Recombination probability</td></tr><tr><td> $Al_{2}O_{3}$ </td><td>100-200</td><td> $<10^{-6}$ </td></tr><tr><td rowspan=\"3\">ZnO</td><td>100</td><td> $<10^{-6}$ </td></tr><tr><td>150</td><td> $(5 \\pm 2) \\times 10^{-5}$ </td></tr><tr><td>200</td><td> $>10^{-3}$ </td></tr><tr><td>Pt</td><td>100</td><td> $>10^{-3}$ </td></tr><tr><td> $MnO_{x}$ </td><td>100</td><td> $>10^{-3}$ </td></tr></table>",
174
+ "source": "mineru"
175
+ },
176
+ {
177
+ "table_id": 9,
178
+ "page_nr": 20,
179
+ "in_references": false,
180
+ "image": "images/page_020_table_009.jpg",
181
+ "image_name": "page_020_table_009.jpg",
182
+ "bbox": [
183
+ 509,
184
+ 156,
185
+ 916,
186
+ 708
187
+ ],
188
+ "table_caption": [
189
+ "TABLE VII. Overview of the surface recombination probabilities of O, H, and N atoms on different surfaces as reported in the literature. Updated from H. C. M. Knoops et al., J. Electrochem. Soc. 157(12), G241\u2013G249 (2010)."
190
+ ],
191
+ "table_footnote": [],
192
+ "mineru_img_path": "images/251c46a3c1038321749631a6ea3875708ea6d0e334e9e70104b1479847dc7538.jpg",
193
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/251c46a3c1038321749631a6ea3875708ea6d0e334e9e70104b1479847dc7538.jpg",
194
+ "mineru_table_body": "<table><tr><td>Atom</td><td>Surface</td><td>Recombination probability r</td><td>References</td></tr><tr><td rowspan=\"17\">O</td><td rowspan=\"2\">Alumina</td><td>0.0021</td><td>250</td></tr><tr><td>0.0097 \u00b1 0.0019</td><td>251</td></tr><tr><td>Silica</td><td>0.0004</td><td>252</td></tr><tr><td>Titania</td><td>0.014 \u00b1 0.003</td><td>251</td></tr><tr><td>Iron(III)oxide</td><td>0.0052</td><td>250</td></tr><tr><td>Iron(II, III)oxide</td><td>0.015 \u00b1 0.003</td><td>251</td></tr><tr><td rowspan=\"2\">Cobalt oxide</td><td>0.0049</td><td>250</td></tr><tr><td>0.029 \u00b1 0.006</td><td>251</td></tr><tr><td>Oxidized cobalt</td><td>0.085 \u00b1 0.005</td><td>253</td></tr><tr><td>Nickel oxide</td><td>0.0089</td><td>250</td></tr><tr><td>Oxidized nickel</td><td>0.27 \u00b1 0.04</td><td>254</td></tr><tr><td>Copper (II) oxide</td><td>0.043</td><td>250</td></tr><tr><td>Oxidized copper</td><td>0.225</td><td>253</td></tr><tr><td>Zinc oxide</td><td>0.00044</td><td>250</td></tr><tr><td rowspan=\"2\">Pyrex</td><td>0.000045</td><td>250</td></tr><tr><td>0.0020 \u00b1 0.0005</td><td>255</td></tr><tr><td>Stainless steel</td><td>0.0702\u00b1 0.009</td><td>256</td></tr><tr><td rowspan=\"4\">N</td><td>Aluminum</td><td>0.0018</td><td>257</td></tr><tr><td>Silicon</td><td>0.0016</td><td>257</td></tr><tr><td>Silica</td><td>0.00021 \u00b1 0.00003</td><td>258</td></tr><tr><td>Stainless steel</td><td>0.0063</td><td>257</td></tr><tr><td rowspan=\"14\">H</td><td>Aluminum</td><td>0.29</td><td>259</td></tr><tr><td rowspan=\"2\">Oxidized aluminum</td><td>0.0018 \u00b1 0.0003</td><td>260</td></tr><tr><td>0.0017 \u00b1 0.0002</td><td>261</td></tr><tr><td rowspan=\"2\">Silicon</td><td>0.8</td><td>262</td></tr><tr><td>0.66</td><td>263</td></tr><tr><td>Oxidized silicon</td><td>0.0030 \u00b1 0.0003</td><td>260</td></tr><tr><td>Titanium</td><td>0.35</td><td>259</td></tr><tr><td rowspan=\"2\">Nickel</td><td>0.25</td><td>259</td></tr><tr><td>0.18 \u00b1 0.03</td><td>260</td></tr><tr><td>Copper</td><td>0.14</td><td>259</td></tr><tr><td rowspan=\"2\">Pyrex</td><td>0.0058 \u00b1 0.0018</td><td>259</td></tr><tr><td>0.00094 \u00b1 0.0004</td><td>261</td></tr><tr><td>Stainless steel</td><td>0.030 \u00b1 0.014</td><td>260</td></tr><tr><td>Oxidized stainless steel</td><td>0.0022 \u00b1 0.0002</td><td>261</td></tr></table>",
195
+ "source": "mineru"
196
+ },
197
+ {
198
+ "table_id": 10,
199
+ "page_nr": 22,
200
+ "in_references": false,
201
+ "image": "images/page_022_table_010.jpg",
202
+ "image_name": "page_022_table_010.jpg",
203
+ "bbox": [
204
+ 128,
205
+ 124,
206
+ 878,
207
+ 872
208
+ ],
209
+ "table_caption": [
210
+ "TAB LE VI I I <sub>.</sub> Overview of d ifferent model l i n<sub>g</sub> works descri bi n<sub>g</sub> the conformal it<sub>y</sub> of ALD <sub>p</sub>rocess <sub>,</sub> l isted i n the ch ronolo<sub>g</sub> ical order"
211
+ ],
212
+ "table_footnote": [],
213
+ "mineru_img_path": "images/08b5e8f578a20f87da86ba98f51507119c813eff74a1b3a3effded30732c4dbd.jpg",
214
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/08b5e8f578a20f87da86ba98f51507119c813eff74a1b3a3effded30732c4dbd.jpg",
215
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td>Gobbert $^{282}$ </td><td>Ballistic</td><td>Molecular flowReversible adsorption during first ALD reaction, irreversible reaction during second ALD reactionSpecies fluxes constant over small time scales</td><td>2D</td><td>Trench</td><td>Predict optimal pulse durationsSimulation results for both ALD reactions and purge steps</td></tr><tr><td>Gordon $^{62}$ </td><td>Analytical (conductance formulae)</td><td>Molecular flowIrreversible reactions assumedCosine distributed re-emission directionVapor by-products neglectedNo depletion effects</td><td>3D</td><td>HoleTrench</td><td> $\\frac{Pt}{K_{max}\\sqrt{2\\pi mkT}} = 1 + \\frac{19}{4}a + \\frac{3}{2}a^{2}$ Formula to estimate the minimum exposure required for conformal coating of a hole/trench with an aspect ratio $a$ </td></tr><tr><td>Elam $^{65}$ </td><td>Monte Carlo</td><td>Molecular flowMolecule is irreversibly adsorbed if random number &lt; sRe-emission of the molecule over a distance of $\\pm d_i^{289}$ with $d_i$ the diameter of the pore at the ith positionAll nanopores identical and molecules are entering the pores from both ends with equal rate</td><td>1D</td><td>AAO</td><td>Predict minimum exposure for conformal coating $s \\gg H$ diffusion limited growth type integrated coverage $\\sim t^{1/2}$ $s \\ll H$ reaction limited growth type integrated coverage $\\sim t$ </td></tr><tr><td>Neizvestny $^{274}$ </td><td>Monte Carlo</td><td>Only reactant molecules on the substrate are considered, not those in the gaseous phaseBy-products evaporate immediatelyNucleation starts around defects(sticking centers)</td><td>3D</td><td>Porous substrate</td><td>Growth per cycle stabilization after 2\u20134 cycles due to the roughness of the surface which increases nucleation</td></tr><tr><td>Kim $^{204}$ </td><td>Ballistic</td><td>Molecular flowIrreversible Langmuir adsorptionStudied 3 re-emission mechanisms:Cosine distributed, random, and specularAll reactant molecules chemisorbed on the surface are converted into a solid filmIdeal gas at the hole entrance (flux</td><td>3D</td><td>Hole</td><td>Study step coverage depending on the reactant injection time</td></tr></table>",
216
+ "source": "mineru"
217
+ },
218
+ {
219
+ "table_id": 11,
220
+ "page_nr": 23,
221
+ "in_references": false,
222
+ "image": "images/page_023_table_011.jpg",
223
+ "image_name": "page_023_table_011.jpg",
224
+ "bbox": [
225
+ 128,
226
+ 124,
227
+ 878,
228
+ 880
229
+ ],
230
+ "table_caption": [
231
+ "TABLE VI I I <sub>.</sub> ( Continued. )"
232
+ ],
233
+ "table_footnote": [],
234
+ "mineru_img_path": "images/36e5c77c8e28bb0e2527cc5e783ded7214edb771ea46f551035027cb28f9c8ec.jpg",
235
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/36e5c77c8e28bb0e2527cc5e783ded7214edb771ea46f551035027cb28f9c8ec.jpg",
236
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td> $Rose^{178}$ </td><td>Monte Carlo</td><td>constant in time)Molecular flow Adsorption if random number &lt; s Re-emission according a random direction</td><td>2D</td><td>Hole</td><td>Predict thickness profileMethod to determine s</td></tr><tr><td> $Dendooven^{67}$ </td><td>Semi-analytical (conductance formulae)</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission directionSurface reactions occur at a much faster time scale than gas transport into the holeIncoming flux at pore entrance constant in time</td><td>1D</td><td>Cylindrical hole</td><td>Predict coverage as a function of depthExtension Gordon model: Sticking probability different from unity</td></tr><tr><td> $Lee^{290}$ </td><td>Continuum</td><td>Molecular flowSticking probability of unity\u201cOuter\u201d transport of molecules is much faster than transport into the poresOnly radial diffusionConcentration of reactant molecules is constantIrreversible adsorption</td><td>3D</td><td>Cylindrical, spherical, and planar monoliths with tortuous pores</td><td>Calculate minimum exposure time for conformal coating. This exposure is largely dependent on the shape of the substrate.</td></tr><tr><td> $Dendooven^{70}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission directionRecombination probability</td><td>3D</td><td>Hole</td><td>Predict coverage as a function of depth of the feature, for PE-ALD</td></tr><tr><td> $Knoops^{66}$ </td><td>Monte Carlo</td><td>Molecular flow $s,r\\ constant^{291}$ Cosine distributed re-emission direction</td><td>2D</td><td>Trench</td><td>Simulate PE-ALDIntroduction of recombination limited growth type</td></tr><tr><td> $Adomaitis^{266}$ </td><td>Ballistic</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission directionReactant in - reactant out = reactant consumedSteady-state fluxes</td><td>3D</td><td>Circular hole</td><td>Derive reactant transmission probability functions for intra pore feature fluxes</td></tr></table>",
237
+ "source": "mineru"
238
+ },
239
+ {
240
+ "table_id": 12,
241
+ "page_nr": 24,
242
+ "in_references": false,
243
+ "image": "images/page_024_table_012.jpg",
244
+ "image_name": "page_024_table_012.jpg",
245
+ "bbox": [
246
+ 128,
247
+ 124,
248
+ 878,
249
+ 875
250
+ ],
251
+ "table_caption": [
252
+ "TABLE VI I I <sub>.</sub> ( Continued. )"
253
+ ],
254
+ "table_footnote": [],
255
+ "mineru_img_path": "images/334eb716deb704c09afa90d163843385a9a433dc982b25c828d20e5a4c4466a2.jpg",
256
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/334eb716deb704c09afa90d163843385a9a433dc982b25c828d20e5a4c4466a2.jpg",
257
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td>Musschoot $^{69}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionRe-emission according inverse reflectionParticles in the medium are at rest, and the moving particle is smallNeglect multiple collisions in a cellTransport equations (transmission, loss, and reflection probability)</td><td>1D</td><td>Hole filled with non-woven polyester</td><td>Simulate thermal and PE-ALDPredict coverage as function of depth in porous/fibrous substrate</td></tr><tr><td>Yanguas-Gil $^{272}$ </td><td>Continuum</td><td>Molecular flowIrreversible Langmuir adsorptionThe surface coverage changes concurrently with the diffusion process $^{292}$ Time-dependent reaction equation</td><td>1D</td><td>Via</td><td>Predict saturation exposure times and thickness profilesSuited for high tortuosity structures (high number of wall collisions)Can be extended for viscous flow, 3D,...</td></tr><tr><td>Shimizu $^{220}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission direction</td><td>2D</td><td>Trench</td><td>Determine sticking probability</td></tr><tr><td>Yazdani $^{100}$ </td><td>Continuum</td><td>Molecular flowQuick equilibrium within and outside the CNT arraysFast distribution of carrier gasAdsorption rate &gt;&gt; diffusion rateAnalytic approximation for s = 1Exclude discrete nucleation phase $^{293}$ </td><td>3D</td><td>CNT</td><td>A larger precursor supply is needed with increasing film thickness due to the increasing diameter of CNTs in combination with a larger surface area, which results in a limited penetration depth and non-uniform thickness</td></tr><tr><td>Keuter $^{294}$ </td><td>Continuum</td><td>Based on the model by Yanguas-Gil $^{272}$ Including second-order kineticsTransport to the substrate is not consideredPores are not taken individually into account (mean porosity, tortuosity, pore size, and Knudsen diffusion coefficient)Only reaction sites which are not shielded are taken into account</td><td>1D</td><td>Porous substrate</td><td>Predict thickness profile</td></tr></table>",
258
+ "source": "mineru"
259
+ },
260
+ {
261
+ "table_id": 13,
262
+ "page_nr": 25,
263
+ "in_references": false,
264
+ "image": "images/page_025_table_013.jpg",
265
+ "image_name": "page_025_table_013.jpg",
266
+ "bbox": [
267
+ 128,
268
+ 101,
269
+ 878,
270
+ 679
271
+ ],
272
+ "table_caption": [
273
+ "TABLE VIII <sub>.</sub> (Continued. )"
274
+ ],
275
+ "table_footnote": [],
276
+ "mineru_img_path": "images/f8e53841d662047578e13ed486f08957bc0c9c3dcf984665dfdd3e22fdff5fce.jpg",
277
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/f8e53841d662047578e13ed486f08957bc0c9c3dcf984665dfdd3e22fdff5fce.jpg",
278
+ "mineru_table_body": "<table><tr><td>References</td><td>Main modelling approach</td><td>Key assumptions</td><td>Simulation space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td rowspan=\"2\"> $Cremers^{51}$ </td><td>Monte Carlo</td><td>Molecular flowIrreversible Langmuir adsorptionCosine distributed re-emission direction</td><td>3D</td><td>Square holeSquare pillar</td><td>The required exposure for conformal coating of an array of pillars is a factor of 2-30 times smaller than an array of holes with equal surface area</td></tr><tr><td>Analytic</td><td>Molecular flowInitial sticking coefficient of unityCosine distributed re-emission direction</td><td></td><td></td><td></td></tr><tr><td> $Schwille^{129}$ </td><td>Monte Carlo</td><td>Molecular and viscous flowCosine distributed/specular re-emission directionCoverage if random number &lt; s</td><td>2Dcentro-symmetric</td><td>Cavity</td><td>Predict film thickness in 3D structuresExtraction of the sticking probability of the reactant</td></tr><tr><td rowspan=\"2\"> $Jin^{295}$ </td><td>Monte Carlo</td><td>Molecular and viscous flow</td><td>3D</td><td>Nanoparticle agglomerates</td><td>Predict pulse time for conformal coating</td></tr><tr><td>Analytic</td><td>Molecular flow</td><td></td><td></td><td></td></tr><tr><td rowspan=\"2\"> $Poodt^{139}$ </td><td>Monte Carlo</td><td>Molecular and viscous flowIrreversible Langmuir adsorptionSimplified diffuse reflection $model^{296}$ </td><td>2D</td><td>Trench</td><td>Predict exposure for 95% coverage</td></tr><tr><td>Analytic</td><td>Molecular and viscous flow</td><td>3D</td><td>Hole</td><td>Predict the saturation dose for complete coverage (only valid in the diffusion limited growth type)</td></tr><tr><td> $Ylilammi^{77}$ </td><td>Continuum</td><td>Molecular flowReversible Langmuir adsorptionIrreversible successive surface reaction</td><td>1D</td><td>LHAR</td><td>Calculate the thickness profile in high-aspect ratio trenchesExtract kinetic growth information</td></tr></table>",
279
+ "source": "mineru"
280
+ },
281
+ {
282
+ "table_id": 14,
283
+ "page_nr": 26,
284
+ "in_references": false,
285
+ "image": "images/page_026_table_014.jpg",
286
+ "image_name": "page_026_table_014.jpg",
287
+ "bbox": [
288
+ 78,
289
+ 134,
290
+ 915,
291
+ 533
292
+ ],
293
+ "table_caption": [
294
+ "TABLE IX. Overview of multiscale modelling works describing the conformality of ALD, listed in the chronological order."
295
+ ],
296
+ "table_footnote": [],
297
+ "mineru_img_path": "images/b56acd30e8180406f2b6f06e60bdc9168ed57578634db1657d87c952b2f13934.jpg",
298
+ "mineru_source_image": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/images/b56acd30e8180406f2b6f06e60bdc9168ed57578634db1657d87c952b2f13934.jpg",
299
+ "mineru_table_body": "<table><tr><td>References</td><td>Scale</td><td>Model</td><td>Key assumptions</td><td>Space</td><td>Geometry</td><td>Conclusion</td></tr><tr><td rowspan=\"2\">Prechtl $^{176}$ </td><td>Feature</td><td>Ballistic</td><td rowspan=\"2\">B3LYP gradient corrected DFT functionalMolecular flowViscous flow</td><td>2D</td><td>Trench</td><td rowspan=\"2\">Derive the activation energy of the initial adsorption and sFor low s, depletion on the reactor scale is small; filling time ~ 1/sFor high s, filling time independent of sPredict minimum exposure for conformal coating</td></tr><tr><td>Reactor</td><td></td><td>2D</td><td>Showerhead reactor</td></tr><tr><td rowspan=\"2\">Lankhorst $^{230}$ </td><td>Feature</td><td>Continuum</td><td>Molecular flow</td><td>1D</td><td>Trench</td><td rowspan=\"2\">Deposition time for conformal coating of trenched wafers &gt;&gt; than for flat wafers</td></tr><tr><td>Reactor</td><td>Continuum</td><td>Viscous flow</td><td>3D</td><td>Batch reactor</td></tr><tr><td rowspan=\"2\">Adomaitis $^{266,270}$ </td><td>Feature</td><td>Continuum</td><td>Molecular flow</td><td>1D</td><td rowspan=\"2\">Nanopore</td><td rowspan=\"2\">Observe GPC, film density, and surface roughness with varying ALD cycles and reactant dose</td></tr><tr><td>Reaction</td><td>Monte Carlo</td><td>Molecular flow</td><td>2D</td></tr><tr><td rowspan=\"2\">Yanguas-Gil $^{264}$ </td><td>Feature</td><td>Ballistic</td><td rowspan=\"2\">Markov chainMolecular flowCosine distributed re-emission directionMultiple reaction channels each with a specific probability</td><td rowspan=\"2\">3D</td><td rowspan=\"2\">Circular pores</td><td rowspan=\"2\">Track the probabilities as a function of the number of collisionsGeneral expression for the absorption, escape, and effective reaction probability of the featurePredict total exposure required to cover the substrate</td></tr><tr><td>Reaction</td><td></td></tr><tr><td rowspan=\"2\">Miyano $^{203}$ </td><td>Reactor</td><td>Continuum</td><td rowspan=\"2\">Flow rate of the gas below the inlet is uniform over the planeMolecular flowReversible physisorption, irreversible chemisorption</td><td>2D</td><td>Showerhead reactor</td><td rowspan=\"2\">Predict the thickness profile in a holePrecursor partial pressure and feeding time can be estimated for a hole with a given a</td></tr><tr><td>Feature</td><td></td><td>2D</td><td>Hole</td></tr></table>",
300
+ "source": "mineru"
301
+ }
302
+ ],
303
+ "mineru_output_dir": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto",
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+ "mineru_content_list": "original-run://profiling/ald/hybrid-engine/20260903T144004Z__ald__mineru-hybrid-engine__slurm-32744/mineru-output/Cremers - 2019/hybrid_auto/Cremers - 2019_content_list.json"
305
+ }
ALD/Cremers_2019/step1/pipeline/20260903T120211Z__ald__mineru-pipeline__slurm-32733/mineru-output/auto/Cremers - 2019.md ADDED
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