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85e9684 | 1 2 3 4 5 6 7 8 9 10 11 12 13 | # Atomic Layer Deposition (ALD)
Recorded Tabulus experiment artifacts for the **Atomic Layer Deposition** corpus.
## Papers
- `Cremers_2019/` — Cremers, Puurunen & Dendooven (2019), *Conformality in atomic layer deposition: Current status overview of analysis and modelling*. DOI: [10.1063/1.5060967](https://doi.org/10.1063/1.5060967)
- `Miikkulainen_2013/` — Miikkulainen et al. (2013), *Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends*. DOI: [10.1063/1.4757907](https://doi.org/10.1063/1.4757907)
- `Puurunen_2005/` — Puurunen (2005), *Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process*. DOI: [10.1063/1.1940727](https://doi.org/10.1063/1.1940727)
Each paper directory follows the same Step 1–7 organization described in the
top-level `README.md`. Adapter-specific subdirectories preserve the actual
execution granularity of the recorded runs. |